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21. 发明公开

EP2617130A1 DISPOSITIF RESONANT, A DETECTION PIEZORESISTIVE ET A RESONATEUR RELIE DE FACON ELASTIQUE AU SUPPORT DU DISPOSITIF, ET PROCEDE DE FABRICATION DE CELUI-CI 有权
标题翻译：与载体的检测器，柔性连谐振器和方法的元共振的压阻探测器用于制造这种探测器
公开(公告)号：EP2617130A1
公开(公告)日：2013-07-24
申请号：EP11754884.2
申请日：2011-09-13
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： HENTZ, Sébastien
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/02259 , G01H17/00 , H03H9/2405 , H03H9/2447 , H03H2009/0244 , H03H2009/02496
摘要： The detector comprises: a supporting member (14); a suspended resonator (16), moving parallel to the plane of the supporting member; means (17) for actuating the resonator; and means (18) for detecting the displacement, comprising at least one piezoresistive gauge (20). According to the invention, the resonator is anchored to the supporting member via at least one elastic bending element (22), in order to push back the threshold at which a non-linear displacement regime appears. The detector can be manufactured by a surface technology and is applicable in particular to resonant mass sensors.

22. 发明授权

EP2302792B1 Resonator 有权
标题翻译：谐振器
公开(公告)号：EP2302792B1
公开(公告)日：2012-11-14
申请号：EP09252251.5
申请日：2009-09-22
申请人： NXP B.V.
发明人： Van Beek, Jozef Thomas Martinus , Avoort, Cas van der , Van Wingerden, Johannes , Bontemps, Joep , Lander, Robert James Pascoe
IPC分类号： H03H3/007 , H03H9/02 , H03H9/24
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2447 , H03H9/2473 , H03H9/2489

23. 发明公开

EP2106024A1 Nano résonateur magnétique 有权转让
标题翻译： Magnetischer纳米谐振器
公开(公告)号：EP2106024A1
公开(公告)日：2009-09-30
申请号：EP09156165.4
申请日：2009-03-25
申请人： Commissariat à l'Energie Atomique
发明人： Duraffourg, Laurent , Andreucci, Philippe , Bilhaut, Lise , Viala, Bernard
IPC分类号： H03H9/24
CPC分类号： H03H9/2457 , G01R33/0286 , H03H3/0073 , H03H9/02259 , H03H9/2447 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： L'invention concerne un dispositif nano-résonateur comportant:
- au moins un élément fixe (2) et au moins un élément mobile (4) par rapport à l'élément fixe,
- des premiers moyens électromagnétiques (40), intégrés ou fixés à l'élément fixe, et des deuxièmes moyens électromagnétiques (16), intégrés ou fixés à l'élément mobile, pour générer un mouvement oscillant de l'élément mobile.
摘要翻译：该装置具有固定基座（2）和可相对于基座移动的移动梁（4）。电磁单元固定或集成到基座。另一个电磁单元固定或集成到光束中，用于产生移动元件的振荡运动。后者的电磁单元与前一个电磁单元相互作用。电磁单元具有平坦形状的磁性单元（40），例如磁体，在其平面中磁化或垂直于其平面。

24. 发明公开

EP1803684A3 Vacuum packaged single crystal silicon resonator 审中-公开
标题翻译： Vakuumverkapselter Einkristallsilikonresonator
公开(公告)号：EP1803684A3
公开(公告)日：2008-08-27
申请号：EP06126812.4
申请日：2006-12-21
申请人： Honeywell International Inc.
发明人： Jafri, Ijaz H. , Magendanz, Galen P.
IPC分类号： B81C1/00
CPC分类号： B81C1/00333 , B81B2201/0271 , B81C1/00142 , B81C2201/019 , B81C2203/036 , B81C2203/051 , H03H3/0072 , H03H9/1057 , H03H9/2405 , H03H9/2447 , H03H9/462 , H03H2009/02511
摘要： A method for forming a vibrating micromechanical structure having a single crystal silicon (SCS) micromechanical resonator formed using a two-wafer process, including either a Silicon-on-insulator (SOI) or insulating base and resonator wafers, wherein resonator anchors, capacitive air gap, isolation trenches, and alignment marks are micromachined in an active layer of the base wafer; the active layer of the resonator wafer is bonded directly to the active layer of the base wafer; the handle and dielectric layers of the resonator wafer are removed; windows are opened in the active layer of the resonator wafer; masking the active layer of the resonator wafer with photoresist; a SCS resonator is machined in the active layer of the resonator wafer using silicon dry etch micromachining technology; and the photoresist is subsequently dry stripped. A patterned SCS cover is bonded to the resonator wafer resulting in hermetically sealed chip scale wafer level vacuum packaged devices.

