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    • 54. 发明公开
    • SURFACE-EMITTING LASER ARRAY AND LASER DEVICE
    • 表面发射激光阵列和激光装置
    • EP3220493A3
    • 2017-10-18
    • EP17158203.4
    • 2017-02-27
    • Ricoh Company, Ltd.
    • HANAOKA, Katsunari
    • H01S5/02H01S5/183H01S5/42H01S5/00H01S5/18H01S5/40
    • A surface-emitting laser array (10, 10A, 10B, 10C) and a laser device (300) including the surface-emitting laser array (10, 10A, 10B, 10C). The surface-emitting laser array (10, 10A, 10B, 10C) includes a layered product including a lower reflecting mirror (102) having two layers with different refractive indexes, an upper reflecting mirror (106), and an active layer (104) disposed between the lower reflecting mirror (102) and the upper reflecting mirror (106), a first separation trench (11) from which the upper reflecting mirror (106), the active layer (104), and the lower reflecting mirror (102) are removed, the first separation trench (11) separating the surface-emitting laser array (10, 10A, 10B, 10C) from an adjacent chip (10, 10A, 10B, 10C), and a second separation trench (13) disposed between the first separation trench (11) and a light-emitting unit (1) that emits a laser beam, the second separation trench (13) having a prescribed depth.
    • 一种表面发射激光器阵列(10,10A,10B,10C)和包括该表面发射激光器阵列(10,10A,10B,10C)的激光器装置(300)。 表面发射激光器阵列(10,10A,10B,10C)包括层叠产品,该层叠产品包括具有不同折射率的两层的下反射镜(102),上反射镜(106)和有源层(104) 配置在下部反射镜102与上部反射镜106之间的上部反射镜106,活性层104以及下部反射镜102的第一分离槽11, ,将表面发射激光器阵列(10,10A,10B,10C)与相邻芯片(10,10A,10B,10C)分开的第一分离槽(11)和设置在第一分离槽 第一分离槽(11)和发射激光束的发光单元(1),第二分离槽(13)具有预定的深度。