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    • 53. 发明公开
    • PRESSURE SENSOR
    • EP3483578A1
    • 2019-05-15
    • EP16908906.7
    • 2016-12-08
    • NGK Spark Plug Co., Ltd.
    • FUJI YusukeYAMADA TatsunoriGOTO DaikiIWABUCHI Junki
    • G01L23/22G01L7/08G01L23/10
    • In a pressure sensor, the measuring accuracy of pressure is improved. The pressure sensor includes: a cylindrical casing extending in an axial direction; diaphragm joined to the distal end side of the casing, extending in a direction intersecting the axis of the casing and deforming in accordance with pressure received on the distal end side; and a sensor section disposed inside the casing and outputting an electric signal corresponding to the deformation of the diaphragm. The diaphragm is provided with a plate-shaped base part and three or more protruding parts protruding from the distal end side surface of the base part toward the distal end side and set apart from each other. The relationships 0.05T ≤ H≤ 2.5T and 0.05 ≤ (S2/S1) ≤ 0.8 are satisfied, where T is the thickness of the base part, H is the axial-direction length of the protruding parts, S1 is the area of a base distal end surface that would be the distal end side surface of the base part if the protruding parts were not present, and S2 is the total area of the protruding distal end surfaces that are the distal end side surfaces of the three or more protruding parts.