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1. 发明公开

EP0958591A1 ENVIRONMENTAL SEM WITH A MAGNETIC FIELD FOR IMPROVED SECONDARY ELECTRON DETECTION 有权
标题翻译： WITH多极环境扫描电子显微镜以提高二次电子俘获
公开(公告)号：EP0958591A1
公开(公告)日：1999-11-24
申请号：EP98946673.0
申请日：1998-10-19
申请人： Philips Electron Optics B.V.
发明人： VAN DER MAST, Karel, Diederick
IPC分类号： H01J37
CPC分类号： H01J37/244 , H01J2237/2448 , H01J2237/2608
摘要： The current of secondary electrons emanating from the specimen (14) in an ESEM is amplified by an avalanche-like ionization of the molecules (41) of the gas atmosphere. However, in order to achieve an adequate number of successive ionizations, a comparatively high voltage is required at the detector electrode (30) and, because of the risk of electric breakdowns, the distance between the specimen and the detector may not be smaller than a comparatively large minimum distance. Consequently, the number of successive ionizations is limited and hence also the current amplification. In order to achieve a higher amplification, the invention proposes the application of an additional magnetic field B in the ionization space. The path length of the secondary electrons is thus substantially increased so that a significantly larger number of ionizations takes place and hence a higher amplification is achieved.

2. 发明公开

EP0901686A2 PARTICLE-OPTICAL APPARATUS INCLUDING A LOW-TEMPERATURE SPECIMEN HOLDER 失效
标题翻译：包含低温样品保持器的粒子光学装置
公开(公告)号：EP0901686A2
公开(公告)日：1999-03-17
申请号：EP97913390.0
申请日：1997-12-08
申请人： Koninklijke Philips Electronics N.V.
发明人： BORMANS, Bernardus, Jacobus, Marie , DE JONG, Alan, Frank , VAN DER MAST, Karel, Diederick , WAGNER, Raymond , ASSELBERGS, Peter, Emile, Stephan, Joseph
IPC分类号： G01Q30 , H01J37
CPC分类号： H01J37/20 , H01J2237/2001
摘要： In an electron microscope it is sometimes important that specimens can be studied at a very low temperature (for example, that of liquid helium). In the case of known specimen holders the specimen is cooled by supplying the cooling medium via a bore in the specimen holder; this causes thermal drift of the removed specimen holder each time when a specimen is exchanged, and also an acoustic coupling (i.e. transfer of vibrations) exists with the dewar vessel connected to the specimen holder. In accordance with the invention, the specimen is arranged on the end (20) of the specimen holder (7) by means of a separate transport unit (13, 36) so that it is not necessary to remove the specimen holder (7) in order to exchange a specimen, with the result that the specimen holder is not heated. Moreover, the coupling to the cold source (22, 28) can take place via a flexible cooling conduit (30) which extends directly to the end (20) to be cooled and may be permanently connected thereto, thus avoiding the transfer of vibrations.
摘要翻译：在电子显微镜中，有时很重要的是样品可以在非常低的温度下进行研究（例如液氦）。在已知样品夹具的情况下，通过经由样品夹具中的孔供应冷却介质来冷却样品; 这导致每次更换样本时被移除的样本架的热漂移，并且连接到样本架的杜瓦容器也存在声学耦合（即振动传递）。根据本发明，通过单独的运输单元（13,36）将样本布置在样本保持器（7）的端部（20）上，使得不需要将样本保持器（7）移入为了更换样本，导致样本架未被加热。此外，与冷源（22,28）的连接可以通过直接延伸到待冷却的端部（20）的柔性冷却导管（30）进行并且可以与其永久连接，从而避免了振动的传递。

