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21. 发明授权

EP0886811B1 IMPROVED MONITORING SYSTEM FOR WORKPIECE AND TOOL CARRIAGE MOVEMENT 失效
标题翻译：改进监测系统，用于移动工具和工具CARRIAGE
公开(公告)号：EP0886811B1
公开(公告)日：2002-10-30
申请号：EP97903500.3
申请日：1997-02-18
申请人： Unova U.K. Limited
发明人： PIERSE, Michael, George
IPC分类号： G05B19/401 , G05B19/404
CPC分类号： G05B19/404 , G05B19/401 , G05B2219/34047 , G05B2219/34242 , G05B2219/37098 , G05B2219/37306 , G05B2219/37307 , G05B2219/37576 , G05B2219/37611 , G05B2219/45141 , G05B2219/49193 , G05B2219/49194 , G05B2219/49195 , G05B2219/49219 , G05B2219/50391 , Y10T29/5126 , Y10T82/2506
摘要： A machine tool has a carriage (28), has a workpiece carriage (28) for carrying a workpiece (32) from which material is removed by a tool (54) carried by a tool carriage (48). A two-axis scale (86, 88) is attached to one of the carriages, and cooperates with a reading head (96, 98) attached to the other carriage. The output from the reading head is processed by signalling processing means to provide an indication of the position and/or movement of the carriages relative to each other and for generating positional data about one or both of the carriages to assist in controlling their movement in order to perform a machine operation. By directly measuring the relative positions of the two carriages, problems arising from, for example, distortions of the machine frame on which the carriages are mounted are at least mitigated. A preferred embodiment of the machine incorporates a second reading head attached to one carriage and incorporating the scale on another carriage so that the outputs from the two reading heads can be used to determine whether there has been any relative angular displacement of the paths followed by the carriages. There is also provided a method of determining the linear movement of one of the carriages relative to the other, and the machining process achieved using the machine tool.

22. 发明授权

EP0906174B1 WORKPIECE INSPECTION AND HANDLING 失效
标题翻译： PART检查和处理
公开(公告)号：EP0906174B1
公开(公告)日：2002-08-28
申请号：EP97925193.1
申请日：1997-06-11
申请人： Unova U.K. Limited
发明人： STOCKER, Mark, Andrew , FALKNER, Dermot, Robert , MORANTZ, Paul, Mastin, Howard , PIERSE, Michael, George
IPC分类号： B24B41/00 , B23Q3/18 , B24B9/06 , B24B49/12 , B24B47/22
CPC分类号： B24B53/07 , B23Q3/186 , B23Q17/24 , B24B5/04 , B24B5/06 , B24B5/065 , B24B9/065 , B24B17/04 , B24B17/06 , B24B41/02 , B24B41/04 , B24B49/02 , B24B49/12 , H01L21/02013 , H01L21/02021 , H01L21/67242 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A workpiece alignment and shifting system for moving circular workpieces from a first inspection station to a second machining station, comprises workpiece holding means for attachment to the face of a disc workpiece to move the latter from one position to another. Robotic means controls the position of the workpiece holding means and is adapted to move in at least two orthogonal directions, both of which are parallel to the plane of the disc when it occupies the first station. The disc is rotated in the inspection station and in the machining station and inspection means determines the position of the geometric centre of the disc as it is rotated. Computing means calculates from data delivered by the inspection means the two shifts required along the orthogonal directions of movement of the robotic means, to move the geometric centre of the disc to a second desired position whose coordinates are known. The computing means includes memory means for storing the said coordinates. The coordinates are those of the centre of rotation of the workpiece holder or chuck in the said second station. The workpiece holding means is vacuum operated. A three axis robot is employed to pick and place disc-like wafers of semi-conductor material for edge grinding, and movement along two of the robot axes, X and Z, is used to control the centering of the wafer on a vacuum chuck in the second grinding station.

