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    • 89. 发明公开
    • X-ray spectroscopic technique using merged spectral data
    • öen en en en en en en en en
    • EP2690432A1
    • 2014-01-29
    • EP13176585.1
    • 2013-07-16
    • FEI COMPANY
    • Stoks, Sander
    • G01N23/223G01N23/225
    • G01N23/225G01N23/223G01N2223/076
    • A method of examining a sample using a spectroscopic apparatus, such as energy-dispersive X-ray spectroscopy (EDX), comprising the following steps:
      - Mounting the sample on a sample holder;
      - Directing a focused input beam of radiation, such as an electron beam or X-ray beam, onto a location on the sample, thereby producing an interaction that causes a flux of stimulated photonic radiation, such as fluorescent X-rays, to emanate from said location;
      - Examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location;
      - Automatically repeating said directing and examining steps for a series of successive locations on the sample,

      which method comprises the following steps:
      - Choosing a beam parameter of the input beam, such as the beam curent or beam spot size, that will influence a magnitude of said flux of stimulated photonic radiation;
      - For each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter;
      - For each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter, different from said first value.
      One application consists in detecting and flagging events during EDX analysis when pile-up is too high and re-acquire EDX data for the locations corresponding to these flagged events.
    • 使用能量色散X射线光谱法(EDX)等分光装置检查样品的方法,包括以下步骤:将样品安装在样品架上; - 将聚焦投射射束(如电子束或X射线束)引导到样品上的位置,从而产生相互作用,导致受激光子辐射(如荧光X射线)的通量从 说位置; - 使用多通道光子计数检测器检查所述通量,从而产生所述位置的测量光谱; - 对样本上的一系列连续位置自动重复所述指导和检查步骤,该方法包括以下步骤: - 选择将影响幅度的输入光束的光束参数,例如光束固定或光点尺寸, 的所述通量的受激光子辐射; - 对于采样上的第一组位置内的每个位置,使用所述光束参数的第一值产生光谱; - 对于样本上的第二组位置内的每个位置,使用不同于所述第一值的所述波束参数的第二值产生频谱。 一个应用包括在堆叠过高时EDX分析期间检测和标记事件,并重新获取与这些标记事件相对应的位置的EDX数据。