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51. 发明公开

EP1499860A4 MASS FLOW METER WITH CHIP-TYPE SENSORS 审中-公开
标题翻译：质量流量带芯片形传感器METERS
公开(公告)号：EP1499860A4
公开(公告)日：2007-05-30
申请号：EP03742294
申请日：2003-06-28
申请人： HEETRONIX
发明人： VINCZE CRAIG , GIBSON JAMES , PARSONS JAMES D , FEHLMAN THOMAS
IPC分类号： G01F1/00 , G01F1/684 , G01F1/692 , G01F1/696 , G01F1/68
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/6847 , G01F5/00
摘要： A mass flow meter employs discrete chip-type temperature sensors (Ul,U2,Dl,D2) to sense a fluid flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin film tungsten (28) on an AlN substrate (30). The sensors can be distributed symmetrically with respect to the conduit (4) through which the fluid flows, and can be connected in a four-sensor bridge circuit for accurate flow rate monitoring. An output from the mass flow meter can be used to control the fluid flow.

52. 发明公开

EP1770389A1 THERMAL SENSOR AND MEASUREMENT DEVICE USING THE SAME 有权转让
标题翻译： THERMISCHER SENSOR SOWIE DIESEN VERWENDENDE MESSVORRICHTUNG
公开(公告)号：EP1770389A1
公开(公告)日：2007-04-04
申请号：EP05755231.7
申请日：2005-06-28
申请人： MITSUI MINING & SMELTING CO., LTD.
发明人： KUBOTA, Akiko, Mitsui Mining & Smelting Co., Ltd. , TOMONARI, Kenji, Mitsui Mining & Smelting Co.,Ltd. , KAWANISHI, T., Mitsui Mining & Smelting Co., Ltd.
IPC分类号： G01N25/18 , G01F1/692
CPC分类号： G01N27/18 , B01D53/56 , B01D2251/2067 , B01D2257/404 , F01N2610/02 , G01F1/6842 , G01F1/692 , G01F1/699 , G01N25/18
摘要： A thermal sensor in which, when an object to be measured is a water-based liquid, attachment of air bubbles to the external surface of the sensor is reduced to improve measurement accuracy. The thermal sensor has a sensing element (21a) including a heat producing body and a temperature sensing body, a resin mold (23) for sealing the sensing element (21a), and a heat transmission member (21c) for transmitting heat between the sensing element (21a) and a water-based object to be measured. A part of the heat transmission member (21c) is exposed from the resin mold (23) to form an exposed surface section. A hydrophilic film (50) formed of a silicon oxide film is applied to the exposed surface section and to that part of the surface of the resin mold which is positioned around the exposed surface section.
摘要翻译：一种热传感器，其中当待测物体为水基液体时，气泡附着到传感器的外表面被降低以提高测量精度。热传感器具有包括发热体和温度检测体的检测元件（21a），用于密封检测元件（21a）的树脂模具（23）和用于在感测元件之间传递热量的传热构件元件（21a）和待测量的水性物体。传热构件（21c）的一部分从树脂模具（23）露出以形成暴露的表面部分。将由氧化硅膜形成的亲水膜（50）施加到暴露的表面部分和位于暴露表面部分周围的树脂模具的表面的那部分。

53. 发明公开

EP1615000A4 THERMAL TYPE MASS FLOW RATE SENSOR MADE OF CORROSION RESISTANT METAL, AND FLUID SUPPLY EQUIPMENT USING THE SAME 审中-公开
标题翻译：耐腐蚀金属和流体输送装置的热式质量流量计THAT
公开(公告)号：EP1615000A4
公开(公告)日：2006-06-14
申请号：EP04710538
申请日：2004-02-12
申请人： FUJIKIN KK
发明人： IKEDA NOBUKAZU , HIRATA KAORU , NISHINO KOUJI , DOHI RYOUSUKE
IPC分类号： G01F1/692 , G01F1/684 , G01F1/68
CPC分类号： G01F1/6845
摘要： A thermal type mass flow rate sensor made of corrosion resistant metal, enhancing the corrosion resistance of the thermal type mass flow rate sensor, improvement in responsivity, and making possible freedom from particles, prevention of variation in product quality, etc.; and fluid supply equipment using the same. Specifically, a thermal type mass flow rate sensor is composed of a sensor (1) comprising a corrosion resistant metal substrate (2) formed as a thin sheet on the back surface of a corrosion resistant metal material (W) by application of electrolytic etching, and a thin film (F) forming a temperature sensor (3) and a heater (4) disposed on the back surface of the corrosion resistant metal substrate (2), and a sensor base (13) hermetically fixed by laser-welding the outer peripheral surface of the corrosion resistant metal substrate (2) of the sensor (1) fitted in an attaching groove (13a).