23. 发明公开

EP1224057A1 CRANKPIN GRINDING METHOD 有权
标题翻译：方法磨削曲轴螺柱
公开(公告)号：EP1224057A1
公开(公告)日：2002-07-24
申请号：EP00971591.3
申请日：2000-10-26
申请人： Unova U.K. Limited
发明人： COVERDALE, Stephen, Roger , PROCTOR, David ThomasCoach House , THORPE, Christopher, Shaun
IPC分类号： B24B1/00 , B24B5/42 , B24B51/00
CPC分类号： B24B49/00 , B24B1/00 , B24B5/42 , B24B19/125 , B24B27/0076 , B24B49/16
摘要： A method is described for grinding a crankpin of a crankshaft using computer controlled wheelfeed and headstock drives (44,30,24). During a final grinding step leading to finish size the cutting force is maintained on the wheelhead (38) to keep the wheel (34) and pin under a moderate constant load and the rotational speed of the headstock drive (24) is reduced. This serves to prevent bounce and chatter marks appearing in the surface of the pin. The rotational speed is typically in the range of 1 to 5 rpm. During the final step of grinding each pin, the wheelfeed is adjusted so as to remove a sufficient depth of material during a single rotation of the crankshaft, to bring the crankpin to finish size. In order to determine the depth of cut required, each pin is gauged before the final grinding step is performed, to determine the depth of cut necessary to achieve finish size.

24. 发明公开

EP0945216A3 Notch grinding tool 审中-公开
标题翻译： Kerben-Schleifwerkzeug
公开(公告)号：EP0945216A3
公开(公告)日：2002-07-17
申请号：EP99302145.0
申请日：1999-03-19
申请人： Unova U.K. Limited
发明人： Stocker, Mark Andrew , Ball, Matthew James , Falkner, Dermot Robert , Mawer, Peter Vaughan , Morantz, Paul Martin Howard
IPC分类号： B24B9/06 , B24D5/02
CPC分类号： B24B9/065 , B24D5/02 , B24D5/066
摘要： A grinding pin (53) for notch grinding is provided. The grinding pin comprises a cylindrical region of formable grinding material and in which is formed a groove (18) for forming a notch. The length of the cylindrical region is such that further grooves (20) can be formed therein as each groove becomes too worn to form a notch.
摘要翻译：提供了一种用于切口研磨的研磨销（53）。研磨销包括可成形研磨材料的圆柱形区域，其中形成有用于形成切口的凹槽（18）。圆柱形区域的长度使得当每个凹槽变得太磨损以形成凹口时，可以在其中形成另外的凹槽（20）。

25. 发明公开

EP1183122A1 HARD TURNING 有权
标题翻译：硬车削
公开(公告)号：EP1183122A1
公开(公告)日：2002-03-06
申请号：EP00929703.7
申请日：2000-05-12
申请人： Unova U.K. Limited
发明人： Manley, Stephen Robert , Riley, Martin John
IPC分类号： B23B1/00
CPC分类号： B23B1/00 , G05B19/186 , G05B19/4166 , G05B2219/45136 , G05B2219/45214 , G05B2219/45248 , G05B2219/49075 , G05B2219/49093
摘要： A metal machining process, in particular hard turning using a computer controlled precision lathe, comprises the step of controlling the tool to increase the depth of cut at intervals during machining, so as to create a plurality of depressions (12 to 16). As applied to a synchromesh cone (10), for example, the depressions may typically be annular and 1 micron in depth, with a base width of 0.16 mm and spaced at 1.0 mm along the taper. The process enables components to be produced whose surface is similar to that of ground components.

26. 发明授权

EP0907461B1 GRINDING MACHINE SPINDLE FLEXIBLY ATTACHED TO PLATFORM 失效
标题翻译：一个平台的磨削主轴柔性连接
公开(公告)号：EP0907461B1
公开(公告)日：2002-01-09
申请号：EP97925192.3
申请日：1997-06-11
申请人： Unova U.K. Limited
发明人： STOCKER, Mark, Andrew , FALKNER, Dermot, Robert , MORANTZ, Paul, Martin, Howard , PIERSE, Michael, George
IPC分类号： B24B41/04 , B23Q1/36 , B24B9/06 , B24B53/07
CPC分类号： B24B53/07 , B23Q3/186 , B23Q17/24 , B24B5/04 , B24B5/06 , B24B5/065 , B24B9/065 , B24B17/04 , B24B17/06 , B24B41/02 , B24B41/04 , B24B49/02 , B24B49/12 , H01L21/02013 , H01L21/02021 , H01L21/67242 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A grinding or polishing machine comprises a rigid platform on which a workhead spindle and a grinding wheel spindle are located. The grinding wheel spindle is mounted on a sub-assembly which is attached to the platform by means of flexures which permit limited movement of the sub-assembly in a direction generally parallel to the direction in which the wheel has to advance to achieve grinding or polishing of a workpiece mounted on the workhead spindle. The flexures generally inhibit movement of the sub-assembly in all other directions. Two grinding wheels are mounted on the platform, one on each of two sub-assemblies, and each sub-assembly is attached to the platform by flexures as aforesaid. The flexure mounting points are located generally centrally of the machine and are located on either side of and close to the machine centre line. In a grinding or polishing machine having workpiece spindle means, tool spindle means mounted on sub-assemblies which permit limited relative movement in one direction to effect tool and workpiece engagement cam drive means is provided whereby each sub-assembly is movable to advance or retract each tool spindle towards and away from the workhead spindle.

