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    • 5. 发明公开
    • FABRY-PEROT SPECTRAL IMAGE MEASUREMENT
    • FABRY-PEROT光谱图像测量
    • EP3215805A1
    • 2017-09-13
    • EP15856966.5
    • 2015-10-23
    • Trutag Technologies, Inc.
    • LEARMONTH, TimothyFINKELSTEIN, Hod
    • G01B9/02
    • G01J3/26B82Y20/00G01J3/0208G01J3/0237G01J3/0259G01J3/0272G01J3/10G01J2003/102G01N21/255G01N21/27G01N2201/061G01N2201/0636
    • A system for wide-range spectral measurement includes one or more broadband sources, an adjustable Fabry-Perot etalon, and a detector. The one or more broadband sources is to illuminate a sample, wherein the one or more broadband sources have a short broadband source coherence length. The adjustable Fabry-Perot etalon is to optically process the reflected light to extract spectral information with fine spectral resolution. The detector is to detect reflected light from the sample, wherein the reflected light is comprised of multiple narrow-band subsets of the illumination light having long coherence lengths and is optically processed using a plurality of settings for the adjustable Fabry-Perot etalon, and wherein the plurality of settings includes a separation of the Fabry-Perot etalon plates that is greater than the broadband source coherence length but that is less than the long coherence lengths.
    • 用于宽范围光谱测量的系统包括一个或多个宽带源,可调法布里 - 珀罗标准具和检测器。 一个或多个宽带源将照亮样本,其中一个或多个宽带源具有短的宽带源相干长度。 可调节的法布里 - 珀罗标准具将光学处理反射光以提取精细光谱分辨率的光谱信息。 检测器检测来自样品的反射光,其中反射光由具有长相干长度的照明光的多个窄带子集组成,并且使用可调法布里珀罗标准具的多个设置进行光处理,并且其中 多个设置包括法布里 - 珀罗标准具板的分离,其大于宽带源相干长度。