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1. 发明公开

EP1174768A1 Exposure apparatus and device manufacturing method using the same 失效
公开(公告)号：EP1174768A1
公开(公告)日：2002-01-23
申请号：EP01203844.4
申请日：1997-06-03
申请人： CANON KABUSHIKI KAISHA
发明人： Inoue, Mitsuru, c/o Canon Kabushiki Kaisha , Ebinuma, Ryuichi, c/o Canon Kabushiki Kaisha , Iwamoto, Kazunori, c/o Canon Kabushiki Kaisha , Osanai, Eiji, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： G03F7/20
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70833 , G03F7/709
摘要： A scanning exposure apparatus wherein a portion of a pattern of an original is projected on to a substrate through a projection optical system and wherein the original and the substrate are scanningly moved relatively to the projection optical system whereby the pattern of the original is transferred on to the substrate. The apparatus includes an original stage for holding the original, a base for supporting the original stage, and a supporting system for supporting the base at three positions, through dampers and pillar.

2. 发明公开

EP0480419A3 Positioning device 失效
标题翻译：定位装置
公开(公告)号：EP0480419A3
公开(公告)日：1992-09-02
申请号：EP91117290.6
申请日：1991-10-10
申请人： CANON KABUSHIKI KAISHA
发明人： Kubota, Yoichi, c/o Canon Kabushiki Kaisha , Kawamata, Naoki, c/o Canon Kabushiki Kaisha , Morisada, Masahiro, c/o Canon Kabushiki Kaisha , Fujii, Katsuhiro, c/o Canon Kabushiki Kaisha , Itoh, Hiroshi, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： G11B5/55
CPC分类号： G05B19/237 , G05B2219/31137 , G05B2219/33224 , G05B2219/33268 , G05B2219/34047 , G05B2219/37176 , G05B2219/37296 , G05B2219/41245 , G05B2219/41319 , G11B5/553
摘要： A positioning device comprising a motor, a driver for driving the motor, and a digital signal processor for performing an operation for positioning control for the motor.

3. 发明授权

EP1174768B1 Exposure apparatus and device manufacturing method using the same 失效
标题翻译：用于制造使用该方法的装置的曝光装置和方法
公开(公告)号：EP1174768B1
公开(公告)日：2010-09-29
申请号：EP01203844.4
申请日：1997-06-03
申请人： CANON KABUSHIKI KAISHA
发明人： Inoue, Mitsuru, c/o Canon Kabushiki Kaisha , Ebinuma, Ryuichi, c/o Canon Kabushiki Kaisha , Iwamoto, Kazunori, c/o Canon Kabushiki Kaisha , Osanai, Eiji, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： G03F7/20
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70833 , G03F7/709

4. 发明公开

EP0669517A2 Signal processing apparatus and displacement detecting apparatus using the same 失效
标题翻译： Signalverarbeitungsvorrichtung und Wegmessapparat。
公开(公告)号：EP0669517A2
公开(公告)日：1995-08-30
申请号：EP95102360.5
申请日：1995-02-20
申请人： CANON KABUSHIKI KAISHA
发明人： Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： G01D5/244
CPC分类号： G01D5/24476 , G01D5/2448 , G01D5/24495 , G01D5/2451
摘要： This specification discloses a signal processing apparatus for processing first and second periodic analog signals having the same period and having a fixed phase relation therebetween and having digitizing means for converting the first and second periodic analog signals into first and second digital signals in conformity with the respective amplitudes thereof, signal generating means responsive to the first and second periodic analog signals to generate a signal having a period shorter than the period of the first periodic analog signal, means for outputting the periodicity of the first periodic analog signal and first phase information of the first periodic analog signal from the signal from the signal generating means and processing means for producing second phase information of the first periodic analog signal from the first and second digital signals from the digitizing means, and correcting the periodicity from the output means on the basis of the first phase information and the second phase information.
摘要翻译：本说明书公开了一种用于处理具有相同周期并且具有固定相位关系的第一和第二周期性模拟信号的信号处理装置，并且具有数字化装置，用于将第一和第二周期性模拟信号转换成符合相应的第一和第二周期模拟信号的第一和第二数字信号信号发生装置响应于第一和第二周期性模拟信号以产生具有比第一周期性模拟信号的周期短的周期的信号;用于输出第一周期性模拟信号的周期性和第一周期模拟信号的第一相位信息的装置，来自信号发生装置的信号的第一周期性模拟信号和用于从来自数字化装置的第一和第二数字信号产生第一周期性模拟信号的第二相位信息的处理装置，并且基于第一阶段信息和第 e第二阶段信息。