27. 发明公开

EP1050370A3 Grinding machine with a short stiffness loop between tool and workpiece 失效
标题翻译： Schleifmaschine mit kurzem versteifenden Verbindungsaufbau
公开(公告)号：EP1050370A3
公开(公告)日：2001-12-12
申请号：EP00114717.2
申请日：1997-06-11
申请人： Unova U.K. Limited
发明人： Stocker, Mark Andrew , Falkner, Dermot Robert , Morantz, Paul Martin Howard , Pierse, Michael George
IPC分类号： B24B9/06 , B24B53/07 , B24B41/02
CPC分类号： B24B53/07 , B23Q3/186 , B23Q17/24 , B24B5/04 , B24B5/06 , B24B5/065 , B24B9/065 , B24B17/04 , B24B17/06 , B24B41/02 , B24B41/04 , B24B49/02 , B24B49/12 , H01L21/02013 , H01L21/02021 , H01L21/67242 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method of grinding the edge of a disc (36) uses a grinding machine having mounted thereon a grooved grinding wheel (32), in which the groove is formed in situ using a forming wheel (56,58) also mounted on the grinding machine. After a workpiece (36) has been ground or after a succession of workpieces (36) have been ground, re-engaging the grinding wheel (32) and the forming wheel (56,58) with the grinding wheel (32) remaining in situ, to re-form the groove (34) in the grinding wheel (32) to correct for wear. A grinding machine comprises a grinding wheel (32), drive means therefor, a workhead and workpiece spindle and drive means (38,40) therefor, a forming wheel (56,58) and drive means (28) therefor, means for moving the grinding wheel (32) so as to plunge grind the edge of the grinding wheel (32) to form a groove (34) therein of precise cross-section and means for effecting relative movement between the grinding wheel (32) and the forming wheel (56,58) to enable the grinding wheel (32) to engage with the edge of a circular workpiece (36) component mounted on the workpiece spindle (28,30) to edge grind the component and wherein the forming wheel (56,58) is also mounted on the workpiece spindle (28,30) for rotation therewith, and the grinding wheel (32) is a resin bonded wheel.
摘要翻译：一种研磨圆盘边缘的方法是使用已经安装有凹槽的研磨轮的研磨机，其中使用也安装在研磨机上的成型轮就地形成凹槽。在工件被研磨或在一连串的工件已被磨削之后，再次磨削砂轮和成型轮，磨轮保留在原位，以重新形成砂轮中的凹槽以校正磨损。研磨机包括砂轮，其驱动装置，工作头和工件主轴及其驱动装置，成形轮及其驱动装置，用于移动砂轮的装置，以便磨削研磨轮的边缘以形成在其中具有精确横截面的凹槽和用于实现砂轮和成型轮之间的相对运动的装置，以使得砂轮能够与安装在工件主轴上的圆形工件部件的边缘接合，从而边缘研磨部件，其中成形轮也安装在工件主轴上以与其一起旋转，砂轮是树脂粘合轮。

