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1. 发明公开

EP1661216A2 ELECTRODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：垫FLUOR气体放电激光器
公开(公告)号：EP1661216A2
公开(公告)日：2006-05-31
申请号：EP04778353.5
申请日：2004-07-16
申请人： Cymer, Inc.
发明人： MORTON, Richard, G. , MOOSMAN, Bryan , DYER, Timothy , CARMICHAEL, James, A. , ZHANG, Jiping
IPC分类号： H01S1/00
CPC分类号： H01S3/0385 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0384 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251
摘要： Fluorine gas discharge laser electrodes and electrode systems are disclosed that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition disclosed are electrodes that may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. This may also comprise at least one of the first and second gas discharge electrodes has imbedded therein a first and a second auxiliary field creating magnet. Also disclosed is an electrode that may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material. Also disclosed are electrodes that may comprise a first insert in the electrode body comprising an electrically conductive material having a different coefficient of thermal conductivity than the electrode body. Also disclosed are electrodes that may have a thin film of semi-conductive material coating at least the discharge footprint of the gas discharge electrode, or at least a portion of the discharge region covered with a pre-formed reef having generally uniform pore size and distribution, and methods of making such coatings or reef. Also disclosed is a method of forming an electrode by diffusion bonding a first piece of a first material to a second piece of a second material utilizing a diffusion bonding catalyst between the first piece of material and the second piece of material during the diffusion bonding step and machining the bonded pieces to form an electrode.

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