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    • 7. 发明公开
    • Ultra low thermal expansion transparent glass-ceramics
    • Transparente Glaskeramiken mit超级冰箱热食Ausdehnung
    • EP1516863A1
    • 2005-03-23
    • EP04100438.3
    • 2004-02-05
    • KABUSHIKI KAISHA OHARA
    • Goto, Naoyuki
    • C03C10/14
    • C03C10/0027C03C10/0009C03C10/0045
    • There are provided glass-ceramics having an ultra low thermal expansion property and super flat surface capable of coping with lithography for the next generation LSI and component parts for semiconductor equipment such as masks, optical reflecting mirrors, wafer stages and reticle stages and various precision parts using such glass-ceramics. Glass-ceramics of the invention have an average linear thermal expansion coefficient within a range of 0.0±0.2 × 10 -7 /°C within a temperature range from 0°C to 50°C, have difference between the maximum value and the minimum value of ΔL/L of 10 × 10 -7 or below, and comprise SiO 2 , Al 2 O 3 and P 2 O 5 with the total amount thereof in mass % being within a range from 86.0% to 89.0%.
    • 提供具有超低热膨胀特性的玻璃陶瓷和能够应对下一代LSI的光刻的超平坦表面和用于诸如掩模,光反射镜,晶片台和标线片台等各种精密零件的半导体设备的部件 使用这种玻璃陶瓷。 本发明的玻璃陶瓷在0℃至50℃的温度范围内的平均线性热膨胀系数在0.0 +/- 0.2×10 -7 /℃的范围内,在最大值 并且DELTA L / L的最小值为10×10 -7以下,并且包含SiO 2,Al 2 O 3和P 2 O 5,其总量以质量%计在86.0%至89.0%的范围内。