3. 发明公开

EP0815437A1 X-RAY ANALYSIS APPARATUS INCLUDING A ROTATABLE PRIMARY COLLIMATOR 失效
标题翻译：具有旋转初级准直仪和固定检测器的X射线衍射
公开(公告)号：EP0815437A1
公开(公告)日：1998-01-07
申请号：EP96939282.0
申请日：1996-12-11
申请人： Philips Electronics N.V.
发明人： VAN DEN HOOGENHOF, Waltherus, Wilhelmus , DE LANGE, Roelof , DE BOER, Dirk, Kornelis, Gerhardus , VAN DER SLUIS, Paul
IPC分类号： G01N23 , G21K1
CPC分类号： G21K1/04 , G01N23/2076 , G01N23/2206
摘要： An apparatus for performing X-ray fluorescence as well as X-ray diffraction by means of only a single X-ray tube (2) which is preferably constructed as a fluorescence tube. Between the tube and the sample (12) there is arranged a primary collimator (40) (Soller slit unit) which is rotatable about an (imaginary) axis (44) through the X-ray focus of the tube (2), so that the angle of incidence ξ on the sample can be varied by rotation of the collimator. Because the diffraction detector channel (50, 52, 56) occupies a fixed position, a ξ scan is performed by rotation of the collimator (40). As a result, it is not necessary to equip the diffraction section of the apparatus with a (comparatively heavy and expensive) goniometer with an associated drive for the detector (56) and for the wavelength analysis crystal (52).

4. 发明公开

EP0795196A1 PARTICLE-OPTICAL APPARATUS COMPRISING A FIXED DIAPHRAGM FOR THE MONOCHROMATOR FILTER 失效
标题翻译：包含用于单色滤光片的固定膜片的粒子光学装置
公开(公告)号：EP0795196A1
公开(公告)日：1997-09-17
申请号：EP96930328.0
申请日：1996-10-01
申请人： PHILIPS ELECTRONICS N.V.
发明人： TIEMEIJER, Peter, C. , CHMELIK, Jarda , KRUIT, Pieter
IPC分类号： H01J37
CPC分类号： H01J37/05 , H01J2237/057
摘要： An electron microscope comprises an energy-selective filter (10) which is arranged ahead of the high-voltage field in the electron gun (2). Because the filter carries high-voltage potential and is arranged within the gun space (14) which is filled with SF6 gas, problems arise regarding electrical and mechanical passages to the filter. Notably the centering of the filter is problematic. In order to enable suitable aperture adjustment of the filter nevertheless (for current limitation and for avoiding optical aberrations introduced into the beam by the filter), there is provided an entrance diaphragm (30) which is rigidly connected to the filter parts, notably to a pole face or to a field-defining closing piece (48a) of the filter.
摘要翻译：电子显微镜包括布置在电子枪（2）的高压场之前的能量选择滤波器（10）。因为滤波器承载高电压电势并且被布置在充满SF6气体的枪空间（14）内，所以关于到滤波器的电和机械通道出现问题。值得注意的是过滤器的居中是有问题的。然而，为了实现滤波器的合适的光圈调节（为了电流限制和为了避免由滤波器引入到光束中的光学像差），提供了刚性连接到滤波器部件的入射光阑（30），特别是与极面或过滤器的场限定封闭件（48a）。

5. 发明公开

EP0786145A1 FIELD EMISSION ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE 无效
标题翻译：一定的压力增加的工作相关场发射扫描电子显微镜下
公开(公告)号：EP0786145A1
公开(公告)日：1997-07-30
申请号：EP96927346.0
申请日：1996-08-08
申请人： PHILIPS ELECTRONICS NORTH AMERICA CORPORATION
发明人： KNOWLES, Ralph, W.
IPC分类号： H01J37
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/06341 , H01J2237/188 , H01J2237/2003 , H01J2237/2605 , H01J2237/2608
摘要： An environmental scanning electron microscope with field emission gun providing a spatial resolution of 2 nm which is comparable to the resolution of high vacuum field emission scanning microscope even though the specimen (66) is contained in the gaseous environment of the specimen chamber (68). The object lens assembly includes four differentially pumped vacuum zones (80, 82, 84, 86) to provide a pressure difference of up to approximately 10 Torr between the field emission gun and the specimen. The differentially pumped aperture system further includes at least four pressure limiting apertures (70, 72, 74, 76) defining the differentially pumped vacuum zones. One of the pressure limiting apertures is formed of a pressure limiting aperture assembly (103) which includes a plurality of stacked annular apertures (108, 110, 112, 114). Further, an electron detection assembly is provided for detecting signals from the surface of the specimen. The electron detection assembly includes a printed circuit board (132) having a signal ring electrode (136) biased to collect secondary electrons from the surface of said specimen and a final pressure limiting aperture (144) integrally formed therewith which extends through said signal ring electrode.

