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1. 发明公开

EP0522356A2 Method for detecting structural defect of film 失效
标题翻译： Verfahren zum Feststellen eines strukturellen Defektes eines Films。
公开(公告)号：EP0522356A2
公开(公告)日：1993-01-13
申请号：EP92110633.2
申请日：1992-06-24
申请人： CANON KABUSHIKI KAISHA
发明人： Albrecht, Otto, c/o Canon Kabushiki Kaisha , Eguchi, Ken, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/84 , G01N21/89 , G01N21/88
CPC分类号： G01N21/8422 , G01N21/88
摘要： Provide is a method for detecting defects in a film structure of a thin film formed on a substrate, comprising projecting a light flux in a direction precisely parallel or nearly parallel to the face of the substrate; separating a reflected light from the thin film and the substrate from a scattered light toward the direction precisely perpendicular or nearly perpendicular to the face of the substrate; and reading information only of the scattered light.
摘要翻译：提供一种用于检测在基板上形成的薄膜的薄膜结构中的缺陷的方法，包括在与基板的表面精确平行或几乎平行的方向上投射光束; 将来自薄膜和基板的反射光从散射光分离成与基板的表面精确垂直或几乎垂直的方向; 只读散射光的信息。

2. 发明公开

EP0522356A3 Method for detecting structural defect of film 失效
标题翻译：检测薄膜结构缺陷的方法
公开(公告)号：EP0522356A3
公开(公告)日：1993-06-30
申请号：EP92110633.2
申请日：1992-06-24
申请人： CANON KABUSHIKI KAISHA
发明人： Albrecht, Otto, c/o Canon Kabushiki Kaisha , Eguchi, Ken, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/84 , G01N21/89 , G01N21/88
CPC分类号： G01N21/8422 , G01N21/88
摘要： Provide is a method for detecting defects in a film structure of a thin film formed on a substrate, comprising projecting a light flux in a direction precisely parallel or nearly parallel to the face of the substrate; separating a reflected light from the thin film and the substrate from a scattered light toward the direction precisely perpendicular or nearly perpendicular to the face of the substrate; and reading information only of the scattered light.

3. 发明公开

EP0518366A1 Method and apparatus for forming LANGMUIR-BLODGETT films 失效
标题翻译： Verfahren und Vorrichtung zur Herstellung von LANGMUIR-BLODGETT-Filmen。
公开(公告)号：EP0518366A1
公开(公告)日：1992-12-16
申请号：EP92109936.2
申请日：1992-06-12
申请人： CANON KABUSHIKI KAISHA
发明人： Albrecht, Otto, c/o Canon Kabushiki Kaisha , Matsuda, Hiroshi, c/o Canon Kabushiki Kaisha
IPC分类号： B05D1/20
CPC分类号： B82Y30/00 , B05D1/206 , B82Y40/00
摘要： A method of forming a monomolecular film capable of independently controlling the process of forming a monomolecular film and the process of removing a part of the monomolecular film which has not been used in monomolecular film formation. The method includes, in addition to spreading a material for forming a monomolecular film onto a water surface, compressing the material on the water surface thereby transforming the material into a monomolecular film, and transferring the monomolecular film on the water surface onto a substrate, storing in a first region a part of the monomolecular film which has not been transferred to the substrate. The first region is located at a distance from a second region for preparing the monomolecular film with respect to a third region for transferring part of the film to the substrate, and has a water level lower than that of the third region.
摘要翻译：形成能够独立地控制形成单分子膜的工艺的单分子膜的方法和除去未用于单分子膜形成的单分子膜的一部分的方法。该方法除了将用于形成单分子膜的材料铺展在水面上之外，还压缩水面上的材料，从而将材料转化成单分子膜，并将水表面上的单分子膜转移到基板上，存储在第一区域中，未转移到基底的单分子膜的一部分。第一区域位于与用于将部分膜转移到基板的第三区域相对于用于制备单分子膜的第二区域的距离处，并且具有比第三区域的水位低的水位。

4. 发明授权

EP0522356B1 Method for detecting structural defect of film 失效
标题翻译：一种用于检测膜的结构缺陷的方法
公开(公告)号：EP0522356B1
公开(公告)日：1998-09-09
申请号：EP92110633.2
申请日：1992-06-24
申请人： CANON KABUSHIKI KAISHA
发明人： Albrecht, Otto, c/o Canon Kabushiki Kaisha , Eguchi, Ken, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/84 , G01N21/89 , G01N21/88
CPC分类号： G01N21/8422 , G01N21/88

5. 发明授权

EP0518366B1 Method and apparatus for forming LANGMUIR-BLODGETT films 失效
标题翻译：用于生产朗缪尔 - 布罗杰特膜的方法和装置
公开(公告)号：EP0518366B1
公开(公告)日：1996-04-03
申请号：EP92109936.2
申请日：1992-06-12
申请人： CANON KABUSHIKI KAISHA
发明人： Albrecht, Otto, c/o Canon Kabushiki Kaisha , Matsuda, Hiroshi, c/o Canon Kabushiki Kaisha
IPC分类号： B05D1/20
CPC分类号： B82Y30/00 , B05D1/206 , B82Y40/00

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