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    • 6. 发明公开
    • Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus
    • 一种喷墨记录头基板此头,该基板的制造方法,以及喷墨记录装置
    • EP0930167A2
    • 1999-07-21
    • EP98124046.8
    • 1998-12-17
    • CANON KABUSHIKI KAISHA
    • Ozaki, TeruoOgawa, MasahikoHiroki, TomoyukiMichizuki, Muga
    • B41J2/16
    • B41J2/1604B41J2/14129B41J2/1626B41J2/1631B41J2/1642B41J2/1646B41J2202/03
    • In ink jet recording head in which a heating resistor (13) forming a heating portion (20), a wiring (14) electrically connected to the heating resistor, and a protecting film formed on the heating resistor and the wiring to protect the heating resistor and the wiring are arranged on a substrate (11) for the ink jet recording head, and an ink path communicated with a discharging port for discharging ink is formed on the substrate (11) for the ink jet recording head, the protecting film includes a first layer protecting film (15) for covering the heating resistor and the wiring, a second layer protecting film (16) formed on the first layer protecting film by a material different from that of the first layer protecting film and having an opening in a portion corresponding to the heating portion of the heating resistor and constructed by an inorganic material, and a third layer protecting film (17) constructed by the same material system as the first layer protecting film and covering the second layer protecting film and the first layer protecting film exposed from the opening.
    • 在其中的喷墨记录头的加热电阻器(13)形成电连接到加热电阻器的加热部分(20),布线(14),和保护膜形成在所述加热电阻和保护加热电阻器上的布线 和布线被布置在用于喷墨记录头的基片(11),以及与排出口连通用于排出墨水的墨水路径的基板被用于喷墨记录头形成在(11)中,保护电影包括 第一层保护膜 - (15),用于覆盖所述加热电阻和布线,第二层保护膜 - (16)形成在第一层保护膜由不同的材料做的第一层的保护膜,并具有到开口中的部分上 对应于加热电阻器的加热部分和无机材料构成的,并且由相同的材料构建系统作为第一层的第三层保护电影(17)保护膜和覆盖该 从开口的第二层保护膜和第一层保护膜露出。