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71. 发明授权

EP0680075B1 ELECTRODE FOR GENERATING PLASMA AND METHOD FOR MANUFACTURING THE ELECTRODE 失效
标题翻译： LEAD血浆和方法的生产制造该电极
公开(公告)号：EP0680075B1
公开(公告)日：2001-11-28
申请号：EP94919829.5
申请日：1994-06-30
申请人： NGK INSULATORS, LTD.
发明人： NIORI, Yusuke , UMEMOTO, Koichi , USHIKOSHI, Ryusuke
IPC分类号： H01L21/205 , H01J37/32
CPC分类号： H01J37/32009 , H01J37/32559
摘要： This apparatus comprises a substrate (31) made of fine ceramic, and an electrode (55) buried in the substrate (31) and electrically insulated in it, wherein a plasma is produced on the substrate. The apparatus includes a layer (37) permeable to electromagnetic waves, and preferably, the average thickness of the layer is 0.5 mm or more. The electrode (55) is a flat electrode formed by a bulk metal. The substrate which encloses the electrode is a product integrally formed by sintering without junctions. This structure can also be utilized for an electric dust collector, an electromagnetic shielding device, and an electrostatic chuck. These devices can be preferably installed in an apparatus using a corrosive halogen gas for fabricating semiconductors or the like. A compact, together with a flat bulk metal electrode, is sintered by a hot press with a pressure in the thickness direction of the electrode in such a manner that the electrode is buried integrally in a fine ceramic substrate without junctions. A material permeable to electromagnetic waves is used for an apparatus for generating plasma by applying a high-frequency power to a gas. At least the surface of this material, which is in contact with the plasma atmosphere, is made of the aluminum nitride whose dielectric loss tanδ is 10-2 or less, and thermal resistance shock ΔTc is 300° or more.

72. 发明公开

EP1155599A1 ATMOSPHERIC STEADY-STATE GLOW-DISCHARGE PLASMA 审中-公开
标题翻译：大气平稳辉光放电等离子体
公开(公告)号：EP1155599A1
公开(公告)日：2001-11-21
申请号：EP00908415.3
申请日：2000-01-28
申请人： Sigma Technologies International, Inc.
发明人： YIALIZIS, Angelo , PIRZADA, Shahid, A. , DECKER, Wolfgang
IPC分类号： H05H1/24
CPC分类号： H01J37/32009 , H01J37/3244 , H01J37/32449 , H01J37/32532
摘要： A plasma treater (10) incorporates a porous metallic layer (34) in one of the electrodes (30). The porous layer is selected with pores of average size within one order of magnitude of the mean free path of the plasma gas at atmospheric pressure. The plasma gas is injected into the electrode at substantially atmospheric pressure and allowed to diffuse through the porous layer, thereby forming a uniform glow-discharge plasma. The film material (14) to be treated is exposed to the plasma created between this electrode and a second electrode (12) covered by a dielectric layer (16). Because of the micron size of the pores of the porous metal (34), each pore also produces a hollow cathode effect that facilitates the ionization of the plasma gas. As a result, a steady-state glow-discharge plasma is produced at atmospheric pressure and at power frequencies as low as 60 Hz.

73. 发明公开

EP1022933A2 Plasma generator 失效
标题翻译：发电机
公开(公告)号：EP1022933A2
公开(公告)日：2000-07-26
申请号：EP00107792.4
申请日：1996-10-16
申请人： Jump Technologies Limited
发明人： Kim, Soo-In , Lisin, Vladimir Nikolaevich , Bekker, German , Malivanov, Sergei
IPC分类号： H05H1/46
CPC分类号： H01J37/32009 , H01J37/32045 , H05H1/46
摘要： The present invention relates to a plasma generator comprising means for transforming a resonance (4) having a low voltage input section (14) and a high voltage output section (31), wherein the high voltage output section (31) includes a pin; first means for generating an oscillation signal (1) having an amplifying element (3), wherein the amplifying element (3) is connected to the low voltage input section (14); second means for generating and supplying a power to said first means for generating; and, means for discharging (6) connected to the pin of the high voltage output section (31).

