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31. 发明公开

EP0053620A4 METHOD AND APPARATUS FOR MATERIAL ANALYSIS. 失效
标题翻译： VERFAHREN UND VORRICHTUNG ZUR MATERIALANALYSE。
公开(公告)号：EP0053620A4
公开(公告)日：1982-10-07
申请号：EP81901515
申请日：1981-06-10
申请人： COMMW SCIENT IND RES ORG
发明人： REID ALAN FORREST , ZUIDERWIJK MARTIN ANTHONY MARI
IPC分类号： G01N23/22 , G01N23/225 , H01J37/252 , G01N23/223
CPC分类号： H01J37/244 , G01N23/22 , G01N23/2252 , G01N2223/053 , G01N2223/071 , G01N2223/079 , G01N2223/102 , G01N2223/402 , G01N2223/418 , G01N2223/605 , G01N2223/606 , H01J37/256 , H01J37/28 , H01J2237/2445 , H01J2237/24495
摘要： Method and apparatus for material analysis in which X-rays generated pursuant to incidence of an electron beam on the material are detected by a detector (24) which generates signals representative of X-ray intensity. A first single channel analyser (SCA-1) is connected to receive the signals from the detector (24) and to pass to an associated first counter (CTR-1) a count signal whenever the signal applied to the first single channel analyser is representative of an X-ray energy within a relatively narrow range of such energies. A second single channel analyser (BG-1) is also connected to receive the signals from the detector (24) and to pass to an associated second counter (B-1) a count signal whenever the signal applied to the second analyser (BG-1) is representative of an X-ray energy falling within a much broader range of such energies than the first-mentioned range. The first and second counters (CTR-1 and B-1) accumulate the count signals applied thereto. The count in the second counter (B-1) is compared by a comparator (C-1) with a pre-established count in a third counter (A-1) and when the count in the second counter (B-1) assumes the same value as the count in the third counter (A-1) the counts in the first and second counters (CTR-1 and B-1) are held. The so held count in the first counter (CTR-1) then itself represents a normalized ratio of X-ray energy within the narrow range to the X-ray energy for the energy spectrum represented by the broad range of energies. On the basis of this normalized ratio information as to the makeup of the material can be derived.
摘要翻译：用于材料分析的方法和设备，其中由产生表示X射线强度的信号的检测器（24）检测随材料上的电子束入射而产生的X射线。第一单通道分析器（SCA-1）被连接以接收来自检测器（24）的信号，并且每当施加到第一单通道分析器的信号是代表性的时，就将计数信号传递给相关联的第一计数器（CTR-1）在这样的能量的相对窄的范围内的X射线能量。无论何时施加到第二分析器（BG-1）的信号都被连接以接收来自检测器（24）的信号并传递到相关的第二计数器（B-1） 1）代表的X射线能量落在比首先提到的范围更宽的能量范围内。第一和第二计数器（CTR-1和B-1）累加施加于其上的计数信号。第二计数器（B-1）中的计数由比较器（C-1）与第三计数器（A-1）中的预定计数进行比较，并且当第二计数器与第三计数器（A-1）中的计数值相同的值保持第一和第二计数器（CTR-1和B-1）中的计数值。在第一计数器（CTR-1）中这样保持的计数本身表示窄范围内的X射线能量与由宽范围能量表示的能量谱的X射线能量的归一化比率。根据这个归一化的比率信息可以得出材料的组成。

32. 发明公开

EP3036533A1 METHODS AND SYSTEMS FOR FABRICATING PLATELETS OF A MONOCHROMATOR FOR X-RAY PHOTOELECTRON SPECTROSCOPY 有权转让
标题翻译：方法和系统血小板从单色X射线光电子能谱的生产
公开(公告)号：EP3036533A1
公开(公告)日：2016-06-29
申请号：EP14837703.9
申请日：2014-08-19
申请人： ReVera Incorporated
发明人： FANTON, Jeffrey T. , SMEDT, Rodney , SCHUELER, Bruno W. , REED, David A.
IPC分类号： G01N23/22 , G01N23/227 , H01J49/48 , H01J37/256
CPC分类号： G01N23/20 , B23Q17/20 , G01N23/2273 , G21K1/06 , G21K2201/064 , H01J37/256 , Y10T29/49764 , Y10T29/49769 , Y10T29/49771 , Y10T29/53022
摘要： Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.

