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    • 44. 发明公开
    • Semiconductor device
    • 半导体器件
    • EP2492962A2
    • 2012-08-29
    • EP12157056.8
    • 2012-02-27
    • Renesas Electronics Corporation
    • Ando, Yuji
    • H01L29/778H01L29/20H01L29/201H01L29/04
    • H01L29/7786H01L29/045H01L29/2003H01L29/201H01L29/7783H01L29/7787
    • A semiconductor device including a field effect transistor having a buffer layer (11) subjected to lattice relaxation, a channel layer (12), and an electron supply layer (13) formed in this order with group-III nitride semiconductors respectively in a growth mode parallel with a [0001] or [000-1] crystallographic axis over a substrate and having a source electrode and a drain electrode, those being coupled electrically to the channel layer, and a gate electrode formed over the electron supply layer, in which, in the buffer layer and the electron supply layer, a layer existing on the group-III atomic plane side of the channel layer has a lattice constant larger than a layer existing on the group-V atomic plane side of the channel layer; and the electron supply layer has a bandgap larger than the channel layer.
    • 一种包括场效应晶体管的半导体器件,所述场效应晶体管具有经受晶格弛豫的缓冲层(11),沟道层(12)和电子供应层(13),其分别以III族氮化物半导体以生长模式 与衬底上的[0001]或[000-1]晶轴平行,并且具有源电极和漏电极,那些电连接到沟道层的电极和形成在电子供应层上的栅电极,其中, 在所述缓冲层和所述电子供给层中,存在于所述沟道层的所述III族原子平面侧上的层具有比所述沟道层的所述V族原子平面侧上存在的层更大的晶格常数; 并且电子供应层具有比沟道层大的带隙。