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1. 发明授权

EP1154276B1 Testing head for microstructures 有权
标题翻译：微结构测试头
公开(公告)号：EP1154276B1
公开(公告)日：2005-04-20
申请号：EP01111419.6
申请日：2001-05-10
申请人： Technoprobe S.r.l
发明人： Crippa, Giuseppe , Felici, Stefano
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/0675 , G01R1/07357

2. 发明授权

EP1243931B1 "Testing head having vertical probes for semiconductor integrated electronic devices." 有权
标题翻译：测试头具有用于集成半导体部件垂直测试引脚
公开(公告)号：EP1243931B1
公开(公告)日：2004-07-14
申请号：EP02005933.3
申请日：2002-03-15
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/073
CPC分类号： G01R1/07357 , G01R1/06716 , G01R1/06733 , G01R1/07314 , G01R1/07342

3. 发明公开

EP1178320A3 Testing head having cantilever probes 有权
标题翻译：测试头有悬臂探针
公开(公告)号：EP1178320A3
公开(公告)日：2002-10-30
申请号：EP01118597.2
申请日：2001-08-02
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/07342
摘要： The invention relates to a testing head (10) having cantilever probes, comprising at least one backing ring (12) to which a resin holder (13) is attached to hold a plurality of contact probes (14), the probes being formed with contact tips (16) suitable to mechanically and electrically contact a plurality of contact pads (17) of at least one device (11) to be tested. Advantageously according to the invention, the holder (13) has at least one outline which is suitably shaped in correspondence to the device (11) to enable different probe rows to emerge in a cantilever manner.
摘要翻译：具有悬臂探针的测试头（10）技术领域本发明涉及一种具有悬臂探针的测试头（10），所述测试头包括至少一个垫环（12），树脂保持器（13）被附接到垫环以保持多个接触探针（14）尖端（16）适于与待测试的至少一个装置（11）的多个接触垫（17）机械和电接触。有利地，根据本发明，支架（13）具有至少一个轮廓，该轮廓对应于装置（11）适当地成形，以使不同的探针排能够以悬臂方式出现。

4. 发明公开

EP1243931A1 "Testing head having vertical probes for semiconductor integrated electronic devices." 有权
标题翻译： Prüfkopfmit vertikalenPrüfstiftenfürintegrierte Halbleiterbausteine
公开(公告)号：EP1243931A1
公开(公告)日：2002-09-25
申请号：EP02005933.3
申请日：2002-03-15
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/073
CPC分类号： G01R1/07357 , G01R1/06716 , G01R1/06733 , G01R1/07314 , G01R1/07342
摘要： The invention relates to a vertical-probe testing head (100), of a type that comprises at least a first and a second plate-like holder (12A, 12B) respectively provided with at least one guide hole (13A, 13B) for receiving at least one contact probe (14), having at least one contact tip (15) adapted to establish mechanical and electrical contact to a corresponding contact pad (16) of an integrated electronic device (17) to be tested and being deformed in a deflection region (22) of the probe (14) located between the plate-like holders (12A, 12B) as the contact tip (15) abuts onto the contact pad (16).
Advantageously in this invention, the contact probe (14) has, located at said contact tip (15), at least one rigid arm (20) extending laterally from a body (21) of the contact probe (14) and terminating in the contact tip (15). In particular, the rigid arm (20) is adapted to offset a contact point of the probe (14) with its corresponding contact pad (16) from a longitudinal axis (A-A) of the contact probe (14).
摘要翻译：本发明涉及一种垂直探针测试头（100），其类型包括至少分别设置有至少一个导孔（13A，13B）的第一和第二板状保持器（12A，12B），用于接收至少一个接触探针（14），其具有至少一个接触尖端（15），所述至少一个接触尖端（15）适于与待测试并在变形中变形的集成电子设备（17）的对应接触垫（16）建立机械和电接触位于接触尖端（15）之间的板状保持器（12A，12B）之间的探针（14）的区域（22）抵接在接触垫（16）上。有利的是，在本发明中，接触探针（14）位于所述接触尖端（15）处，至少一个刚性臂（20）从接触探针（14）的主体（21）横向延伸并终止于接触尖端（15）。特别地，刚性臂（20）适于将探针（14）的接触点与其对应的接触垫（16）从接触探针（14）的纵向轴线（A-A）偏移。

