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2. 发明公开

EP3095754A1 LOW PRESSURE SENSOR AND FLOW SENSOR 有权
标题翻译： NIEDERDRUCKSENSOR UND FLUSSSENSOR
公开(公告)号：EP3095754A1
公开(公告)日：2016-11-23
申请号：EP16169090.4
申请日：2016-05-11
申请人： Amphenol Thermometrics, Inc.
发明人： Belov, Nickolas S. , Li, Lihua , Vu, Kim , Vu, Dinh
IPC分类号： B81B3/00
CPC分类号： G01L19/147 , B81B3/0021 , B81B2201/025 , B81B2201/0264 , B81B2203/0109 , G01L9/0047 , G01L9/0048 , G01L19/0618
摘要： A device/method for sensing a physical parameter, including a sensor die and a stress-sensitive circuit. The sensor die includes a semiconductor substrate and a cavity that creates an elastic element that bends in response to the physical parameter exerted on the sensor die. The elastic element includes at least at least one rigid island formed within the cavity, a thin area surrounding the at least one rigid island and having smaller thickness than the rigid island, and at least one stress concentrator at least partially formed in the thin area of the elastic element on the side of the substrate opposite the cavity. The stress-sensitive circuit includes at least one stress-sensitive component formed in the thin area of the elastic element. The at least one stress concentrator increases stress in the locations of the at least one stress-sensitive component resulting in an increase of the device sensitivity to the physical parameter.
摘要翻译：一种用于感测物理参数的装置/方法，包括传感器管芯和应力敏感电路。传感器管芯包括半导体衬底和空腔，其产生响应于施加在传感器管芯上的物理参数而弯曲的弹性元件。所述弹性元件包括形成在所述空腔内的至少一个刚性岛，围绕所述至少一个刚性岛的薄区，并且具有比所述刚性岛更小的厚度，以及至少部分地形成在所述刚性岛的薄区域中的至少一个应力集中器衬底侧的弹性元件与空腔相对。应力敏感电路包括形成在弹性元件的薄区域中的至少一个应力敏感元件。所述至少一个应力集中器增加所述至少一个应力敏感部件的位置的应力，从而导致对所述物理参数的装置灵敏度的增加。

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