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    • 2. 发明公开
    • Infrared touch screen device capable of multi-touch points sensing
    • Infrarot-Berührungschirmvorrichtungmit Mehrfach-Berührungspunkten-Sensor
    • EP2525279A2
    • 2012-11-21
    • EP12162331.8
    • 2012-03-30
    • Choi Dae, KyuAFO CO., LTD.
    • Choi, Dae Kyu
    • G06F3/042
    • G06F3/0423
    • The present invention relates to an infrared touch screen device, and more particularly, it relates to an infrared touch screen device capable of smoothly sensing the contact positions of a plurality of touch points and sensing multi-touch points when a plurality of touch points are produced. For this purpose, the infrared touch screen comprises a screen provided with a display panel on which image is projected and a reinforced glass plate formed on a front surface of the display panel and protects the display panel and to which the touch is made, an reinforced glass plate formed on a front surface of the screen to protect the screen and on which a touch is made, an optical scanner formed on one side of the screen and scanning the screen with the infrared, a light guide bar formed on a border of the reinforced glass plate and reflecting a part of the infrared which is projected from the optical scanner and passes through the reinforced glass plate, and guiding the rest non-reflected infrared incident inside the reinforced glass plate and transferring to one end thereof, a light receiving portion provided on a distal end of the light guide bar and receiving the infrared which is transferred through the light guide bar, and a position detector for detecting the touch position with a scanning angle of the optical scanner when the amount of the light received in the light receiving portion is a little wherein the infrared reflected from the light guide bar in incident to other light guide bars which are formed, corresponding to the light guide bar reflecting the infrared.
    • 本发明涉及一种红外线触摸屏装置,更具体地,本发明涉及一种红外线触摸屏装置,其能够在产生多个触摸点时平滑地感测多个触摸点的接触位置和感测多点触摸点 。 为此目的,红外线触摸屏包括一个屏幕,该屏幕上装有图像投影的显示面板和形成在显示面板前表面上的加强玻璃板,并保护显示面板并进行触摸,加强 玻璃板形成在屏幕的前表面上以保护屏幕并进行触摸,形成在屏幕的一侧上并用红外线扫描屏幕的光学扫描仪,形成在屏幕的边界上的导光条 加强玻璃板并反射从光学扫描仪投影并穿过强化玻璃板的一部分红外线,并引导入射在强化玻璃板内部的其余的未反射的红外线并转移到其一端,光接收部分 设置在导光杆的远端并且接收通过导光杆传送的红外线;以及位置检测器,用于检测触摸位置 当光接收部分中的光量被接收到光接收部分时的光线的扫描角度小,其中从导光棒反射的红外线入射到形成的其它导光杆,对应于导光棒反射 红外线。
    • 3. 发明公开
    • Remote plasma system having self management function and self management method of the same
    • 具有自管理功能和自我管理方法及其远程等离子体系统
    • EP2806714A3
    • 2015-01-07
    • EP13182154.8
    • 2013-08-29
    • Choi Dae, Kyu
    • Choi Dae, Kyu
    • H05H1/46H01J37/32
    • H01J37/32935H01J37/32357H01J37/32917H01J37/3299H05H1/46H05H2001/463
    • A remote plasma system having a self management function of the present invention measures an operating state of a remote plasma generator while a remote plasma generator operates, which generates plasma and remotely supplies the generated plasma to a process chamber, thereby allowing a process manager to check the measured operating state and performing a required process control depending on an operating state. According to the remote plasma system having the self management function of the present invention, it is possible to check operating state information of the remote plasma generator in real time so as to judge whether the remote plasma generator normally operates and immediately sense occurrence of an error during the operation. Further, it is possible to check in real time the operating state information of the remote plasma generator and plasma treatment process progress state information in the process chamber while the plasma generated from the remote plasma generator is supplied to the process chamber. Therefore, a process manager can determine an operating state of the remote plasma system in real time and immediately cope with an abnormal operation when the abnormal operation occurs. Further, the process manager can determine the system in real time at the time when maintenance of the system is required, thereby increasing maintenance efficiency.
    • 4. 发明公开
    • Remote plasma system having self management function and self management method of the same
    • 远程等离子体系统(Selbstverwaltungsfunktion und Selbstverwaltungsverfahrendafür
    • EP2806714A2
    • 2014-11-26
    • EP13182154.8
    • 2013-08-29
    • Choi Dae, Kyu
    • Choi Dae, Kyu
    • H05H1/46H01J37/32
    • H01J37/32935H01J37/32357H01J37/32917H01J37/3299H05H1/46H05H2001/463
    • A remote plasma system having a self management function of the present invention measures an operating state of a remote plasma generator while a remote plasma generator operates, which generates plasma and remotely supplies the generated plasma to a process chamber, thereby allowing a process manager to check the measured operating state and performing a required process control depending on an operating state. According to the remote plasma system having the self management function of the present invention, it is possible to check operating state information of the remote plasma generator in real time so as to judge whether the remote plasma generator normally operates and immediately sense occurrence of an error during the operation. Further, it is possible to check in real time the operating state information of the remote plasma generator and plasma treatment process progress state information in the process chamber while the plasma generated from the remote plasma generator is supplied to the process chamber. Therefore, a process manager can determine an operating state of the remote plasma system in real time and immediately cope with an abnormal operation when the abnormal operation occurs. Further, the process manager can determine the system in real time at the time when maintenance of the system is required, thereby increasing maintenance efficiency.
    • 具有本发明的自我管理功能的远程等离子体系统在远程等离子体发生器操作时测量远程等离子体发生器的操作状态,其产生等离子体并且将生成的等离子体远程供应到处理室,从而允许过程管理器检查 测量的操作状态,并根据操作状态执行所需的过程控制。 根据具有本发明的自我管理功能的远程等离子体系统,可以实时地检查远程等离子体发生器的运行状态信息,以便判断远程等离子体发生器是否正常工作并且立即感测出错误的发生 在操作期间。 此外,当从远程等离子体发生器产生的等离子体被提供给处理室时,可以实时检查远程等离子体发生器的操作状态信息和等离子体处理过程在处理室中的进行状态信息。 因此,过程管理器可以实时地确定远程等离子体系统的操作状态,并且在发生异常操作时立即应对异常操作。 此外,过程管理器可以在需要系统的维护时实时地确定系统,从而提高维护效率。