74. 发明公开

EP0997554A1 PLASMA CVD METHOD, PLASMA CVD APPARATUS, AND ELECTRODE 有权
标题翻译：等离子体CVD-VERFAHREN，-VORRICHTUNG UND-ELEKTRODE
公开(公告)号：EP0997554A1
公开(公告)日：2000-05-03
申请号：EP99906551.9
申请日：1999-03-02
申请人： Nissin Electric Co., Ltd.
发明人： MURAKAMI, Yasuo, Nissin Elec. Co., Ltd. , NAKAHIGASHI, Takahiro, Nissin Elec. Co., Ltd.
IPC分类号： C23C16/50
CPC分类号： H01J37/32532 , C23C16/26 , C23C16/509 , H01J37/32 , H01J37/32009
摘要： The invention provides plasma CVD method and device which can form a uniform or substantially uniform film on an outer surface of an object independently of the shape of the object, and also provides an electrode used in the method and device. More specifically, a plasma is formed from a deposition material gas by supplying an electric power to the gas, and a film is formed on the outer surface of the hollow object having an opening under the plasma. The electrodes for supplying the electric power for forming the gas plasma include an internal electrode arranged in an inner space of the hollow object and an external electrode arranged outside the object. The internal electrode can selectively have a reduced form allowing passage of the electrode through the opening of the hollow object and an enlarged form predetermined in accordance with a volume and a shape of the inner space of the object. The internal electrode in the reduced form is inserted into the inner space of the object through the opening of the object, and then is changed into the enlarged form. Alternatively, the internal electrode is made of an electrically conductive and flowable material capable of flowing between the inner and outer spaces of the object through the opening of the object, and the internal electrode is formed by flowing the conductive and flowable material into the inner space of the object through the opening of the object.
摘要翻译：本发明提供等离子体CVD方法和装置，其能够独立于物体的形状在物体的外表面上形成均匀或基本上均匀的膜，并且还提供在该方法和装置中使用的电极。更具体地，通过向气体供给电力，由沉积材料气体形成等离子体，并且在等离子体下方具有开口的中空物体的外表面上形成膜。用于提供用于形成气体等离子体的电力的电极包括布置在中空物体的内部空间中的内部电极和布置在物体外部的外部电极。内部电极可以选择性地具有减小的形状，允许电极通过中空物体的开口并且根据物体的内部空间的体积和形状预定的放大形式。还原形式的内部电极通过物体的开口插入到物体的内部空间中，然后变成放大的形式。或者，内部电极由能够通过物体的开口在物体的内部空间和外部空间之间流动的导电性且可流动的材料制成，并且内部电极通过使导电性和可流动材料流入内部空间而形成的对象通过打开对象。

75. 发明授权

EP0707337B1 Solid annular gas discharge electrode 失效
标题翻译：用于气体放电实心环形电极
公开(公告)号：EP0707337B1
公开(公告)日：1998-11-25
申请号：EP95307085.1
申请日：1995-10-06
申请人： IPEC Precision, Inc.
发明人： Steinberg, George N.
IPC分类号： H01J37/32 , C23C16/44
CPC分类号： H01J37/32009 , C23C16/455 , H01J37/32366 , H01J37/3244 , H01J37/32449 , H01J37/32532 , Y10S156/914