33. 发明授权

EP2795656B1 CHARGED PARTICLE VORTEX WAVE GENERATION 有权
标题翻译：带电粒子涡旋波产生
公开(公告)号：EP2795656B1
公开(公告)日：2016-05-04
申请号：EP12813340.2
申请日：2012-12-19
申请人： Universiteit Antwerpen
发明人： VERBEECK, Johan , VAN TENDELOO, Gustaaf
IPC分类号： H01J3/02 , H01J37/04 , H01J37/06 , H01J37/08 , H01J37/26
CPC分类号： H01J37/04 , H01J3/02 , H01J3/021 , H01J37/06 , H01J37/08 , H01J37/256 , H01J37/261 , H01J2237/06383 , H01J2237/2614

34. 发明公开

EP2912443A1 AUTOMATED MINERAL CLASSIFICATION 审中-公开
标题翻译：自动矿物分类
公开(公告)号：EP2912443A1
公开(公告)日：2015-09-02
申请号：EP13849908.2
申请日：2013-09-30
申请人： FEI Company
发明人： OWEN, Michael James , BUHOT, Michael
IPC分类号： G01N23/225
CPC分类号： G01N23/2252 , G01N2223/418 , H01J37/256 , H01J37/28 , H01J2237/2442 , H01J2237/24425 , H01J2237/2804 , H01J2237/2807
摘要： The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows untrained operators to use it, as opposed to previous systems, which required extensive training and expertise.
摘要翻译：本发明公开了用于矿物分析的两种现有方法的组合，并且利用了相似度量发明，其允许以理论组成术语来描述矿物定义，这意味着用户不需要找到每种矿物的例子或调整规则。这个系统允许未经培训的操作员使用它，而不是以前的系统，这需要广泛的培训和专业知识。

35. 发明公开

EP2818852A1 Methods and devices for high throughput crystal structure analysis by electron diffraction 有权
$Methods and devices for high throughput crystal structure analysis by electron diffraction$
标题翻译：方法和装置用于晶体结构分析的高通道通过电子衍射
公开(公告)号：EP2818852A1
公开(公告)日：2014-12-31
申请号：EP14176023.1
申请日：2009-11-06
申请人： Nanomegas SPRL , Institut Polytechnique de Grenoble , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
发明人： Nicolopoulos, Stavros , Bultreys, Daniel , Rauch, Edgard
IPC分类号： G01N23/20 , H01J37/28
CPC分类号： H01J37/28 , G01N23/20058 , H01J37/05 , H01J37/222 , H01J37/256 , H01J37/2955 , H01J2237/226 , H01J2237/25 , H01J2237/2802
摘要： The present invention relates to a method for calculating an orientation and phase map of a sample (38) comprising a plurality of crystals (36) in different orientations and different known phases, and a device for interfacing with a TEM to perform this and related methods.
摘要翻译：本发明涉及一种方法，用于在包括在不同的方向和不同的已知相晶体的多个（36）样本（38）的方向和相位图计算，以及用于与TEM接口连接的装置执行此和相关方法，

36. 发明授权

EP1290430B1 APPARATUS FOR INSPECTION OF SEMICONDUCTOR WAFERS AND MASKS USING A LOW ENERGY ELECTRON MICROSCOPE WITH TWO ILLUMINATING BEAMS 有权
标题翻译：设备用于半导体晶片测试和口罩具有带两个光束使用低能量电子显微镜
公开(公告)号：EP1290430B1
公开(公告)日：2014-11-12
申请号：EP01939046.7
申请日：2001-05-14
申请人： KLA-Tencor Corporation
发明人： VENEKLASEN, Lee , ADLER, David, L. , MARCUS, Matthew
IPC分类号： H01J37/26
CPC分类号： H01J37/256 , H01J37/26 , H01J2237/0044 , H01J2237/2538 , H01J2237/262

