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21. 发明公开

EP2330738A1 Résonateur MEMS à transistor et oscillateur comportant un tel résonateur 审中-公开
标题翻译： MEMS谐振器晶体管和电感谐振器谐振器umfassender Oszillator
公开(公告)号：EP2330738A1
公开(公告)日：2011-06-08
申请号：EP09177918.1
申请日：2009-12-03
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Ionescu, Adrian Mihai , Grogg, Daniel , Ayöz, Suat
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/02259 , H03H9/2426 , H03H9/2447 , H03H9/2473 , H03H2009/02314
摘要： Le résonateur MEMS à transistor comprend :
- un caisson dans lequel est formé un élément de conduction constitué par une région de source (308), une région de drain (309), et une région semi-conductrice formant un canal reliant la région de source et la région de drain ;
- une structure vibrante (310) solidaire d'un substrat tout en étant libre de vibrer ;
- une structure fixe (330) portée par le substrat, un espace (ou gap) étant aménagé entre la structure fixe et la structure vibrante ;

le caisson étant intégré soit dans la structure vibrante, soit dans la structure fixe (330), de telle façon que le canal s'étende en regard du dit espace, et ledit espace renferme une microstructure (328) en un matériau piézoélectrique prévue pour assurer un couplage électromécanique entre la structure vibrante (310) et le canal de manière à permettre de moduler la conductibilité de l'élément de conduction à la fréquence de vibration de la structure vibrante.
摘要翻译：谐振器（300）具有其中形成有导电元件的半导体外壳（330），其中该元件具有形成连接源极和漏极区域（308,309）的沟道的半导电区域。在振动梁（310）和壳体之间形成间隙。壳体与梁一体化，使得通道相对于间隙延伸。间隙包围由压电材料制成的微观结构，以确保光束和通道之间的机电耦合，以调节元件在光束振动频率下的导电性。

22. 发明公开

EP2279557A1 FILTRE RESONANT A BASE DE MATRICE DE N/MEMS 有权
标题翻译： N / MEMS矩阵谐振滤波器
公开(公告)号：EP2279557A1
公开(公告)日：2011-02-02
申请号：EP09730675.7
申请日：2009-04-06
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： KHARRAT, Chady , COLINET, Eric
IPC分类号： H03H9/02
CPC分类号： H03H9/02433 , H03H9/2447 , H03H9/525 , H03H2009/02456
摘要： Resonant filter (10) comprising a matrix (100) of n × m resonators of the N/MEMS type, each resonator comprising actuation means and detection means. An input (12) of the filter, intended to receive an electrical input signal, is electrically connected to the resonator actuation means. The outputs of the resonator detection means are electrically connected together and to an output (14) of the filter, such that the signal intended to be obtained as output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.
摘要翻译：一种谐振滤波器，包括N / m M型谐振器的矩阵，每个谐振器包括致动机构和检测机构。被配置为接收电输入信号的滤波器的输入电连接到谐振器致动机构。谐振器检测机构的输出电连接到滤波器的输出端，使得作为滤波器的输出获得的信号是谐振器的机械响应之和的图像。谐振器不是机械耦合在一起的。

23. 发明授权

EP1861926B1 METHOD OF MANUFACTURING VIBRATING MICROMECHANICAL STRUCTURES 失效
标题翻译：用于生产VIBRANT微机械结构
公开(公告)号：EP1861926B1
公开(公告)日：2008-12-03
申请号：EP06737666.5
申请日：2006-03-09
申请人： Honeywell International Inc.
发明人： JAFRI, Ijaz, H. , MAGENDANZ, Galen, P. , KLEIN, Jonathan, L.
IPC分类号： H03H9/24 , H03H3/007 , B81B3/00 , B81C1/00
CPC分类号： B81C1/00142 , B81B2201/0271 , B81C2201/019 , B81C2203/036 , B81C2203/051 , H03H3/0072 , H03H9/2447 , H03H9/462 , Y10T29/49005 , Y10T29/49128 , Y10T29/49155 , Y10T29/49156 , Y10T29/49826 , Y10T29/49861
摘要： A method for fabrication of single crystal silicon micromechanical resonators using a two-wafer process, including either a Silicon-on-insulator (SOI) (104) or insulating base and resonator wafers (108) , wherein resonator anchors (122, 124) , a capacitive air gap (116) , isolation trenches (128, 130) , and alignment marks are micromachined in an active layer (114) of the base wafer; the active layer of the resonator wafer (124) is bonded directly to the active layer of the base wafer; the handle (144) and dielectric layers (140) of the resonator wafer are removed; viewing windows are opened in the active layer of the resonator wafer; masking the single crystal silicon semiconductor material active layer of the resonator wafer with photoresist material; a single crystal silicon resonator is machined in the active layer of the resonator wafer using silicon dry etch micromachining technology; and the photoresist material is subsequently dry stripped.

