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1. 发明公开

EP2299237A2 Gantry stage orthogonality error measurement method and error compensation method 审中-公开
标题翻译：一种用于测量正交性用于与门户和误差补偿方法的平台方法
公开(公告)号：EP2299237A2
公开(公告)日：2011-03-23
申请号：EP10009314.5
申请日：2010-09-08
申请人： Soonhan Engineering Corp.
发明人： Ko, Byoung gwan
IPC分类号： G01B21/04 , H01L21/68
CPC分类号： G01B21/24
摘要： The present invention relates to a Gantry stage orthogonality error measurement method and error compensation method for homing processing: more specifically, it relates to a Gantry stage orthogonality error measurement method and error compensation method for homing processing with an enhanced level of homing processing repeatability and a capability for minimizing orthogonality errors at the time of Gantry stage homing processing used with semiconductors, FPD equipment or precision machining equipment ( Fig. 4 ).
摘要翻译：本发明涉及一种用于归位一龙门平台正交性误差测量方法和误差补偿方法的处理：更具体地，它涉及一种龙门平台正交性误差测量方法和误差补偿方法，用于在归位处理的可重复性和一增强的水平归位处理能力用于在与半导体，FPD设备或精密加工设备（图4）中使用龙门平台归位处理时最小化正交性误差。

2. 发明公开

EP2296272A3 Method for detecting and filtering a random noise signal 审中-公开
标题翻译：用于检测和滤波随机噪声信号的方法
公开(公告)号：EP2296272A3
公开(公告)日：2017-05-24
申请号：EP10008023.3
申请日：2010-07-31
申请人： Soonhan Engineering Corp.
发明人： Ko, Byoung gwan
IPC分类号： H03H17/02
CPC分类号： H03H17/0261
摘要： A random noise signal detecting and filtering method includes: (a) calculating a difference value of data currently being input from a sensor in comparison with previous data stored in a register; (b) comparing the calculated difference value with a critical value; (c) determining whether the calculated difference value is greater than a maximum critical value or less than a minimum critical value; and (d) if the calculated difference value is greater than the maximum critical value or less than the minimum critical value, determining the current data be constitute a random signal and substituting the previous data for the current data (Figure 2).
摘要翻译：随机噪声信号检测和滤波方法包括：（a）与存储在寄存器中的先前数据相比较，计算当前从传感器输入的数据的差值; （b）将计算的差值与临界值进行比较; （c）确定所计算的差值是大于最大临界值还是小于最小临界值; （d）如果计算出的差值大于最大临界值或小于最小临界值，则确定当前数据构成一个随机信号并用以前的数据代替当前数据（图2）。

3. 发明公开

EP2299237A3 Gantry stage orthogonality error measurement method and error compensation method 审中-公开
标题翻译：一种用于测量正交性用于与门户和误差补偿方法的平台方法
公开(公告)号：EP2299237A3
公开(公告)日：2011-03-30
申请号：EP10009314.5
申请日：2010-09-08
申请人： Soonhan Engineering Corp.
发明人： Ko, Byoung gwan
IPC分类号： G01B21/04 , H01L21/68
CPC分类号： G01B21/24
摘要： The present invention relates to a Gantry stage orthogonality error measurement method and error compensation method for homing processing: more specifically, it relates to a Gantry stage orthogonality error measurement method and error compensation method for homing processing with an enhanced level of homing processing repeatability and a capability for minimizing orthogonality errors at the time of Gantry stage homing processing used with semiconductors, FPD equipment or precision machining equipment (Fig. 4).

4. 发明授权

EP2775360B1 Control apparatus of linear motion stage 有权
标题翻译：线性轴控制装置
公开(公告)号：EP2775360B1
公开(公告)日：2016-10-12
申请号：EP14000700.6
申请日：2014-02-27
申请人： Soonhan Engineering Corp.
发明人： Ko, Byoung Gwan
IPC分类号： G05B19/404
CPC分类号： G05D19/02 , G05B19/404 , G05B2219/49176

5. 发明授权

EP2027966B1 Sample traveling stage with flexure mechanism module to absorb the deformation of the slide 有权
标题翻译：样品与机制灵活的网络模块用于接收Gleitdeformation
公开(公告)号：EP2027966B1
公开(公告)日：2010-04-21
申请号：EP08013979.3
申请日：2008-08-05
申请人： Soonhan Engineering Corp. , Korea Advanced Institute of Science and Technology (KAIST)
发明人： Jung, Hun Taek , Kwon, Dae Gab , Kim, Jung Jae , Choi, Young Man , Ahn, Da Hoon
IPC分类号： B23Q1/62 , B23Q11/00 , H01L21/68
CPC分类号： H01L21/681 , B23Q2210/002 , G01R31/2893

6. 发明授权

EP2881699B1 System for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time 有权
标题翻译：用于实时补偿直线运动单平面龙门平台的动态和热畸变误差的系统
公开(公告)号：EP2881699B1
公开(公告)日：2018-04-18
申请号：EP14003962.9
申请日：2014-11-25
申请人： Soonhan Engineering Corp.
发明人： Seo, Jong Kyu , Shin, Soo Keun , Jung, Chul , Kwon, Yong Uk , Ko, Byoung Gwan , Rahul, Banik
IPC分类号： G01B5/00
CPC分类号： G05D3/12 , G01B5/0014 , G01D5/00 , G05B19/404
摘要： Disclosed are a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring and inspecting apparatuses using the system. The system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially moving gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially moving slider moving on the X-axially moving gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially moving gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and thermal deformity errors based on the data received from the first and the second two-dimensional position measuring unit (FIG. 1).