25. 发明授权

EP2106024B1 Nano résonateur magnétique 有权转让
标题翻译：纳米磁谐振器
公开(公告)号：EP2106024B1
公开(公告)日：2018-02-07
申请号：EP09156165.4
申请日：2009-03-25
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： Duraffourg, Laurent , Andreucci, Philippe , Bilhaut, Lise , Viala, Bernard
IPC分类号： H03H9/24 , H03H9/02 , H03H3/007 , G01R33/028
CPC分类号： H03H9/2457 , G01R33/0286 , H03H3/0073 , H03H9/02259 , H03H9/2447 , H03H9/2463 , H03H2009/02511 , H03H2009/02519

26. 发明公开

EP3201122A1 MICROMACHINED ULTRASONIC TRANSDUCERS WITH A SLOTTED MEMBRANE STRUCTURE 有权转让
标题翻译：带微槽膜结构的微机械超声换能器
公开(公告)号：EP3201122A1
公开(公告)日：2017-08-09
申请号：EP15846584.9
申请日：2015-10-01
申请人： Chirp Microsystems Inc.
发明人： GUEDES, Andre , HORSLEY, David , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
IPC分类号： B81B3/00 , H01L41/04 , H01L41/113 , G01N29/24
CPC分类号： B06B1/0625 , B06B1/0603 , B81B3/00 , G01N29/2437 , G10K9/125 , G10K13/00 , H01L41/33 , H03H9/2447
摘要： A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.
摘要翻译：压电微机械超声换能器（PMUT）装置包括具有穿过其中的开口的衬底以及在开口上方附着到衬底的膜。覆盖开口的膜的一部分被分成多个悬臂，这些悬臂机械耦合，使得悬臂以共同频率谐振。

27. 发明公开

EP2957031A1 STRUCTURE PLANE DE RÉSONATEUR MÉCANIQUE DÉCOUPLÉ PAR DES VIBRATIONS DE FLEXION ET D'EXTENSION-COMPRESSION 有权转让
标题翻译： FLAT结构，通过弯曲和伸缩振动解耦机械谐振器
公开(公告)号：EP2957031A1
公开(公告)日：2015-12-23
申请号：EP14711544.8
申请日：2014-02-13
申请人： Office National d'Etudes et de Recherches Aérospatiales (ONERA)
发明人： LE TRAON, Olivier , JANIAUD, Denis , TAIBI, Rachid , CHARTIER, Claude , GAUDINEAU, Vincent , PERNICE, Marc
IPC分类号： H03H9/02 , H03H9/15
CPC分类号： H03H9/17 , H03H9/02023 , H03H9/02062 , H03H9/02157 , H03H9/02338 , H03H9/205 , H03H9/2447 , H03H2009/02251 , H03H2009/02291 , H03H2009/0244 , H03H2009/02496 , H03H2009/02527 , H03H2009/155
摘要： Mechanical resonators for making timepieces have the drawback of not being simultaneously efficient, compact, and inexpensive. The invention is a planar structure of a mechanical resonator (100) that is suitable for reducing bulkiness and manufacturing cost and comprises a bar (R) vibrating in longitudinal expansion/compression resonance and two beams, (12) each vibrating simultaneously in longitudinal expansion/compression and in bending oscillation in the plane of the structure and connected to the bar by a connection element (11) on the median plane (π) of the bar, thereby enabling the effects of the transverse deformations of the bar, due to the Poisson ratio of the material, to not be transmitted to the attachment pads (PF) of the resonator. Thus, the quality factor of the resonator can be very high.
摘要翻译：用于制造钟表机械谐振器具有不被同时高效，紧凑且廉价的缺点。本发明是一种机械共振器（100）的平面结构所做的是适用于降低蓬松度和制造成本，并且包括杆（R）的纵向扩展/压缩共振和两个光束（12）的振动在各纵向膨胀同时振动/ 压缩，并将其弯曲振荡的结构的平面，并通过在杆的中间平面（π）的连接元件（11）连接到所述杆，从而使杆的横向变形的影响，由于泊松该材料的比例，以不反式mitted到谐振器的附接垫（PF）。因此，谐振器的品质因数可以是非常高的。

