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1. 发明授权

EP0503712B1 Support device with a tiltable object table, and optical lithographic device provided with such a support device 失效
标题翻译：带倾斜阶段保护装置，和具有这种装置的光学光刻设备。
公开(公告)号：EP0503712B1
公开(公告)日：1995-08-30
申请号：EP92200610.1
申请日：1992-03-03
申请人： Philips Electronics N.V. , ASM Lithography B.V.
发明人： Bouwer, Adrianus Gerardus , Baggen, Marcel Coenraad Marie , Janssen, Henricus Wilhelmus Aloysius , Bartray, Petrus Rutgerus , van Eijk, Jan
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： G03F7/70825 , B23Q1/36 , B23Q1/5462 , G03F7/70716 , H01L21/682

2. 发明公开

EP0973067A3 Positioning device and lithographic projection apparatus comprising such a device 审中-公开
标题翻译：的定位装置和一种光刻投影装置，包括这样的装置
公开(公告)号：EP0973067A3
公开(公告)日：2001-10-24
申请号：EP99305616.7
申请日：1999-07-15
申请人： ASM Lithography B.V.
发明人： Loopstra, Erik Roelof , Bouwer, Adrianus Gerardus , Janssen, Henricus Wilhelmus Aloysius , van der Schoot, Harmen Klaas
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/70716
摘要： A positioning device (3) comprising a first part (57) and a second part (65) which is displaceable relative to the first part by means of a system of Lorentz-force motors (79,81,83,85,87), whereby: relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder (97), said gas cylinder comprising: a housing (99) having a pressure chamber (103), which housing is coupled to the first part; and a piston (101) which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.

3. 发明公开

EP1052550A2 Multi-stage drive arrangements and their application in lithographic projection apparatus 审中-公开
标题翻译：安排用于驱动多个支承板和它们在光刻投影装置中使用
公开(公告)号：EP1052550A2
公开(公告)日：2000-11-15
申请号：EP00303201.8
申请日：2000-04-17
申请人： ASM LITHOGRAPHY B.V.
发明人： Renkens, Michael Jozefa Mathijs , Bouwer, Adrianus Gerardus , Driessen, Johannes Cornelis , Bisschops, Theodorus Hubertus Josephus , Soemers, Hermanus Mathias Joannes Rene , Vijfvinkel, Jakob
IPC分类号： G03F7/20
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70725
摘要： A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.
摘要翻译：为步进扫描手术的光刻设备具有用于晶片台三级结构。在步进 - 扫描术，长冲程阶段沿着这一行或列稳步移动到被曝光按顺序。在图的8字形的运动相对于长冲程阶段的中间扫描台移动所以做了精细阶段的净运动，所有这一切都被扫描阶段中进行，是曲折路径。

4. 发明公开

EP1052552A2 Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus 审中-公开
标题翻译： Gaslager zur Verwendung mit Vakuumkammern und deren Anwendung in lithographischen Projektionsapparaten
公开(公告)号：EP1052552A2
公开(公告)日：2000-11-15
申请号：EP00303219.0
申请日：2000-04-17
申请人： ASM LITHOGRAPHY B.V.
发明人： Bisschops, Theodorus Hubertus Josephus , Vijfvinkel, Jakob , Soemers, Hermanus Mathias Joannes Rene , Driessen, Johannes Cornelis , Renkens, Michael Jozefa Mathijs , Bouwer, Adrianus Gerardus
IPC分类号： G03F7/20
CPC分类号： F16C29/025 , F16C32/0614 , F16C33/748 , F16C2300/62 , G03F7/70716 , G03F7/70808 , G03F7/70816 , G03F7/70841
摘要： A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing
摘要翻译：在真空室中使用的轴承包括将加压气体排出到两个构件之间的间隙中的气体轴承，以保持这些构件之间的预定间隔。为了避免形成气体轴承的气体是不可接受的泄漏到真空室中，真空泵设置在真空室和气体轴承之间

5. 发明公开

EP0973067A2 Positioning device and lithographic projection apparatus comprising such a device 审中-公开
标题翻译：定位器和石版画Profektionsapparat mit einer solchen Vorrichtung
公开(公告)号：EP0973067A2
公开(公告)日：2000-01-19
申请号：EP99305616.7
申请日：1999-07-15
申请人： ASM Lithography B.V.
发明人： Loopstra, Erik Roelof , Bouwer, Adrianus Gerardus , Janssen, Henricus Wilhelmus Aloysius , van der Schoot, Harmen Klaas
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/70716
摘要： A positioning device comprising a first part and a second part which is displaceable relative to the first part by means of a system of Lorentz-force motors, whereby:

relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder, said gas cylinder comprising:
a housing having a pressure chamber, which housing is coupled to the first part; and a piston which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.
摘要翻译：一种定位装置，包括第一部分和第二部分，所述第一部分和第二部分可通过洛伦兹力马达系统相对于所述第一部分移动，由此：相对于所述第一部分，所述第二部分通过装置以Z方向至少一个气瓶，所述气瓶包括：壳体，其具有压力室，所述壳体联接到所述第一部分; 以及联接到所述第二部分并且可以在所述压力室中沿Z方向移位的活塞，所述活塞相对于所述壳体基本上与Z方向成直角地轴颈。

6. 发明公开

EP0503712A1 Support device with a tiltable object table, and optical lithographic device provided with such a support device 失效
标题翻译： Schützeinrichtungmit kippbarem Objekttisch，und optische Lithographieeinrichtung mit einer derartigen Einrichtung。
公开(公告)号：EP0503712A1
公开(公告)日：1992-09-16
申请号：EP92200610.1
申请日：1992-03-03
申请人： Philips Electronics N.V. , ASM Lithography B.V.
发明人： Bouwer, Adrianus Gerardus , Baggen, Marcel Coenraad Marie , Janssen, Henricus Wilhelmus Aloysius , Bartray, Petrus Rutgerus , van Eijk, Jan
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： G03F7/70825 , B23Q1/36 , B23Q1/5462 , G03F7/70716 , H01L21/682
摘要： A support device comprising a first and a second bearing unit for guiding the support device along a base surface and a straight guide extending parallel to the base surface, respectively. The support device has an object table which is coupled to a rigidification member and which is displaceable relative to the two bearing units in a z-direction transverse to the base surface and is tiltable about at least one axis of rotation directed parallel to the base surface by means of three force actuators. The rigidification member is coupled to the second bearing unit by means of a coupling member which is elastically deformable in the z-direction, and coupled to the first bearing unit via the force actuators, whereby a statically determined coupling of the rigidification member and the object table to the two bearing units is obtained.
The support device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in an optical lithographic device. In particular, an accurate focusing of the object may be obtained by the use of the support device in an optical lithographic device.
摘要翻译：一种支撑装置，包括用于沿基面引导支撑装置的第一和第二轴承单元和分别平行于基座表面延伸的直线导轨。该支撑装置具有一个被连接到刚性化构件上的物镜台，它能够相对于两个轴承单元沿横向于基座表面的z方向移动，并且可围绕平行于底面的至少一个旋转轴线倾斜通过三个力致动器。刚性构件通过可在z方向上可弹性变形的联接构件联接到第二轴承单元，并且经由力致动器联接到第一轴承单元，由此刚性确定的刚性构件和物体的联接得到两个轴承单元的表。支撑装置特别适用于亚微米范围内的物体的位移，例如在光学平版印刷装置中。特别地，可以通过在光学平版印刷设备中使用支持装置来获得对象的精确聚焦。

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