7. 发明公开

EP2950055A1 ENCODER HEAD ALIGNING APPARATUS 有权
标题翻译： CODIERERKOPFAUSRICHTUNGSVORRICHTUNG
公开(公告)号：EP2950055A1
公开(公告)日：2015-12-02
申请号：EP15167303.5
申请日：2015-05-12
申请人： Soonhan Engineering Corp.
发明人： Park, Yon Mook
IPC分类号： G01D5/244 , G01D5/347
CPC分类号： G01D5/24452 , G01D5/24433 , G01D5/34707
摘要： Disclosed is an encoder head aligning apparatus. The encoder head aligning apparatus according to an embodiment of the present invention includes:
a first support member connected to a moveable unit moved along a base;
a second support member connected to the first support member through a resilient member, the second support member being provided with an encoder head facing a linear scale attached to said base; and
an adjustment member penetrating the first support member to contact the second support member for adjusting the distance and the angle between the first support member and the second support member so as to properly align the encoder head with the linear scale (Fig. 1).
摘要翻译：公开了一种编码器头对准装置。根据本发明的实施例的编码器头对准装置包括：连接到沿基座移动的可移动单元的第一支撑构件; 第二支撑构件，其通过弹性构件连接到第一支撑构件，第二支撑构件设置有面向附接到所述基座的线性刻度的编码器头; 以及调节构件，其穿过所述第一支撑构件以接触所述第二支撑构件，用于调节所述第一支撑构件和所述第二支撑构件之间的距离和所述角度，以使所述编码器头与所述线性刻度（图1）正确对准。

8. 发明公开

EP2881699A1 System for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time 有权
标题翻译：系统为热变形和在一个平面上的直线运动的动态误差的实时补偿退绕单个平面龙门平台直线运动
公开(公告)号：EP2881699A1
公开(公告)日：2015-06-10
申请号：EP14003962.9
申请日：2014-11-25
申请人： Soonhan Engineering Corp.
发明人： Seo, Jong Kyu , Shin, Soo Keun , Jung, Chul , Kwon, Yong Uk , Ko, Byoung Gwan , Rahul, Banik
IPC分类号： G01B5/00
CPC分类号： G05D3/12 , G01B5/0014 , G01D5/00 , G05B19/404
摘要： Disclosed are a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring and inspecting apparatuses using the system. The system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially moving gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially moving slider moving on the X-axially moving gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially moving gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and thermal deformity errors based on the data received from the first and the second two-dimensional position measuring unit (FIG. 1).
摘要翻译：本发明公开了用于补偿在实时的线性运动单平面龙门平台的动态和热畸形错误，载台装置使用该系统，以及制造，测量和使用该系统的系统包括检测设备的系统：第一双在每个分别在直线运动单平面龙门平台的bothsides位于两个线性边梁的设置用于测量的位置的三维位置测量单元的X轴向移动龙门梁，以提供它们的X轴运动的反馈; 一个第二两维位置测量单元，用于测量的Y轴向移动滑块移动于X轴地移动台架梁以提供其Y轴运动的反馈的位置; 作为用于测量的X轴向移动龙门梁的热膨胀的热参考提供一种热固定点; 以及用于通过基于来自所述第一和第二两维位置测量单元图接收的数据测量动态和热畸形错误控制（上实时地直线运动单平面龙门平台的误差运动补偿控制单元1。）。

9. 发明公开

EP2296272A2 Method for detecting and filtering a random noise signal 审中-公开
标题翻译： Verfahren zum Erkennen und Filtern einesRauschstörungssignals
公开(公告)号：EP2296272A2
公开(公告)日：2011-03-16
申请号：EP10008023.3
申请日：2010-07-31
申请人： Soonhan Engineering Corp.
发明人： Ko, Byoung gwan
IPC分类号： H03H17/02
CPC分类号： H03H17/0261
摘要： A random noise signal detecting and filtering method includes: (a) calculating a difference value of data currently being input from a sensor in comparison with previous data stored in a register; (b) comparing the calculated difference value with a critical value; (c) determining whether the calculated difference value is greater than a maximum critical value or less than a minimum critical value; and (d) if the calculated difference value is greater than the maximum critical value or less than the minimum critical value, determining the current data be constitute a random signal and substituting the previous data for the current data ( Figure 2 ).
摘要翻译：随机噪声信号检测和滤波方法包括：（a）与存储在寄存器中的先前数据相比较，计算当前正在从传感器输入的数据的差值; （b）将计算的差值与临界值进行比较; （c）确定所计算的差值是否大于最大临界值或小于最小临界值; 和（d）如果计算的差值大于最大临界值或小于最小临界值，则确定当前数据构成随机信号，并将先前数据替换为当前数据（图2）。

10. 发明授权

EP2950055B1 ENCODER HEAD ALIGNING APPARATUS 有权
标题翻译：编码器头对齐装置
公开(公告)号：EP2950055B1
公开(公告)日：2017-07-12
申请号：EP15167303.5
申请日：2015-05-12
申请人： Soonhan Engineering Corp.
发明人： Park, Yon Mook
IPC分类号： G01D5/244 , G01D5/347
CPC分类号： G01D5/24452 , G01D5/24433 , G01D5/34707

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