5. 发明公开

EP0529582A1 Wave driven motor 失效
标题翻译： Vibrationswellenmotor。
公开(公告)号：EP0529582A1
公开(公告)日：1993-03-03
申请号：EP92114467.1
申请日：1992-08-25
申请人： CANON KABUSHIKI KAISHA
发明人： Mitarai, Reiji, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： H01L41/09 , H01L41/04
CPC分类号： H02N2/163 , H02N2/147
摘要： A motor is of the type in which a plurality of polarized piezo-electric elements are disposed on a vibrator and in which cyclic signals different in phase are applied to the respective elements to form standing waves to drive a moved body. An identical direction is employed for a direction of polarization of the piezo-electric elements in the motor. A plurality of consecutive elements are chosen for each of element groups. A cyclic signal of predetermined phase is applied to predetermined element groups.
摘要翻译：电动机是其中多个偏振压电元件设置在振动器上的类型，其中相位不同的循环信号施加到各个元件以形成驻波以驱动移动体。对于电动机中的压电元件的偏振方向采用相同的方向。为每个元件组选择多个连续的元件。将预定相位的循环信号施加到预定元件组。

6. 发明授权

EP0529582B1 Wave driven motor 失效
标题翻译： Vibrationswellenmotor
公开(公告)号：EP0529582B1
公开(公告)日：2000-02-09
申请号：EP92114467.1
申请日：1992-08-25
申请人： CANON KABUSHIKI KAISHA
发明人： Mitarai, Reiji, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： H01L41/09 , H01L41/04
CPC分类号： H02N2/163 , H02N2/147

8. 发明授权

EP0551096B1 Control device for a vibration driven motor 失效
标题翻译：用于振动驱动马达控制装置
公开(公告)号：EP0551096B1
公开(公告)日：1999-03-31
申请号：EP93100090.5
申请日：1993-01-05
申请人： CANON KABUSHIKI KAISHA
发明人： Mitarai, Reiji, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： H01L41/04
CPC分类号： H02N2/142 , H02N2/163

9. 发明公开

EP0669517A3 Signal processing apparatus and displacement detecting apparatus using the same 失效
标题翻译：信号处理装置和Wegmessapparat。
公开(公告)号：EP0669517A3
公开(公告)日：1996-01-31
申请号：EP95102360.5
申请日：1995-02-20
申请人： CANON KABUSHIKI KAISHA
发明人： Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： G01D5/244
CPC分类号： G01D5/24476 , G01D5/2448 , G01D5/24495 , G01D5/2451
摘要： This specification discloses a signal processing apparatus for processing first and second periodic analog signals having the same period and having a fixed phase relation therebetween and having digitizing means for converting the first and second periodic analog signals into first and second digital signals in conformity with the respective amplitudes thereof, signal generating means responsive to the first and second periodic analog signals to generate a signal having a period shorter than the period of the first periodic analog signal, means for outputting the periodicity of the first periodic analog signal and first phase information of the first periodic analog signal from the signal from the signal generating means and processing means for producing second phase information of the first periodic analog signal from the first and second digital signals from the digitizing means, and correcting the periodicity from the output means on the basis of the first phase information and the second phase information.

10. 发明公开

EP0551096A1 Control device for a vibration driven motor 失效
标题翻译： Kontrollvorrichtungfüreinen durch振动电动机。
公开(公告)号：EP0551096A1
公开(公告)日：1993-07-14
申请号：EP93100090.5
申请日：1993-01-05
申请人： CANON KABUSHIKI KAISHA
发明人： Mitarai, Reiji, c/o Canon Kabushiki Kaisha , Takeishi, Hiroaki, c/o Canon Kabushiki Kaisha
IPC分类号： H01L41/04
CPC分类号： H02N2/142 , H02N2/163
摘要： Disclosed is a control device for an ultrasonic motor. The device has a control calculation circuit for calculating position, i.e., the rotation amount and speed of the motor, a linearization function generation circuit for receiving the output signal from the control calculation circuit and outputting the amplitude information of a stator constituting the motor and the phase difference information of two driving signals for driving the stator, and a driving circuit responsive to the output signal from the generation circuit to supply the driving signals to the stator.
摘要翻译：公开了一种超声波马达的控制装置。该装置具有用于计算位置的控制计算电路，即电动机的旋转量和速度，用于从控制计算电路接收输出信号并输出构成电动机的定子的幅度信息的线性化函数发生电路，用于驱动定子的两个驱动信号的相位差信息，以及响应于来自发生电路的输出信号向驱动定子提供驱动信号的驱动电路。

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