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1. 发明授权

EP1188918B1 Self-clearing vacuum purge system 有权
标题翻译： Selbsträumende真空清洁系统
公开(公告)号：EP1188918B1
公开(公告)日：2008-04-09
申请号：EP01121864.1
申请日：2001-09-11
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Zorich, Robert Sam , Silva, David James
IPC分类号： F02M25/08
CPC分类号： B01D45/00 , Y10T137/0396 , Y10T137/3084 , Y10T137/6606 , Y10T137/86083

2. 发明授权

EP1365041B1 Purgeable manifold 有权转让
标题翻译：可清洗歧管
公开(公告)号：EP1365041B1
公开(公告)日：2013-10-30
申请号：EP03011009.2
申请日：2003-05-16
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Martinez, Martin Casteneda , Steidl, Thomas Andrew , Vivanco, Gil , Silva, David James
IPC分类号： C23C16/44 , B08B9/00
CPC分类号： C23C16/4402 , B08B9/00 , Y10T137/3127 , Y10T137/87684

3. 发明公开

EP1188918A2 Self-clearing vacuum purge system 有权
标题翻译： Selbsträumende真空清洁系统
公开(公告)号：EP1188918A2
公开(公告)日：2002-03-20
申请号：EP01121864.1
申请日：2001-09-11
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Zorich, Robert Sam , Silva, David James
IPC分类号： F02M25/08
CPC分类号： B01D45/00 , Y10T137/0396 , Y10T137/3084 , Y10T137/6606 , Y10T137/86083
摘要： A vacuum purge system is provided to protect the vacuum pump (10) from becoming flooded with liquid that on occasion is purged with vapors from process equipment. The liquid is trapped in a vessel and then evaporated and exhausted through the vacuum pump (10) as vapor. Evaporation of trapped liquid is effected by reducing or stopping the purge stream to the trapping vessel while continuing to operate the vacuum pump, thereby reducing the absolute pressure within the vessel. Evaporation of liquid can also be effected by supplying heat to the trapped vessel, either in cooperation with or instead of the pressure reduction. Use of a programmable logic controller enables a cyclic operation that traps liquid from entering the pump, removes the trapped liquid as vapor, and then resumes normal purge operation.

4. 发明授权

EP1193309B1 Solvent blend for use in high purity precursor removal 有权
标题翻译：在除去高纯度前体的使用溶剂混合物
公开(公告)号：EP1193309B1
公开(公告)日：2004-11-03
申请号：EP01122661.0
申请日：2001-09-28
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Zorich, Robert Sam , Lei, Xinjian , Silva, David James , Trent, Cynthia Lee
IPC分类号： C11D7/50 , C11D11/00 , B08B9/027
CPC分类号： B08B9/032 , B08B9/00 , B08B9/0321 , C11D7/24 , C11D7/5018 , C11D7/5027 , C11D11/0064

5. 发明公开

EP1288544A3 Diaphragm valved manifold for chemicals 有权
标题翻译：隔膜阀化学品
公开(公告)号：EP1288544A3
公开(公告)日：2004-01-02
申请号：EP02018166.5
申请日：2002-08-19
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Zorich, Robert Sam , Steidl, Thomas Andrew , Silva, David James , Vivanco, Gil , Trent, Cynthia Lee
IPC分类号： F16K7/17 , F16K27/00
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684
摘要： A manifold for transfer of chemical, comprising; a heated first conduit (26) for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly (14) having first and second diaphragm valves (75,77), each valve having a diaphragm (74,74a) and a valve seat side (78,78a) and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit (16); a first connector in the first conduit for detaching the conduit from the vessel; a second conduit (12), for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve (75); and a third conduit (18), for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve (77).

6. 发明公开

EP1288544A2 Diaphragm valved manifold for chemicals 有权
标题翻译： Chemikalien公司
公开(公告)号：EP1288544A2
公开(公告)日：2003-03-05
申请号：EP02018166.5
申请日：2002-08-19
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Zorich, Robert Sam , Steidl, Thomas Andrew , Silva, David James , Vivanco, Gil , Trent, Cynthia Lee
IPC分类号： F16K7/17 , F16K27/00
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684
摘要： A manifold for transfer of chemical, comprising; a heated first conduit (26) for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly (14) having first and second diaphragm valves (75,77), each valve having a diaphragm (74,74a) and a valve seat side (78,78a) and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit (16); a first connector in the first conduit for detaching the conduit from the vessel; a second conduit (12), for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve (75); and a third conduit (18), for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve (77).
摘要翻译：用于转移化学品的歧管，包括：用于将容纳化学品的容器连接到另一容器的加热的第一导管（26），加压气体源和真空源; 具有第一和第二隔膜阀（75,77）的加热的第一截止阀组件（14），每个阀具有隔膜（74,74a）和阀座侧（78,78a）和隔膜侧，其中阀座每个阀的侧面与另一个阀的阀座侧并置，并且每个阀的每个阀座侧与第一管道（16）连通; 第一连接器，用于将管道从容器中分离出来; 用于将化学品输送到容器的第二导管（12），连接到第一阀（75）的隔膜侧的第二导管; 以及第三导管（18），用于将加压气体和真空传送到连接到第二阀（77）的隔膜侧的第一导管。

