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    • 36. 发明公开
    • LIGHT-ABSORBING POLYMER, METHOD FOR SYNTHESIZING THE SAME, AND FILM-FORMING COMPOSITION AND ANTIREFLECTION FILM PREPARED USING SAID POLYMER
    • 光吸收的高分子合成方法和成膜所制造此聚合物组成及防反射膜
    • EP0861855A1
    • 1998-09-02
    • EP97940386.2
    • 1997-09-16
    • CLARIANT INTERNATIONAL LTD.
    • KANG, Wen-BingTOKIDA, AkihikoARAMAKI, KayoTANAKA, Hatsuyuki Clariant (Japan) K. K.KIMURA, Ken
    • C08F8/14C08F8/32C08F216/00C08F222/00C08L29/00C08L35/00C09D5/00C09D129/00C09D135/00G03F7/11
    • C08F8/34C08F8/30C09D5/32G03F7/091
    • A radiation absorbing polymer is characterized by having a main chain of copolymer containing recurring units with dicarboxylic acid or carboxylic anhydride group with an organic chromophore bonded to the carboxyl group through methylene or alkylene linkage group, where the organic chromophore is bonded to the carboxyl group by esterification reaction.
      Residual carboxyl groups of the radiation absorbing polymer can optionally be amidized and/or imidized with an aromatic compounds having a reactive amino group.
      The radiation absorbing polymer shows a good step coverage when the polymer is dissolved in the same solvent as is used for resist solution together with, upon necessity, an aromatic compound with a reactive amino group to improve the characteristics and can form an antireflective coating which is insoluble in a resist solvent after baking the coated film on the substrates.
      Then the photoresist is applied on the antireflective coating and is exposed by radiation such as deep ultraviolet radiation. A resist pattern with high resolving power is formed, which is not affected by standing wave upon manufacturing integrated circuit elements.
    • 辐射吸收聚合物由具有共聚物包含被通过亚甲基或亚烷基连接基团,其中有机发色团是通过结合到羧基结合到羧基的有机发色团的二羧酸或具有羧酸酐基团的重复单元的主链为特征的 酯化反应。 辐射吸收聚合物的残留羧基可任选被酰胺化的和/或与芳族化合物具有活性氨基酰亚胺化。 辐射吸收聚合物显示了良好的阶梯覆盖当聚合物溶解在相同的溶剂用于抗蚀剂溶液一起,根据需要添加到芳族化合物与反应性氨基基团,以提高特性,并且可以形成在抗反射涂层的所有其 不溶于抗蚀剂烘烤涂膜-在基板上之后溶剂。 然后光致抗蚀剂施加在抗反射涂层和通过辐射暴露:如深紫外线辐射。 具有高分辨力的抗蚀图案被形成,所有这一切都不会受在制造集成电路元件的驻波。
    • 37. 发明公开
    • Coating composition and antifouling paint
    • Beschichtungszusammensetzung undfäulnisverhütendeFarbe。
    • EP0659848A2
    • 1995-06-28
    • EP94309674.3
    • 1994-12-22
    • Hitachi Chemical Co., Ltd.
    • Tanaka, HiroyukiTai, SeijiKamijima, KoichiWada, YumikoMamiya, TsutomuMurakami, MakotoYoshida, Teruo
    • C09D5/14C09D135/00
    • C09D133/064C09D5/1668C09D133/02C09D135/00C08L2666/14C08L2666/28C08L2666/54
    • A coating composition comprising (A) a polymer obtained by polymerizing (a1) one or more unsaturated acid anhydrides or unsaturated carboxylic acids and (a2) one or more other unsaturated monomers copolmerizable therewith, and (B) at least one compound selected from one or both of (b1) a compound group comprising aminoacids, compounds having one or more carboxyl groups in the molecule, compounds having both hydrophobic group and hydrophilic group in the molecule, chelate compounds, hydroxyl- or acetyl-substituted carboxylic acid esters, ion-exchangeable layer clay minerals and powers of inorganic materials which have been made lipophilic with an organic material, and (b2) a group of compound which is crystallizable and selected from polyether compounds, polyester compounds, polyether-polyester compounds, olefinic glycol compounds, acrylic esters, methacrylic esters and polycarbonate compounds, is useful for preparing an antifouling coating composition by mixing with a copper compound.