54. 发明公开

EP1094306A1 THERMAL FLOW SENSOR, METHOD AND APPARATUS FOR IDENTIFYING FLUID, FLOW SENSOR, AND METHOD AND APPARATUS FOR FLOW MEASUREMENT 审中-公开
标题翻译：热式流量计，方法和装置用于识别液体，流量传感器和方法及装置流量测量
公开(公告)号：EP1094306A1
公开(公告)日：2001-04-25
申请号：EP00917448.3
申请日：2000-04-25
申请人： Yazaki Corporation
发明人： ODA, Seiji , YAMAURA, Michiaki
IPC分类号： G01F1/692
CPC分类号： G01N27/18 , G01F1/6845 , G01F1/6888 , G01F1/692 , G01F1/696 , G01F1/698 , G01K1/00 , G01N25/00 , G01N33/22
摘要： When a micro heater (4) energized by external drive current heats a fluid, an upstream thermopile (8) detects the temperature of the fluid before heated and produces a first temperature signal, while a downstream thermopile (5) detects the temperature of the fluid heated by the micro heater (4) and produces a second temperature signal. The flow rate of the fluid is calculated using the difference between the two temperature signals. A right thermopile (11) and a left thermopile (13) arranged substantially crosswise of the flow of the fluid with respect to the micro heater (4) detect the temperature of the fluid and produce a right temperature signal and a left temperature signal, respectively. The calculated flow rate is corrected by physical properties of the fluid calculated based on the right and left temperature signals. The flow rate of fluid can be accurately measured even with a flow sensor whose output is sensitive to the type and composition of a fluid to be measured.
摘要翻译：当由外部驱动电流激励的微加热器（4）加热在上游热电堆的流体（8）检测流体的温度加热之前和产生第一温度信号，而下游热电堆（5）检测流体的温度由微加热器（4）加热，并产生一个第二温度信号。的流体的流率是使用两个温度信号之间的差计算。右热电堆（11）和布置成基本上横向的流体的流动相对于所述微加热器的左热电堆（13）（4）检测流体的温度并产生一个合适的温度信号和左温度信号，分别，计算的流速是通过基于右和左温度信号计算所述流体的物理性质进行校正。流体的流率可以被精确地设定，即使流量传感器，其输出的类型和一个流体的组合物敏感待测量测定。

55. 发明公开

EP0937966A3 Thermal air flow sensor 审中-公开
标题翻译：热式空气流量计
公开(公告)号：EP0937966A3
公开(公告)日：1999-12-15
申请号：EP99102771.5
申请日：1999-02-23
申请人： Hitachi, Ltd.
发明人： Nakada, Keiichi
IPC分类号： G01F1/684 , G01F1/692
CPC分类号： G01F1/6845
摘要： Disclosed is a thermal air flow sensor in which polycrystalline silicon is used as a heat generating resistor (120), and which has improved detection sensitivity. An upstream heat generating resistor (120A), a downstream heat generating resistor (120B), a temperature measuring resistor (120C), and an air temperature measuring resistor (120D) are formed on a silicon substrate. These resistors are each formed on a silicon substrate. These resistors are each formed of a semiconductor thin film in which polycrystalline silicon is mixed with a silicide compound and which contains an impurity doped therein. The formed resistor has small specific resistance and a large resistance temperature coefficient.

56. 发明公开

EP0380581A4 FLUID FLOW DETECTOR 失效
标题翻译：流体流量检测器
公开(公告)号：EP0380581A4
公开(公告)日：1992-09-23
申请号：EP88909490
申请日：1988-09-28
申请人： ROSEMOUNT INC.
发明人： SITTLER, FRED, C. , CRABTREE, JAMES, H.
IPC分类号： G01F1/68 , G01F1/684 , G01F1/692 , G01N27/18 , G01N30/02 , G01P5/12
CPC分类号： G01F1/6845 , G01F1/684 , G01N27/18 , G01N2030/025

57. 发明授权

EP3869166B1 FLOW METER AND METHOD OF MANUFACTURING FLOW METER 有权
公开(公告)号：EP3869166B1
公开(公告)日：2023-12-13
申请号：EP21157419.9
申请日：2021-02-16
发明人： ABO, Kazuo , NAKAJIMA, Koji
IPC分类号： G01F1/68 , G01F1/684 , G01F1/692

58. 发明授权

EP2600121B1 THERMAL FLOW METER 有权转让
公开(公告)号：EP2600121B1
公开(公告)日：2023-05-24
申请号：EP11812545.9
申请日：2011-07-28
发明人： NAKANO Hiroshi , MATSUMOTO Masahiro , ASANO Satoshi , HANZAWA Keiji
IPC分类号： G01F1/692 , G01F1/684 , G01F1/699

59. 发明授权

EP3147633B1 THERMAL TYPE AIR FLOW SENSOR 有权转让
公开(公告)号：EP3147633B1
公开(公告)日：2022-04-27
申请号：EP16192517.7
申请日：2011-08-19
发明人： DOI, Ryosuke , HANZAWA, Keiji
IPC分类号： G01F1/684 , G01F1/692 , G01F5/00 , G01F15/10

60. 发明授权

EP3751239B1 THERMORESISTIVE MICRO SENSOR DEVICE 有权转让
公开(公告)号：EP3751239B1
公开(公告)日：2022-03-02
申请号：EP19180341.0
申请日：2019-06-14
发明人： SEIDL, Martin , BRETTHAUER, Christian , KLEIN, Wolfgang , KRUMBEIN, Ulrich , TUMPOLD, David
IPC分类号： G01F1/692 , G01L9/00 , G01F1/684 , G01K7/18

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