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    • 1. 发明公开
    • Semiconductor device and method for fabrication thereof
    • 半导体装置及其制造方法
    • EP1223622A3
    • 2004-07-28
    • EP01308381.1
    • 2001-10-01
    • FUJITSU LIMITED
    • Maruyama, Kenji, c/o Fujitsu LimitedKurihara, Kazuaki, c/o Fujitsu Limited
    • H01L27/115
    • H01L28/56H01L28/60
    • A semiconductor device which comprises a first electrode 32, a ferroelectric film 36 formed above the first electrode, and a second electrode 40 formed above the ferroelectric film, further comprises intermediate layers 34, 38 formed at at least one of the boundary between the first electrode and the ferroelectric film, and the boundary between the ferroelectric film and the second electrode, such intermediate layer(s) having a perovskite crystal structure. Because such intermediate layers having perovskite crystal structure are formed between the first and/or second electrodes and the ferroelectric film, even when a base metal is used as a material for the bottom and/or top electrode of a ferroelectric capacitor, the ferroelectric film can have crystal structure exhibiting ferroelectricity. Base metals can be used as materials for the bottom and top electrodes of the ferroelectric capacitor to decrease the cost of semiconductor devices. Materials which it has been difficult to use for the bottom and top electrodes of a ferroelectric capacitor can now be used to simplify the fabrication processes and improve electric characteristics.
    • 包括第一电极32,形成在第一电极上方的铁电体膜36和形成在铁电体膜上方的第二电极40的半导体器件还包括形成在第一电极和第二电极之间的至少一个边界处的中间层34,38, 和铁电薄膜以及铁电薄膜和第二电极之间的边界,这种中间层具有钙钛矿晶体结构。 由于在第一和/或第二电极与强电介质膜之间形成具有钙钛矿型晶体结构的中间层,所以即使在使用贱金属作为强电介质电容器的下部和/或上部电极的材料的情况下,强电介质膜 具有呈现铁电性的晶体结构。 贱金属可以用作铁电电容器的底部电极和顶部电极的材料,以降低半导体器件的成本。 现在可以使用难以用于铁电电容器的底部电极和顶部电极的材料来简化制造工艺并改善电特性。
    • 8. 发明公开
    • Coil inserter for stator winding
    • Maschine zum Einziehen von Spulen einer Statorwickelung
    • EP1128531A3
    • 2003-10-15
    • EP01301644.9
    • 2001-02-23
    • FANUC LTD
    • Katsuzawa, YukioMasuya, Michi, Room 14-301, FANUC ManshonharimomiTagami, KiyoshiOka, Hideki
    • H02K15/06
    • H02K15/068Y10T29/49009Y10T29/49073Y10T29/53143
    • Wedge guides 12 for holding a wedge 11 are mounted onto a base 10, and a stripper 15 is fixed to the other end of the wedge guide 12. A blade holder 13 including a plurality of blades 16 vertically installed is held in such a manner as to be freely advanceable and retractable in an up-and-down direction. A coil 30 wound is inserted between the blades 16, and alignment tool 7 is inserted at the tip ends of the blades. A stator iron core 40 is inserted into the alignment tool 7, and the stator iron core 40 is moved until the tip ends of the blades 16 penetrate the stator iron core 40. Thereafter, the stator iron core 40 and a connecting rod 19, the other end of which being connected to the blade holder 13, are pushed by a stator pusher 50, whereby the blade holder 13 is also caused to move together with the stator iron core 40 to insert the coil 30 into grooves in the stator iron core 40.
    • 用于保持楔11的楔形导向件12安装在基座10上,并且剥离器15固定到楔形导向件12的另一端。包括垂直安装的多个叶片16的刀片保持器13以如下方式保持: 能够在上下方向上自由地前进和后退。 缠绕的线圈30插入在叶片16之间,并且对准工具7插入叶片的末端。 定子铁芯40插入到对准工具7中,定子铁芯40移动直到叶片16的前端穿过定子铁芯40.此后,定子铁芯40和连接杆19 其另一端连接到刀架13,被定子推动器50推动,由此刀片保持器13也与定子铁芯40一起移动,以将线圈30插入定子铁芯40中的凹槽中 。