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    • 4. 发明公开
    • Method and apparatus for printing a pattern on a substrate
    • Verfahren und Vorrichtung zum Drucken eines Musters auf einem Substrat
    • EP2704204A1
    • 2014-03-05
    • EP13182450.0
    • 2013-08-30
    • APPLIED MATERIALS ITALIA S.R.L.
    • Galiazzo, MarcoVoltan, AlessandroCasarin, Alessandro
    • H01L31/0224H01L31/18
    • H01L31/022425B41M1/12H01L31/1876H05K3/1216H05K2203/1476Y02E10/50Y02P70/521
    • The present invention includes a method and apparatus for printing a pattern on a substrate. The method includes acquiring an image of a surface of the substrate having a plurality of print tracks and identifying a position of a print track portion on the plurality of print tracks. The method further includes determining adjustment parameters by comparing the position of the print track portion with a position of a predefined print track, and executing a subsequent printing operation based on the adjustment parameters. The apparatus includes at least one inspection unit and a computer readable medium containing instructions for a processor to execute a method for printing comprising: (i) identifying a position of a print track portion; (ii) determining adjustment parameters by comparing the position of the print track portion with a position of a predefined print track; and (iii) executing a subsequent printing operation based on the adjustment parameters.
    • 本发明包括用于在基板上印刷图案的方法和装置。 该方法包括获取具有多个打印轨迹的基板的表面的图像,并且识别多个打印轨道上的打印轨迹部分的位置。 该方法还包括通过将打印轨迹部分的位置与预定打印轨迹的位置进行比较来确定调节参数,以及基于调整参数执行后续打印操作。 该装置包括至少一个检查单元和包含用于处理器执行打印方法的指令的计算机可读介质,包括:(i)识别打印轨迹部分的位置; (ii)通过将打印轨迹部分的位置与预定打印轨迹的位置进行比较来确定调节参数; 和(iii)基于调整参数执行后续打印操作。