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    • 65. 发明公开
    • SOI-MOSFET and fabrication process thereof
    • SOI-MOSFET和Verfahren zu dessen Herstellung
    • EP0902482A1
    • 1999-03-17
    • EP98305138.4
    • 1998-06-29
    • Sharp Kabushiki Kaisha
    • Adan, Alberto O.
    • H01L29/786H01L29/10H01L21/336H01L21/265
    • H01L29/66772H01L21/26586H01L29/78612
    • A SOI-MOSFET includes: a substrate (1); a buried oxide film (2) formed on the substrate; a top semiconductor layer (3) formed on the buried oxide film, said top semiconductor layer having a portion (5) of a first conductivity type; a gate electrode (4) formed on the top semiconductor layer with a gate oxide film (7) interposed therebetween; source and drain regions (13) of a second conductivity type formed in the top semiconductor layer and on both sides of the gate electrode; and an embedded region (6) of the second conductivity type which is disposed in the top semiconductor layer and between the source and drain regions and is separated from the source and drain regions and from an interface between the top semiconductor layer and the gate oxide film. The embedded region is defined by a tilted implantation of ions of the first conductivity type, using the gate electrode as a mask. The SOI-MOSFET has a fully depleted surface channel (5a) due to the contact potential between said surface channel and the embedded region, whereby the Kink effect is prevented.
    • SOI-MOSFET包括:衬底(1); 形成在所述基板上的埋入氧化物膜(2) 形成在所述掩埋氧化膜上的顶部半导体层(3),所述顶部半导体层具有第一导电类型的部分(5) 形成在上半导体层上的栅电极(4),其间插入有栅氧化膜(7); 源极和漏极区域(13),形成在顶部半导体层中并在栅极电极的两侧; 以及第二导电类型的嵌入区域(6),其设置在顶部半导体层中并且在源极和漏极区域之间并且与源极和漏极区域以及从顶部半导体层和栅极氧化物膜之间的界面分离 。 通过使用栅电极作为掩模,倾斜注入第一导电类型的离子来限定嵌入区域。 由于所述表面通道和嵌入区域之间的接触电位,SOI-MOSFET具有完全耗尽的表面通道(5a),从而防止扭结效应。
    • 69. 发明公开
    • SOI transistor with pocket implant
    • SOI晶体管Taschenimplantat。
    • EP0497216A2
    • 1992-08-05
    • EP92101130.0
    • 1992-01-24
    • TEXAS INSTRUMENTS INCORPORATED
    • Houston, Theodore W.Pollack, Gordon P.
    • H01L29/784
    • H01L29/66772H01L29/78612
    • A silicon-on-insulator MOS transistor (200) is disclosed that has an implanted region (32) of the same conductivity type as the body underneath one or both of the extended drain and source portions (26) of the drain (24) and the source (23) with and without a BTS contact or a general body contact. With only the pocket implants, the back gate threshold voltage is enhanced to reduce the possibility of back gate current flowing. With the pocket implants and a body contact, the floating body effects are minimized. Due to the BTS contact being located as far into the source as the pocket implant extends, negligible impact is made on the device channel. Ohmic connection between the source and the body is made for example by way of silicidation.
    • 公开了一种绝缘体上MOS晶体管(200),其具有与漏极(24)的延伸的漏极和源极部分(26)中的一个或两个相同的导电类型的注入区域(32)和 具有和不具有BTS接触的源(23)或一般身体接触。 仅使用袋式注入器,增加了背栅阈值电压,以减少背栅电流流动的可能性。 随着口袋种植体和身体接触,浮体效应最小化。 由于随着袋状植入物的延伸,BTS触点位于远处,因此对器件通道的影响可以忽略不计。 源和身体之间的欧姆连接例如通过硅化法进行。