6. 发明公开

EP0699341A1 PARTICLE-OPTICAL INSTRUMENT COMPRISING A DEFLECTION UNIT FOR SECONDARY ELECTRONS 失效
标题翻译：与偏转二次电子粒子 - 光学仪器
公开(公告)号：EP0699341A1
公开(公告)日：1996-03-06
申请号：EP95909084.0
申请日：1995-03-07
申请人： PHILIPS ELECTRONICS N.V.
发明人： TROOST, Kars, Zeger , HENSTRA, Alexander
IPC分类号： G01Q70 , H01J37 , G01Q60
CPC分类号： H01J37/244 , H01J2237/1516 , H01J2237/2448
摘要： A primary beam in a scanning electron microscope (SEM) releases secondary electrons in the specimen to be studied. These electrons move back to the focusing lens against the direction of the primary beam, detection of these electrons taking place in the vicinity of said lens. A known detector comprises a Wien filter for deflecting the electrons from the optical axis to the actual detector. In accordance with the invention, an SEM detector is provided with a double electric dipole. The latter leaves the primary beam undisturbed to a high degree, but very efficiently deflects the secondary electrons to the actual detector.

7. 发明公开

EP0760109A1 METHOD FOR PARTICLE WAVE RECONSTRUCTION IN A PARTICLE-OPTICAL APPARATUS 失效
标题翻译： METHOD FOR粒子波在粒子光学装置重建
公开(公告)号：EP0760109A1
公开(公告)日：1997-03-05
申请号：EP96901465.0
申请日：1996-02-15
申请人： Philips Electronics N.V.
发明人： COENE, Willem, Marie, Julia , JANSSEN, Augustus, Josephus, Elizabeth, Maria
IPC分类号： G01Q60 , G01Q20 , G01Q30 , G02B7 , G02B21 , G03F7 , H01J37
CPC分类号： G03F7/705 , H01J37/222 , H01J2237/223
摘要： A method for the iterative formation of an image of a specimen in a particle-optical apparatus. A series of experimental images (the experimental series) is recorded with each time a different setting of an imaging parameter (for example, the focal distance), and a comparable series of images is calculated on the basis of the electron wave at the specimen (the estimation). The two series are compared and on the basis thereof an electron wave is calculated (the feedback) with which a new series of images is calculated which better approximates the experimental series. This iteration step is repeated until the correspondence between the experimental series and the calculated series is sufficient, after which the asssociated electron wave is considered to be the desired image of the specimen. A subtantial gain as regards calculation time can be achieved during the estimation step as well as during the feedback step by executing the operation of the invention by means of FFTs. This is possible by writing the correlation expressions to be calculated in both steps in accordance with the invention in such a manner that they occur as pure correlation integrals which can be calculated by means of FFTs. The calculation time required when use is made of FFTs is substantially shorter than in the case of explicit calculation of the correlation expressions in conformity with the state of the art. The calculation time can thus be reduced by a factor of the order of magnitude of 50,000.

