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    • 44. 发明公开
    • SEMICONDUCTOR LIGHT EMITTING ELEMENT AND METHOD FOR MANUFACTURING THE SAME
    • VERFAHREN ZU SEINER HERSTELLUNG的LECTEMITTITENDES HALBLEITERBAUEMENT
    • EP2178129A4
    • 2012-08-29
    • EP08791964
    • 2008-07-31
    • NICHIA CORP
    • ICHIHARA TAKASHIYOSHIDA HIROFUMIYAMADA TAKAOWAKAI YOHEI
    • H01L33/00H01L21/301H01S5/02H01S5/32H01S5/323
    • H01S5/0201B82Y20/00H01L33/0095H01S5/0202H01S5/0213H01S5/305H01S5/3063H01S5/3202H01S5/3211H01S5/34333
    • A semiconductor light emitting element, which has a substantially square shape in plan view, comprising: a sapphire substrate (10); and a gallium nitride compound semiconductor layer (12, 13, 14) laminated on a first main face of said substrate (10), a plurality of protruding portions (11) with a polygonal bottom face shape is formed on the first main face of the sapphire substrate (10), in a plan view from the first main face side of the sapphire substrate (10), the pair of opposing side faces of the semiconductor light emitting element that extend in a direction Y that is substantially perpendicular to a direction X that faces a single acute vertex from a center of gravity of the polyhedral shape of the protruding portion bottom face have a face that is inclined to the first main face on the first main face side of the sapphire substrate (10), and a face that is substantially perpendicular to the second main face on the second main face side of the sapphire substrate (10), and another pair of side faces is substantially perpendicular to the first main face of the sapphire substrate (10).
    • 从氮化镓系化合物半导体层叠在具有取向平坦性的蓝宝石基板上的晶片制造半导体发光元件的方法包括:在具有断开的蓝宝石基板的第一主面上层叠半导体层 角度方向Xo平行于取向平面; 形成在所述半导体层侧上沿着与Xo方向大致正交的方向Y延伸的第一断裂槽; 形成从第一断裂槽内的预测分裂线向±Xo方向偏移预定距离并平行于蓝宝石衬底内部的第一断裂槽并对应于偏角的倾斜的第二断裂线 ¸; 以及沿着第一和/或第二断裂线分裂晶片。