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    • 84. 发明公开
    • Multi-section roots vacuum pump of reverse flow cooling type with internal flow division arrangement
    • 具有内部流动部分布置的反向流动冷却类型的多部分真空泵
    • EP0272767A3
    • 1988-09-21
    • EP87305381
    • 1987-06-17
    • UNOZAWA-GUMI IRON WORKS, LTD.
    • Higuchi, TsutomuShigeharuKambe
    • F04C18/12F04C29/04
    • F04C29/042F04C18/126
    • A multi-section Roots vacuum pump of the reverse flow cooling type with internal flow division arrangement includes a sequence of pump sections (1, 5, 7), casings (10, 40, 70) for the pump sections including housings (11, 41, 71) for accommodating pairs of rotor (12, 42, 72) therein, inlet passages (13, 43, 73) and outlet passages (14, 44, 74) connected to the casing for pump sections, upper peri­pheral gas passages (16A, 16B, 46A, 46B, 76A, 76B) connected to the inlet passage formed around an upper portion of the housing, lower peripheral gas passages (17A, 17B, 47A, 47B, 77A, 77B) connected to a supply inlet of reverse flow cooling gas formed around a lower portion of the housing, partition walls (18A, 18B, 48A, 48B, 78A, 78B) between the upper and lower peripheral gas passages, and inter-section walls (2, 5) for separating adjacent pump sections. Communicating passages (21A, 21B, 51A, 51B) are formed through the inter-section walls (2, 5) for communicating the lower peripheral gas passages of a pump section with the upper peripheral gas passages of the following pump section, connection pipes (31, 32, 61, 62) are provided between an outlet passage (14, 44) of the casing of a pump section and an inlet passage (43, 73) of the casing of the following pump section, and coolers (36, 66) are provided in the connection pipes.