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    • 50. 发明公开
    • Transmission electron microscope, and method of observing specimen
    • 透射电子显微镜和观察标本的方法
    • EP2801998A3
    • 2014-12-10
    • EP14002375.5
    • 2009-04-27
    • Hitachi High-Technologies Corporation
    • Nakazawa, EikoKobayashi, HiroyukiKuwabata, Susumu
    • H01J37/20G01N1/28G01N23/225G01N1/40H01J37/26
    • H01J37/20G01N1/2813G01N23/04G01N23/2251G01N2001/4027H01J37/26H01J37/261H01J37/3007H01J2237/2002H01J2237/20214H01J2237/204H01J2237/206
    • Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
    • 提供了一种能够在不使试样变形的情况下直接观察试样形状的装置。 通过使具有开口的样品保持部件(例如,微细网和网状物)保持离子液体并将样品充电到其中以使样品悬浮在离子液体中来进行观察。 此外,在试样保持部件附近,设置注入离子液体(离子液体导入机构)和/或电极的机构。 当电压施加到电极上时,试样在离子液体中移动或变形。 可以观察到标本如何移动或变形。 此外,在样本保持部件附近设置有蒸发装置,以使样本在蒸发的同时能够充入离子液体中。 此外,在样本保持部件附近,提供微型毛细管以将液态样本充入离子液体中。 请注意,标本保持部件被设计成可旋转的。