76. 发明公开

EP0837622A1 Plasma generator 失效
标题翻译：等离子发生器
公开(公告)号：EP0837622A1
公开(公告)日：1998-04-22
申请号：EP96116612.1
申请日：1996-10-16
申请人： Jump Technologies Limited
发明人： Kim, Soo-In , Lisin, Vladmimir Nikolaevich , Bekker, German , Malivanov, Sergei
IPC分类号： H05H1/46
CPC分类号： H01J37/32009 , H01J37/32045 , H05H1/46 , H05H2240/20 , H05H2277/10
摘要： The present invention relates to a plasma generator to apply cold plasma in the fields of medicine, biology, ecological recovery, activation, purification, special processing of gases, liquids and solid substances as well as other areas of technology and science. A plasma generator of the invention comprises: a power source (7); an electronic oscillator (1) constructed on an amplifying (control) element (3) which is connected to a low voltage input section (14); a resonance transformer (4) having a low voltage input section (14) and a high voltage output section (31); and, one pin of the high voltage output section (31) of the resonance transformer which is connected to a discharge electrode (6). The present invention provides a universal plasma generator with decreased mass and dimensions which provides unipolar plasma for plasma therapy and activation of substantial media by virtue of the field.
摘要翻译：本发明涉及一种在医学，生物学，生态恢复，活化，净化，气体，液体和固体物质的特殊处理以及其他技术和科学领域中应用冷等离子体的等离子体发生器。本发明的等离子体发生器包括：电源（7）; 一个构造在连接到低电压输入部分（14）的放大（控制）元件（3）上的电子振荡器（1）; 具有低电压输入部分（14）和高电压输出部分（31）的谐振变压器（4）; 以及连接到放电电极（6）的谐振变压器的高电压输出部分（31）的一个管脚。本发明提供了一种质量和尺寸减小的通用等离子体发生器，其凭借该领域为等离子体治疗提供单极等离子体并激活基本介质。

77. 发明公开

EP0833366A2 Apparatus for depositing barrier film on three-dimensional articles 失效
标题翻译： GegenständeGerätzur Abscheidung einer Sperrschicht auf dreidimensionaleGegenstände
公开(公告)号：EP0833366A2
公开(公告)日：1998-04-01
申请号：EP97115072.7
申请日：1997-08-30
申请人： Becton, Dickinson and Company
发明人： Montgomery, David B.
IPC分类号： H01J37/32 , C23C16/50
CPC分类号： H01J37/32009 , C23C16/509 , H01J37/32082 , H01J37/32541 , H01J2237/3321 , H01J2237/3327
摘要： The invention relates to an apparatus for use in a Plasma Enhanced Chemical Vapor Deposition (PECVD) process whereby a coating of inorganic material is deposited on three-dimensional articles, including low melting temperature polymer articles. The coating possesses excellent gas and/or water vapor barrier properties.
摘要翻译：本发明涉及一种用于等离子体增强化学气相沉积（PECVD）方法的装置，其中无机材料的涂层沉积在三维制品上，包括低熔点聚合物制品。涂层具有优异的气体和/或水蒸气阻隔性能。

78. 发明公开

EP0811236A2 FILTERED CATHODIC ARC SOURCE 失效
标题翻译：过滤式阴极电弧放电离子源
公开(公告)号：EP0811236A2
公开(公告)日：1997-12-10
申请号：EP96903119.0
申请日：1996-02-20
申请人： Avimo Group Limited
发明人： SHI, Xu , FLYNN, David, Ian , TAY, Beng, Kang , TAN, Hong, Siang
IPC分类号： C23C14 , H01J37
CPC分类号： H01J37/32055 , C23C14/221 , H01J37/32009 , H01J37/32633 , H01J37/32697 , H01J2237/022
摘要： The plasma beam from a cathodic arc is filtered by baffles, a double bend toroidal plasma duct and a biased, corrugated liner within the duct, giving coatings virtually free of contaminating macroparticles. Reactive gas is ionised in the plasma ball and automatic arc ignition is provided.

79. 发明授权

EP0678894B1 Plasma processing apparatus 失效
标题翻译： Plasmabearbeitungsgerät
公开(公告)号：EP0678894B1
公开(公告)日：1997-10-08
申请号：EP95105639.9
申请日：1995-04-13
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuchida, Shinji , Ueda, Shigenori , Hashizume, Junichiro
IPC分类号： H01J37/32
CPC分类号： H01J37/32009 , H01J37/32082 , H01J37/32541 , H01J37/3255

80. 发明授权

EP0474244B1 Plasma processing method 失效
标题翻译： Plasmabearbeitungsverfahren
公开(公告)号：EP0474244B1
公开(公告)日：1996-05-22
申请号：EP91115085.2
申请日：1991-09-06
申请人： TOKYO ELECTRON LIMITED
发明人： Fukasawa Yoshio , Momose Kenji
IPC分类号： H01J37/32
CPC分类号： H01J37/32009 , H01J37/32321

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