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    • 8. 发明公开
    • ELECTROLESS COPPER OR COPPER ALLOY PLATING BATH AND METHOD FOR PLATING
    • EP3578683A1
    • 2019-12-11
    • EP18176836.7
    • 2018-06-08
    • Atotech Deutschland GmbH
    • KULKO, Roman-DavidZARWELL, SebastianKLAEDEN, KilianPETER, AnnaBECK, Birgit
    • C23C18/40C23C18/48
    • An electroless copper plating bath for depositing a copper or copper alloy layer on a surface of a substrate, comprising
      a) copper ions;
      b) at least one reducing agent suitable for reducing copper ions to metallic copper;
      c) at least one complexing agent for copper ions;
      characterized in that the electroless copper plating bath further comprises
      d) at least one compound according to formula (1):

      wherein
      Z 1 and Z 2 are independently selected from the group consisting of hydrogen; carboxylic acid group; carboxylate group; sulfonic acid group; sulfonate group; carboxamide group; nitrile group; nitro group; substituted or non-substituted trialkylammonium group; substituted or non-substituted 2-carboxyvinyl group; substituted or non-substituted 2-vinylcarboxylate group; substituted or non-substituted 2-(trialkylammonium)vinyl group; substituted or non-substituted hydroxamic acid group; and substituted or non-substituted oxime group;
      with the proviso that at least one of Z 1 and Z 2 is not hydrogen;
      and
      wherein R 1 , R 2 , R 3 and R 4 are defined as follows:
      i. R 1 , R 2 , R 3 and R 4 are hydrogen; or
      ii. R 1 with R 2 are forming together a substituted or non-substituted aromatic ring moiety, R 3 and R 4 are hydrogen; or
      iii. R 3 with R 4 are forming together a substituted or non-substituted aromatic ring moiety, R 1 and R 2 are hydrogen; or
      iv. R 1 with R 2 as well as R 3 with R 4 are forming together a substituted or non-substituted aromatic ring moiety, respectively.


      The invention further concerns a method for depositing at least a copper or copper alloy layer on a surface of a substrate, a layer system and a kit-of-parts for providing the inventive electroless copper plating bath.