5. 发明授权

EP1178320B1 Testing head having cantilever probes 有权
标题翻译：测试头有悬臂探针
公开(公告)号：EP1178320B1
公开(公告)日：2005-04-20
申请号：EP01118597.2
申请日：2001-08-02
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/07342

6. 发明公开

EP1154276A3 Testing head for microstructures 有权
标题翻译：测试头的微观结构
公开(公告)号：EP1154276A3
公开(公告)日：2003-01-08
申请号：EP01111419.6
申请日：2001-05-10
申请人： Technoprobe S.r.l
发明人： Crippa, Giuseppe , Felici, Stefano
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/0675 , G01R1/07357
摘要： The invention relates to a testing head for microstructures. The testing head (1) includes a top guide plate (2) and bottom guide plate (3), separated by an air gap (9). Each of the plates (2, 3) include respective guide holes (4, 5) for accommodating a contact probe (6) having a contact tip (7) that is arranged to mechanically and electrically contact a contact pads (8) on a device under test. The contacting tip (7) of the testing head (6) has a non-zero pitch angle (α OUT ) relative to the contact pad (8), and "scrubs" the pad as the device under test is drawn against the contacting tip (7), causing the contact probe (6) to bend within the air gap (9). The invention further relates to a method for creating an electro/mechanical connection between a testing head for microstructures and a device to be tested.

7. 发明公开

EP1179734A1 Testing head having vertical probes 审中-公开
标题翻译： Prüfkopfmit vertikalenPrüfelektroden
公开(公告)号：EP1179734A1
公开(公告)日：2002-02-13
申请号：EP01118596.4
申请日：2001-08-02
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/073
CPC分类号： G01R1/07357
摘要： The invention relates to a testing head (10) having vertical probes and comprising at least one guide plate (12) providing at least one guide hole (13) adapted to receive at least one contact probe (14) having at least one contact tip (16) suitable to mechanically and electrically contact a corresponding contact pad (17) of a device (11) to be tested.
Advantageously in this invention, the contact probe (14) has at least one pre-deformed section (15) placed in a flexion region (19) between the guide plate (12) and the device (11) to be tested, said pre-deformed section being able to deform further during the normal operation of the testing head (10) upon the contact tip (16) abutting against the contact pad (17) of the device (11) to be tested.
摘要翻译：本发明涉及一种具有垂直探针的测试头（10），其包括至少一个引导板（12），所述至少一个引导板（12）提供至少一个引导孔（13），所述引导孔适于容纳至少一个具有至少一个接触尖端的接触探针（14） 16），其适于机械地和电接触待测试的装置（11）的对应接触垫（17）。有利的是，在本发明中，接触探针（14）具有至少一个放置在引导板（12）和被测试装置（11）之间的弯曲区域（19）中的预变形部分（15）变形部分能够在接触尖端（16）抵靠待测试装置（11）的接触垫（17）的正常操作期间进一步变形。