24. 发明公开

EP1974465A2 A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR 有权
标题翻译： MEMS谐振器，其制造方法以及MEMS振荡器
公开(公告)号：EP1974465A2
公开(公告)日：2008-10-01
申请号：EP06842592.5
申请日：2006-12-18
申请人： NXP B.V.
发明人： VAN BEEK, Jozef, T., M. , LOEBL, Hans-Peter , VANHELMONT, Frederik, W., M.
IPC分类号： H03H9/02 , H03H3/007 , H03H9/24
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element (48) further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element (48).
摘要翻译：本发明涉及包括可移动元件（48）的MEMS谐振器，可移动元件（48）包括具有第一杨氏模量和第一杨氏模量的第一温度系数的第一部分（A），并且可移动元件（48 ）进一步包括具有第二杨氏模量和第二杨氏模量的第二温度系数的第二部分（B），第二温度系数的符号与第一温度系数的符号相反，至少在所述MEMS谐振器以及所述第一部分（A）的横截面积和所述第二部分（B）的横截面积使得所述第一部分（A）的杨氏模量的绝对温度系数乘以第一部分（A）的横截面积与第二部分（B）的杨氏模量的绝对温度系数乘以第二部分（B）的横截面积的偏差不超过20％，所述横截面积局部地且垂直于所述可移动元件（48）进行测量。

25. 发明公开

EP1834400A2 NANOMECHANICAL OSCILLATOR 审中-公开
标题翻译： NANO机械振荡器
公开(公告)号：EP1834400A2
公开(公告)日：2007-09-19
申请号：EP06733632.1
申请日：2006-01-04
申请人： Trustees of Boston University
发明人： MOHANTY, Pritiraj , GAIDARZHY, Alexei , ZOLFAGHARKHANI, Guiti , BADZEY, Robert, I.
IPC分类号： H02N2/00 , G01P15/08 , B32B5/16 , H01L27/10 , H01L41/08
CPC分类号： B81B3/0018 , H03H9/2431 , H03H9/2447 , H03H9/485 , H03H9/505 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A mechanical oscillator (20) has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element (21) is coupled to a minor, sub-micron element (22) to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as oilier excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.

26. 发明公开

EP4454129A1 MEMS RESONATOR 失效
公开(公告)号：EP4454129A1
公开(公告)日：2024-10-30
申请号：EP22830577.7
申请日：2022-12-21
申请人： KYOCERA Technologies Oy
发明人： SAGE, Eric , OJA, Aarne , VESTERINEN, Hannu
IPC分类号： H03H9/02 , H03H9/24 , H03H9/50
CPC分类号： H03H9/02244 , H03H2009/0250320130101 , H03H2009/0232220130101 , H03H9/02338 , H03H2009/0238520130101 , H03H2009/023320130101 , H03H2009/24120130101 , H03H9/2447 , H03H9/2452 , H03H9/505

27. 发明授权

EP2106024B1 Nano résonateur magnétique 有权转让
标题翻译：纳米磁谐振器
公开(公告)号：EP2106024B1
公开(公告)日：2018-02-07
申请号：EP09156165.4
申请日：2009-03-25
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： Duraffourg, Laurent , Andreucci, Philippe , Bilhaut, Lise , Viala, Bernard
IPC分类号： H03H9/24 , H03H9/02 , H03H3/007 , G01R33/028
CPC分类号： H03H9/2457 , G01R33/0286 , H03H3/0073 , H03H9/02259 , H03H9/2447 , H03H9/2463 , H03H2009/02511 , H03H2009/02519