    • 一种涂料组合物,其包含(A)通过聚合(a1)一种或多种不饱和酸酐或不饱和羧酸获得的聚合物和(a2)可与其共聚的一种或多种其它不饱和单体,和(B)至少一种选自一种或多种 (b1)包含氨基酸的化合物,分子中具有一个或多个羧基的化合物,分子中具有疏水基和亲水基的化合物,螯合化合物,羟基或乙酰基取代的羧酸酯,可离子交换的 层状粘土矿物和已经用有机材料制成亲油性的无机材料的功率,和(b2)一组可聚结并选自聚醚化合物,聚酯化合物,聚醚 - 聚酯化合物,烯烃二醇化合物,丙烯酸酯, 甲基丙烯酸酯和聚碳酸酯化合物可用于通过与铜化合物混合来制备防污涂料组合物。
    • 38. 发明授权
    • COATING COMPOSITIONS
    • 涂料组合物
    • EP0482052B1
    • 1994-09-28
    • EP90910805.2
    • 1990-07-12
    • COURTAULDS COATINGS (HOLDINGS) LIMITED
    • MARRION, Alastair Robert
    • C09D133/00C09D135/00
    • C09D177/00C08F8/30C08F2800/20C08L77/08C08L101/06C09D125/14C09D133/064C09D177/06Y10T428/31855C08L2666/02C08F212/08
    • A curable coating composition comprises a hydroxy-functional component (A) having at least two hydroxy groups per molecule and an anhydride-functional component (B) having at least two carboxylic acid anhydride groups per molecule. At least one of the components (A) and (B) is a film-forming polymer. The coating composition contains amidine groups for accelerating the curing reaction between the hydroxy groups of component (A) and the anhydride groups of component (B). The amidine groups are present in the molecule of either of the components (A) or (B) and/or are present in the form of a separate compound containing an amidine group. The component or compound containing an amidine group generally has formula (I) in which R1 represents hydrogen, or an organic group attached through a carbon atom, or an amine group which can be substituted, or a hydroxy group or etherified hydroxy group; R?2 and R3¿ each independently represent hydrogen or an organic group attached through a carbon atom or are joined to one another to form (with the linking -N=C-N-) a heterocyclic ring; and R4 represents hydrogen, an organic group attached through a carbon atom, or a hydroxyl group which can be etherified. Preferably, R?2 and R3¿ are joined to form an imidazoline, imidazole, tetrahydropyrimidine, dihydropyrimidine or pyrimidine ring.
    • 可固化涂料组合物包含每分子具有至少两个羟基的羟基官能组分(A)和每分子具有至少两个羧酸酐基团的酸酐官能组分(B)。 组分(A)和(B)中的至少一种是成膜聚合物。 涂料组合物含有脒基团以加速组分(A)的羟基与组分(B)的酸酐基团之间的固化反应。 脒基团存在于组分(A)或(B)中任一种的分子中和/或以含有脒基团的单独化合物的形式存在。 含有脒基的组分或化合物通常具有式(I),其中R 1表示氢或通过碳原子连接的有机基团,或可被取代的胺基,或羟基或醚化的羟基; R 2和R 3各自独立地表示氢或通过碳原子连接的有机基团或相互连接形成(与连接-N = C-N-)杂环; 并且R4代表氢,通过碳原子连接的有机基团或可以被醚化的羟基。 优选R 2和R 3连接形成咪唑啉,咪唑,四氢嘧啶,二氢嘧啶或嘧啶环。