28. 发明公开

EP2707953A4 MICROMECHANICAL DEVICE AND METHOD OF DESIGNING THEREOF 有权转让
标题翻译：微机械装置，及其设计方法
公开(公告)号：EP2707953A4
公开(公告)日：2014-12-03
申请号：EP12786090
申请日：2012-05-11
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT
发明人： PRUNNILA MIKA , JAAKKOLA ANTTI , PENSALA TUOMAS
IPC分类号： H03H9/02 , B81B3/00 , H03H9/24
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442

29. 发明公开

EP2676366A4 NOVEL MICROMECHANICAL DEVICES 有权转让
标题翻译：使用密码：VORRICHTUNGEN
公开(公告)号：EP2676366A4
公开(公告)日：2014-08-06
申请号：EP12747759
申请日：2012-02-17
申请人： TEKNOLOGIAN TUTKI MUSKESKUS VTT
发明人： PENSALA TUOMAS , JAAKKOLA ANTTI , GANCHENKOVA MARIA , PRUNNILA MIKA , KIIHAMÄKI JYRKI
IPC分类号： H03H9/02 , B81B3/00 , H03H3/007 , H03H9/24
CPC分类号： H03H9/02448 , B81B3/0078 , B81B2201/0271 , H01L41/18 , H03H3/0072 , H03H3/0076 , H03H9/2405 , H03H9/2447 , H03H2009/02503 , H03H2009/02519 , H03H2009/241 , H03H2009/2442 , Y10T29/42

30. 发明公开

EP2325630A3 All-differential resonant nanosensor apparatus and method 审中-公开
标题翻译：差异分子Nanosensorvorrichtung und Verfahren
公开(公告)号：EP2325630A3
公开(公告)日：2013-02-13
申请号：EP10188633.1
申请日：2010-10-22
申请人： Honeywell International Inc.
发明人： Cobianu, Cornel , Serban, Bogdan
IPC分类号： G01N29/02 , G01N29/30 , G01N29/44 , H03H9/24 , G01N27/00 , G01N29/036
CPC分类号： G01N29/022 , G01N29/036 , G01N29/30 , G01N29/4436 , G01N2291/0256 , G01N2291/0427 , H03H9/2447
摘要： An all-differential resonant nanosensor apparatus for detecting multiple gasses and method of fabricating the same. The nanosensor apparatus generally includes a sensing loop, a reference loop, and a mixer. A sensing self assembled monolayer (SAM) or an ultrathin solid monolayer may be deposited on a sensing resonant beam associated with the sensing loop to detect the presence of the gas. A reference self assembled monolayer or an ultrathin solid film may be deposited on a reference resonant beam that possess similar visco-elastic properties (e.g., temperature, humidity and aging) as the sensing monolayer with no sensing properties. A differential reading electronic circuit may be interconnected with each resonant beam pair for signal processing. A drift-free frequency signal per each gas may be obtained by subtracting the frequency response from the sensing loop and the reference loop.
摘要翻译：用于检测多种气体的全差分谐振纳米传感器装置及其制造方法。纳米传感器装置通常包括感测回路，参考回路和混合器。感测自组装单层（SAM）或超薄固体单层可以沉积在与感测回路相关联的感测谐振光束上，以检测气体的存在。参考自组装单层或超薄固体膜可以沉积在参考谐振光束上，该参考谐振光束具有与感测单层没有感测特性的类似的粘弹性（例如温度，湿度和老化）。差分读取电子电路可以与用于信号处理的每个谐振束对互连。每个气体的无漂移频率信号可以通过从感测回路和参考回路中减去频率响应来获得。

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