8. 发明公开

EP1178320A2 Testing head having cantilever probes 有权
标题翻译： Prüfkopfmit freitragenden Auslegern
公开(公告)号：EP1178320A2
公开(公告)日：2002-02-06
申请号：EP01118597.2
申请日：2001-08-02
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/067
CPC分类号： G01R1/07342
摘要： The invention relates to a testing head (10) having cantilever probes, comprising at least one backing ring (12) to which a resin holder (13) is attached to hold a plurality of contact probes (14), the probes being formed with contact tips (16) suitable to mechanically and electrically contact a plurality of contact pads (17) of at least one device (11) to be tested.
Advantageously according to the invention, the holder (13) has at least one outline which is suitably shaped in correspondence to the device (11) to enable different probe rows to emerge in a cantilever manner.
摘要翻译：本发明涉及一种具有悬臂探头的测试头（10），其包括至少一个背衬环（12），树脂保持器（13）附接到该背衬环以保持多个接触探针（14），所述探针形成有接触适于机械和电接触待测试的至少一个装置（11）的多个接触垫（17）的尖端（16）。有利地，根据本发明，保持器（13）具有至少一个轮廓，该轮廓适当地对应于装置（11）成形，以使不同的探针行以悬臂方式出现。

9. 发明公开

EP1318409A1 "Contact probe for a testing head." 审中-公开
标题翻译： KontaktsondefürPrüfkopf。
公开(公告)号：EP1318409A1
公开(公告)日：2003-06-11
申请号：EP02005932.5
申请日：2002-03-15
申请人： Technoprobe S.r.l
发明人： Felici, Stefano , Crippa, Giuseppe
IPC分类号： G01R1/073
CPC分类号： G01R1/07342 , G01R1/07357
摘要： A contact probe for a testing head is described, the probe having at least a pointed rod-shaped body (4) having a crook-shaped section (6) capable to contact mechanically and electrically at least one contact pad (7) of an electronic device (10) to be tested and defined form an elbow point (G) on the rod-shaped body (4).
Advantageously according to the invention, the rod-shaped body (4) comprises at least one additional elbow point (Ga) spaced form the elbow point (G).
摘要翻译：描述了用于测试头的接触探针，所述探针具有至少一个具有弯曲部分（6）的尖棒形主体（4），所述弯曲部分能够机械地和电接触电子的至少一个接触垫（7）被测试和定义的装置（10）形成在杆状体（4）上的弯头点（G）。有利地，根据本发明，杆状体（4）包括至少一个与弯头点（G）间隔开的另外的肘形点（Ga）。

10. 发明公开

EP1154276A2 Testing head for microstructures 有权
标题翻译： TestkopffürMikrostrukturen
公开(公告)号：EP1154276A2
公开(公告)日：2001-11-14
申请号：EP01111419.6
申请日：2001-05-10
申请人： Technoprobe S.r.l
发明人： Crippa, Giuseppe , Felici, Stefano
IPC分类号： G01R1/067
CPC分类号： G01R1/0675 , G01R1/07357
摘要： The invention relates to a testing head for microstructures. The testing head (1) includes a top guide plate (2) and bottom guide plate (3), separated by an air gap (9). Each of the plates (2, 3) include respective guide holes (4, 5) for accommodating a contact probe (6) having a contact tip (7) that is arranged to mechanically and electrically contact a contact pads (8) on a device under test. The contacting tip (7) of the testing head (6) has a non-zero pitch angle (α OUT ) relative to the contact pad (8), and "scrubs" the pad as the device under test is drawn against the contacting tip (7), causing the contact probe (6) to bend within the air gap (9).
The invention further relates to a method for creating an electro/mechanical connection between a testing head for microstructures and a device to be tested.
摘要翻译：本发明涉及一种用于微结构的测试头。测试头（1）包括由气隙（9）分开的顶部导板（2）和底部引导板（3）。每个板（2,3）包括用于容纳具有接触尖端（7）的接触探针（6）的相应的引导孔（4,5），所述接触头设置成机械地和电接触设备上的接触焊盘（8）被测试测试头（6）的接触尖端（7）相对于接触垫（8）具有非零俯仰角（αOUT），并且当所测试的装置抵抗接触尖端（7），使得接触探针（6）在气隙（9）内弯曲。本发明还涉及一种用于在用于微结构的测试头和待测试的装置之间产生电/机械连接的方法。

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