37. 发明授权

EP2216798B1 Particle beam system 有权转让
标题翻译：粒子束
公开(公告)号：EP2216798B1
公开(公告)日：2014-04-02
申请号：EP10001335.8
申请日：2010-02-09
申请人： Carl Zeiss Microscopy GmbH
发明人： Mantz, Hubert , Arnold, Rainer , Albiez, Michael
IPC分类号： H01J37/28 , H01J37/244 , H01J37/22 , H01J37/05 , H01J37/256
CPC分类号： H01J37/28 , H01J37/05 , H01J37/222 , H01J37/244 , H01J37/256

38. 发明公开

EP2680295A2 On-axis detector for charged particle beam system 审中-公开
标题翻译： Achsendetektorfürein System mit geladenem Teilchenstrahl
公开(公告)号：EP2680295A2
公开(公告)日：2014-01-01
申请号：EP13173909.6
申请日：2013-06-27
申请人： FEI COMPANY
发明人： Graupera, Anthony , Parker, N. William , Utlaut, Mark
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/256 , H01J37/244 , H01J37/28 , H01J2237/2448
摘要： A split grid multi-channel secondary particle detector for a charged particle beam system includes a first grid segment and a second grid segment, each having independent bias voltages creating an electric field such that the on-axis secondary particles that are emitted from the target are directed to one of the grids. The bias voltages of the grids can be changed or reversed so that each grid can be used to detect the secondary particles and the multi-channel particle detector as a whole can extend its lifetime.
摘要翻译：用于带电粒子束系统的分裂网格多通道二次粒子检测器包括第一栅格区段和第二栅极区段，每个区段具有独立的偏置电压，产生电场，使得从靶发射的轴上二次颗粒为指向其中一个网格。网格的偏置电压可以改变或反转，因此每个网格可以用于检测二次粒子，并且多通道粒子检测器作为一个整体可以延长其寿命。

39. 发明公开

EP2286275A1 SENSORKOPF FÜR EINEN RÖNTGENDETEKTOR SOWIE DIESEN SENSORKOPF ENTHALTENDER RÖNTGENDETEKTOR 有权转让
标题翻译： X射线探测器感测头和该传感器探头中含有X射线探测器
公开(公告)号：EP2286275A1
公开(公告)日：2011-02-23
申请号：EP09761643.7
申请日：2009-06-03
申请人： BRUCKER NANO GMBH
发明人： KRÖMER, Robert
IPC分类号： G01T1/24 , H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/244 , H01J37/256 , H01J2237/2442 , H01L2224/49171
摘要： The invention relates to a sensor head (30) for an X-ray detector (74), which sensor head is reduced in size and comprises a printed circuit board (10) having a front face (12) and lateral faces (14), a sensor chip (32) which is arranged on the front face (12) of the printed circuit board (19) and which is sensitive to X-rays, a plurality of signal and control connections (40), a plurality of bonding islands (16) which are aranged so as to contact the printed circuit board (10) and which are interconnected via at least one bonding wire (46) each to the signal and control connections (40) in an electrically conductive manner, the bonding islands (16) being arranged on the lateral faces (14) of the printed circuit board (10). The arrangement of the bonding islands (16) on the lateral faces (14) of the printed circuit board (10) and the lateral bonding of the bonding wires (46) together result in a space-saving arrangement of the components of the sensor head (30) which in sum leads to a reduction in size of the sensor head (30).

40. 发明授权

EP1693879B1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：EP1693879B1
公开(公告)日：2011-02-23
申请号：EP05020939.4
申请日：2005-09-26
申请人： Hitachi Science Systems, Ltd.
发明人： Hatano, Michio c/o Hitachi, Ltd., Int. Prop. Group , Ito, Sukehiro , Tomita, Shinichi , Katane, Junichi
IPC分类号： H01J37/244 , H01J37/256 , H01J37/28
CPC分类号： H01J37/256 , H01J37/244 , H01J2237/2444 , H01J2237/2448 , H01J2237/2605 , H01J2237/2806

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