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    • 76. 发明公开
    • RADIO FREQUENCY POWER SOURCE DEVICE, AND POWER SOURCE FOR DUAL CATHODES
    • 无线电频率电源装置和双阴极的电源
    • EP3236718A1
    • 2017-10-25
    • EP15881133.1
    • 2015-02-20
    • Kyosan Electric Mfg. Co., Ltd.
    • YUZURIHARA, ItsuoKODAMA, ShinichiADACHI, Toshiyuki
    • H05H1/46H01L21/203H01L21/31H02M5/08H02M7/12C23C14/34
    • H05H1/46C23C14/34H01J37/32174H01J37/3438H01J37/3444H01L21/203H01L21/31H02M5/08H02M5/42H02M7/12H05H2001/4682
    • In radio frequency power source devices for delivering AC voltage outputs in antiphase with each other, having a configuration to divide the voltage output from a radio frequency output circuit into two, it is not possible to perform switching as appropriate, between different voltage values, high voltage and low voltage, resulting in that the voltage at an output end is reduced to have a half peak value of the voltage output of the radio frequency output circuit. There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.
    • 在用于将交流电压输出反相输出的射频电源装置中,具有将从射频输出电路输出的电压分成两部分的配置,不可能在不同的电压值之间适当地进行切换,高 电压和低电压,导致输出端的电压降低到射频输出电路输出电压的半峰值。 提供了一种射频电源装置,其被配置为通过切换分割射频电压的分压器的连接状态来改变两个输出端电压之间的电压比,使得射频电压被分成电压 相对于地电位彼此反相输出,而高电压和低电压以切换方式传送。 在分压器中的连接状态的切换使得能够选择性地输送具有不同值,高电压或低电压的电压,并且通过在需要高电压的时间内选择并输送高电压,减少从射频输出电路输出的电压 被阻止。