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    • 55. 发明公开
    • Optical measuring apparatus
    • Optischer Messapparat。
    • EP0310231A2
    • 1989-04-05
    • EP88307228.2
    • 1988-08-05
    • UNION TOOL CO LTD
    • Katayama, Ichiro
    • G01B11/00G01B11/02
    • G01B11/02G01B11/00
    • An optical measuring apparatus includes a light scanning section (20) for converting a light beam (61) from a first light source (10) to a parallel scanning light beam (63), into which an object (M) is placed, the dimension of which is to be measured. The apparatus further includes a focusing section (40) including a first focusing lens (41) for focusing the parallel scanning light beam, an electric signal generating section (50) for converting focused light to an electric signal, a measuring reference signal generating section and an electric signal processing section ( 70 ).
      The light scanning section (20) comprises a first mirror (31) and a vertically displaced second mirror (32), each mirror being rotated synchronously. The measuring reference section comprises a transparent scale (61) which is rotated in synchronism with the first and second mirrors, a light source, a second focusing lens and a second photoelectric conversion element. The electric signal processing section (70) processes the electric signal from the electric signal generating section (50) by employing the measuring reference signal.
    • 一种光学测量装置,包括用于将来自第一光源(10)的光束(61)转换成放置有物体(M)的平行扫描光束(63)的光扫描部分(20),其尺寸 其中有待测量。 该装置还包括聚焦部分(40),其包括用于聚焦平行扫描光束的第一聚焦透镜(41),用于将聚焦光转换成电信号的电信号产生部分(50),测量参考信号产生部分 电信号处理部(70)。 光扫描部分(20)包括第一反射镜(31)和垂直移动的第二反射镜(32),每个反射镜同步旋转。 测量基准部分包括与第一和第二反射镜同步旋转的透明标尺(61),光源,第二聚焦透镜和第二光电转换元件。 电信号处理部(70)通过采用测量参考信号来处理来自电信号发生部(50)的电信号。