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    • 8. 发明公开
    • A vapor deposition apparatus
    • VorrichtungfürGasphasenabscheidung
    • EP1531189A1
    • 2005-05-18
    • EP04026770.0
    • 2004-11-11
    • Specialty Coating Systems, Inc.
    • Christensen, Dennis R.
    • C23C16/44B05D7/24
    • C23C16/4412B05D1/60C23C16/4401Y10S414/135
    • A vapor deposition apparatus (1) for coating an item has a cleanroom side (29) that is accessible from inside a cleanroom and a service side (27) that is not accessible from inside the cleanroom. The apparatus has a vaporizer (3) for vaporizing solid coating material and a pyrolysis furnace (11) for heating the vaporized coating material to form a pyrolized gaseous coating material. A deposition enclosure (129) defines a deposition chamber for receiving an item to be coated. The deposition enclosure has an inlet (117) for flow of pyrolized gaseous coating material into the deposition chamber (129), an outlet (173) for flow of pyrolized gaseous coating material from the deposition chamber, an access door (133) for accessing the deposition chamber from the cleanroom side of the apparatus, and a service door (137) for accessing the deposition chamber from the service side of the apparatus.
    • 用于涂覆物品的气相沉积设备(1)具有洁净室侧(29),其可从无尘室内部无法进入的洁净室和服务侧(27)进入。 该装置具有用于蒸发固体涂层材料的蒸发器(3)和用于加热蒸发的涂层材料以形成热解气态涂层材料的热解炉(11)。 沉积封壳(129)限定用于接收待涂覆物品的沉积室。 沉积封壳具有用于将热解气态涂层材料流入沉积室(129)的入口(117),用于从沉积室流出热解气态涂层材料的出口(173),用于访问沉积室 来自设备的洁净室侧的沉积室以及用于从设备的维修侧接近沉积室的维修门(137)。
    • 9. 发明授权
    • TUMBLE COATER
    • 鼓涂布装置
    • EP1255874B1
    • 2003-07-16
    • EP01912790.1
    • 2001-02-16
    • SPECIALTY COATING SYSTEMS, INC.
    • YIRA, Joseph, H.NEITZKE, MarkMATTISON, Craig, K.
    • C23C14/50C23C16/458
    • C23C14/223C23C16/458
    • A mobile cellular tumble coater (10) and method is provided to coat articles with materials suitable for coating by vapor deposition under vacuum conditions. The mobile cellular tumble coater comprises multiple mobile part cells (12) disposed on a hollow cylindrical chamber of an inner support base positioned within a coating chamber (14) of a coating apparatus. Each mobile part cell comprises a hollow portion with an outer wall having multiple through holes large enough to permit vapors of coating material to flow into the mobile part cell and small enough to contain the articles therein. In an embodiment of the invention, the mobile part cells are removably attached to the inner support base by rigid cables in such a manner that enables the mobile part cells to swing from the inner support base. As the inner support base rotates during the coating process, the mobile part cells attached thereon are propelled away from the inner support base until downward rotation causes the mobile part cells to collide with the inner support base. Such collision produced mechanical agitation causes the articles contained within the mobile part cells to remain in a sufficiently mobile state during the coating process such that the articles do not stick together or become coated together.