28. 发明公开

EP3201122A1 MICROMACHINED ULTRASONIC TRANSDUCERS WITH A SLOTTED MEMBRANE STRUCTURE 有权转让
标题翻译：带微槽膜结构的微机械超声换能器
公开(公告)号：EP3201122A1
公开(公告)日：2017-08-09
申请号：EP15846584.9
申请日：2015-10-01
申请人： Chirp Microsystems Inc.
发明人： GUEDES, Andre , HORSLEY, David , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
IPC分类号： B81B3/00 , H01L41/04 , H01L41/113 , G01N29/24
CPC分类号： B06B1/0625 , B06B1/0603 , B81B3/00 , G01N29/2437 , G10K9/125 , G10K13/00 , H01L41/33 , H03H9/2447
摘要： A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.
摘要翻译：压电微机械超声换能器（PMUT）装置包括具有穿过其中的开口的衬底以及在开口上方附着到衬底的膜。覆盖开口的膜的一部分被分成多个悬臂，这些悬臂机械耦合，使得悬臂以共同频率谐振。

29. 发明公开

EP2957031A1 STRUCTURE PLANE DE RÉSONATEUR MÉCANIQUE DÉCOUPLÉ PAR DES VIBRATIONS DE FLEXION ET D'EXTENSION-COMPRESSION 有权转让
标题翻译： FLAT结构，通过弯曲和伸缩振动解耦机械谐振器
公开(公告)号：EP2957031A1
公开(公告)日：2015-12-23
申请号：EP14711544.8
申请日：2014-02-13
申请人： Office National d'Etudes et de Recherches Aérospatiales (ONERA)
发明人： LE TRAON, Olivier , JANIAUD, Denis , TAIBI, Rachid , CHARTIER, Claude , GAUDINEAU, Vincent , PERNICE, Marc
IPC分类号： H03H9/02 , H03H9/15
CPC分类号： H03H9/17 , H03H9/02023 , H03H9/02062 , H03H9/02157 , H03H9/02338 , H03H9/205 , H03H9/2447 , H03H2009/02251 , H03H2009/02291 , H03H2009/0244 , H03H2009/02496 , H03H2009/02527 , H03H2009/155
摘要： Mechanical resonators for making timepieces have the drawback of not being simultaneously efficient, compact, and inexpensive. The invention is a planar structure of a mechanical resonator (100) that is suitable for reducing bulkiness and manufacturing cost and comprises a bar (R) vibrating in longitudinal expansion/compression resonance and two beams, (12) each vibrating simultaneously in longitudinal expansion/compression and in bending oscillation in the plane of the structure and connected to the bar by a connection element (11) on the median plane (π) of the bar, thereby enabling the effects of the transverse deformations of the bar, due to the Poisson ratio of the material, to not be transmitted to the attachment pads (PF) of the resonator. Thus, the quality factor of the resonator can be very high.
摘要翻译：用于制造钟表机械谐振器具有不被同时高效，紧凑且廉价的缺点。本发明是一种机械共振器（100）的平面结构所做的是适用于降低蓬松度和制造成本，并且包括杆（R）的纵向扩展/压缩共振和两个光束（12）的振动在各纵向膨胀同时振动/ 压缩，并将其弯曲振荡的结构的平面，并通过在杆的中间平面（π）的连接元件（11）连接到所述杆，从而使杆的横向变形的影响，由于泊松该材料的比例，以不反式mitted到谐振器的附接垫（PF）。因此，谐振器的品质因数可以是非常高的。

30. 发明公开

EP2707953A4 MICROMECHANICAL DEVICE AND METHOD OF DESIGNING THEREOF 有权转让
标题翻译：微机械装置，及其设计方法
公开(公告)号：EP2707953A4
公开(公告)日：2014-12-03
申请号：EP12786090
申请日：2012-05-11
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT
发明人： PRUNNILA MIKA , JAAKKOLA ANTTI , PENSALA TUOMAS
IPC分类号： H03H9/02 , B81B3/00 , H03H9/24
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442

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