7. 发明授权

EP1288544B1 Diaphragm valved manifold for chemicals 有权
标题翻译：隔膜阀化学品
公开(公告)号：EP1288544B1
公开(公告)日：2010-06-02
申请号：EP02018166.5
申请日：2002-08-19
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Zorich, Robert Sam , Steidl, Thomas Andrew , Silva, David James , Vivanco, Gil , Trent, Cynthia Lee
IPC分类号： F16K7/17 , F16K27/00
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684

8. 发明公开

EP1327603A3 Cabinet for chemical delivery with solvent purge 有权
标题翻译：房屋与设备用于分配冲洗化学品
公开(公告)号：EP1327603A3
公开(公告)日：2003-10-15
申请号：EP03000047.5
申请日：2003-01-07
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Martinez, Martin Casteneda , Steidl, Thomas Andrew , Vivanco, Gil , Silva, David James
IPC分类号： B67D5/02
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.

9. 发明公开

EP1327603A2 Cabinet for chemical delivery with solvent purge 有权
标题翻译： Gehäusemit Vorrichtung zum Zapfen von Chemikalien mitSpüleinrichtung
公开(公告)号：EP1327603A2
公开(公告)日：2003-07-16
申请号：EP03000047.5
申请日：2003-01-07
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Martinez, Martin Casteneda , Steidl, Thomas Andrew , Vivanco, Gil , Silva, David James
IPC分类号： B67D5/02
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.
摘要翻译：本发明是一种将低蒸气压工艺化学品储存和输送到半导体制造工艺工具的装置，包括：a）用于储存工艺化学品的散装容器; b）用于将过程化学品递送到处理工具的处理容器; c）用于将过程化学品从散装容器输送到处理容器的第一歧管; d）含有一定量溶剂的溶剂容器， e）用于将过程化学品从处理容器输送到处理工具的第二歧管。也考虑了使用该装置的方法。

10. 发明公开

EP1193309A1 Solvent blend for use in high purity precursor removal 有权
标题翻译： Lösungsmittelmischungzur Anwendung bei der Entfernung hochreinerVorläufer
公开(公告)号：EP1193309A1
公开(公告)日：2002-04-03
申请号：EP01122661.0
申请日：2001-09-28
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Zorich, Robert Sam , Lei, Xinjian , Silva, David James , Trent, Cynthia Lee
IPC分类号： C11D7/50 , C11D11/00 , B08B9/027
CPC分类号： B08B9/032 , B08B9/00 , B08B9/0321 , C11D7/24 , C11D7/5018 , C11D7/5027 , C11D11/0064
摘要： The present invention is a process for cleaning a manifold which delivers high purity source chemical from a high purity source chemical container to a point of use after delivery of the high purity source chemical through the manifold is discontinued, comprising; evacuating the manifold by connection to a source of vacuum, terminating the evacuation, introducing at least one solvent for the high purity source chemical into the manifold from at least one source of the at least one solvent, dissolving any residual high purity source chemical in the manifold into the at least one solvent, venting a resulting mixture of residual high purity source chemical and solvent from the manifold, purging such as by pressurizing the manifold by connection to a source of preferably elevated pressure inert gas and terminating the purging i.e. pressurizing, before reintroducing high purity source chemical into the manifold.
摘要翻译：本发明是一种用于清洗歧管的方法，其将高纯度源化学物质从高纯度源化学品容器输送到中止使用的高纯度源化学品输送点之后，其包括：通过连接到真空源排出歧管，终止排气，从至少一种溶剂的至少一个源将至少一种用于高纯度源化学品的溶剂引入歧管中，将任何残留的高纯度源化学物质溶解在歧管进入至少一种溶剂，从歧管排出残留的高纯度源化学品和溶剂的混合物，清洗，例如通过连接到优选高压惰性气体源并通过加压来终止吹扫，即加压，在将高纯度源化学品重新引入歧管。

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