8. 发明公开

EP0920772A2 DEVICE FOR READING AN IMAGING SENSOR MATRIX 失效
标题翻译：设备用于读取图像传感器矩阵
公开(公告)号：EP0920772A2
公开(公告)日：1999-06-09
申请号：EP98900001.0
申请日：1998-01-05
申请人： Koninklijke Philips Electronics N.V. , Philips Patentverwaltung GmbH
发明人： WIECZOREK, Herfried, K. , CONRADS, Norbert , SCHIEBEL, Ulrich
IPC分类号： H04N5 , G01T1 , H01L27 , H04N3
CPC分类号： H01L27/14658 , G01T1/2928
摘要： A medical X-ray apparatus is provided with image detector elements (30) which are arranged in a matrix of rows and columns. In order to improve the noise behaviour of the read amplifiers (46) during the reading per row, a plurality of column conductors (36) is provided per column so that the read time is prolonged in proportion to the number of column conductors and the stray capacitance is reduced proportionally. Both steps reduce the noise in known manner. In the case of an integrated implementation, the conductors for driving the reading per row cannot be arranged arbitrarily close to one another because of their mutual capacitance, so that these conductors require a comparatively large surface area. In order to make a smaller surface area suffice for these conductors, according to the invention each read driver (42) is connected to at least two rows of image detector elements (30) which are not associated with the same column conductor, the number of rows thus connected to one read driver being at the most equal to the number of groups of image detector elements in one column.

9. 发明公开

EP0765472A2 METHOD OF MANUFACTURING AN X-RAY OPTICAL ELEMENT FOR AN X-RAY ANALYSIS APPARATUS 失效
标题翻译：方法生产光学元件在X射线的范围，用于X射线分析装置中
公开(公告)号：EP0765472A2
公开(公告)日：1997-04-02
申请号：EP96907617.0
申请日：1996-04-10
申请人： PHILIPS ELECTRONICS N.V.
发明人： HAISMA, Jan , D'ACHARD VAN ENSCHUT, Johannes, Franciscus, , ADEMA, Cornelis, Lucas , GIJSBERS, Jan, Cornelis , DE BOKX, Pieter, Klass
IPC分类号： G01N23 , G02B1 , G21K1
CPC分类号： G21K1/062 , B82Y10/00 , G01N23/207 , G21K2201/061 , G21K2201/062 , G21K2201/064 , G21K2201/067
摘要： A method of manufacturing an X-ray optical element. The element consists of a body of a material having a shape memory. At a high temperature, i.e. a temperature beyond the transition temperature of the material, the body is pressed so as to impart a first, desired shape. A surface of the body is thus shaped for example, as a logarithmic spiral or as another curved shape. After cooling to a low temperature, i.e. a temperature below the transition temperature of the material, a second, machinable shape is imparted to the body, preferably a flat surface. A number of precision operations can be performed on this second, machinable shape, for example polishing to a surface roughness of 0.5 nm RMS. Subsequent to this precision operation, the body is heated and resumes its first, desired shape which is retained after cooling. The body can be provided, if desired, with a comparatively thin surface layer which is also polished in the flat shape and which bends when the body resumes the desired shape. This layer can be chosen on the basis of desired mechanical (polishability) or X-ray optical properties. The X-ray optical element may comprise notably a multilayer mirror for X-ray purposes, thus forming a high-precision crystal for wavelength analysis.

10. 发明公开

EP0744914A1 MEDICAL DIAGNOSTIC AND/OR THERAPEUTIC APPARATUS COMPRISING A C-ARC COMPOSED OF PROFILES 失效
标题翻译：医疗诊断和/或治疗设备符合型材的C-ARM
公开(公告)号：EP0744914A1
公开(公告)日：1996-12-04
申请号：EP95936068.0
申请日：1995-11-21
申请人： PHILIPS ELECTRONICS N.V.
发明人： VAN DER ENDE, Adrianus
IPC分类号： A61B19 , A61B6
CPC分类号： A61B6/4441
摘要： A medical diagnostic and/or therapeutic apparatus provided with a C-arc support (2) for, for example an X-ray source (4) and an X-ray detector (6). The support (2) comprises two complementary U-profiles (26) which are connected to one another by way of their flanges (28), using two rod-shaped parts (20) with grooves (24) which extend parallel to the axis of the rod-shaped parts (20) and receive the flanges (28). The flanges (28) are fixed in the grooves (24) by holes (30) which are provided in the rod-shaped parts (20), extend perpendicularly to the plane of the grooves (24), and overlap the grooves (24), in said holes there being arranged pressure pieces (40) which are interconnected by a connection rod (46) which interconnects two oppositely situated pressure pieces (40).

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