28. 发明公开

EP1005955A3 Grinding machine spindle flexibly attached to platform 失效
标题翻译：灵活的Verbindung einer Schleifmaschinenspindel zu einer Plattform
公开(公告)号：EP1005955A3
公开(公告)日：2001-12-12
申请号：EP00102819.0
申请日：1997-06-11
申请人： Unova U.K. Limited
发明人： Stocker, Mark Andrew , Falkner, Dermot Robert , Morantz, Paul Martin Howard , Pierse, Michael George
IPC分类号： B24B41/04 , B23Q1/36 , B24B9/06 , B24B53/07
CPC分类号： B24B53/07 , B23Q3/186 , B23Q17/24 , B24B5/04 , B24B5/06 , B24B5/065 , B24B9/065 , B24B17/04 , B24B17/06 , B24B41/02 , B24B41/04 , B24B49/02 , B24B49/12 , H01L21/02013 , H01L21/02021 , H01L21/67242 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A grinding or polishing machine comprises a rigid platform on which a workhead spindle and a grinding wheel spindle are located. The grinding wheel spindle is mounted on a sub-assembly which is attached to the platform by means of flexures which permit limited movement of the sub-assembly in a direction generally parallel to the direction in which the wheel has to advance to achieve grinding or polishing of a workpiece mounted on the workhead spindle. The flexures generally inhibit movement of the sub-assembly in all other directions. Two grinding wheels are mounted on the platform, one on each of two sub-assemblies, and each sub-assembly is attached to the platform by flexures as aforesaid. The flexure mounting points are located generally centrally of the machine and are located on either side of and close to the machine centre line. In a grinding or polishing machine having workpiece spindle means, tool spindle means mounted on sub-assemblies which permit limited relative movement in one direction to effect tool and workpiece engagement cam drive means is provided whereby each sub-assembly is movable to advance or retract each tool spindle towards and away from the workhead spindle.
摘要翻译：一种研磨圆盘边缘的方法是使用已经安装有凹槽的研磨轮的研磨机，其中使用也安装在研磨机上的成型轮就地形成凹槽。在工件被研磨或在一连串的工件已被磨削之后，再次磨削砂轮和成型轮，磨轮保留在原位，以重新形成砂轮中的凹槽以校正磨损。研磨机包括砂轮，其驱动装置，工作头和工件主轴及其驱动装置，成形轮及其驱动装置，用于移动砂轮的装置，以便磨削研磨轮的边缘以形成在其中具有精确横截面的凹槽和用于实现砂轮和成型轮之间的相对运动的装置，以使得砂轮能够与安装在工件主轴上的圆形工件部件的边缘接合，从而边缘研磨部件，其中成形轮也安装在工件主轴上以与其一起旋转，砂轮是树脂粘合轮。

29. 发明授权

EP0895615B1 METHODS AND APPARATUS FOR GRINDING CONCENTRIC CYLINDRICAL WORKPIECE REGIONS 失效
标题翻译：方法和设备用于磨削工件的同心圆柱状区
公开(公告)号：EP0895615B1
公开(公告)日：2001-10-17
申请号：EP97919519.5
申请日：1997-04-22
申请人： Unova U.K. Limited
发明人： CLEWES, Stuart , PICKLES, John, David
IPC分类号： G05B19/416
CPC分类号： G05B19/4166 , G05B2219/33078 , G05B2219/37308 , G05B2219/37339 , G05B2219/37576 , G05B2219/41427 , G05B2219/49184 , G05B2219/50059
摘要： A method is described for setting up a computer controlled grinding machine for cylindrically grinding concentric workpiece regions, in which a programme containing data about the workpiece and a programme containing wheelfeed instructions are loaded and the wheelfeed instructions programme is run so as to grind at least one such workpiece regions to final form. The region is gauged and the magnitude and angular position of any unwanted eccentricity introduced by the grinding process, is noted, and the whellfeed programme isntructions or control derived therefrom signals are adjusted so that during subsequent grinding of the said region (or a similar region of a similar workpiece), the wheelfeed is controlled so as to compensate for said measured unwanted eccentricity. The workpiece region is stress relieved before the gauging. After setting up, the grinding machine will eccentrically grind a workpiece region which is to have a cylindrical surface concentric relative to the workpiece primary axis, rather than concentrically grinding the said region, the degree of eccentricity being such that when the cylindrically ground workpiece is stress relieved after grinding, the region will be concentric relative to the workpiece axis. A computer controlled grinding machine is described as are programmes for setting up and grinding.

30. 发明公开

EP1089851A1 WAFER EDGE POLISHING METHOD AND APPARATUS 有权
标题翻译：方法和设备分阶段半导体DISCS
公开(公告)号：EP1089851A1
公开(公告)日：2001-04-11
申请号：EP99926637.2
申请日：1999-06-17
申请人： Unova U.K. Limited
发明人： STOCKER, Mark, Andrew
IPC分类号： B24B9/06 , B24B7/22 , B24B37/04 , B24B49/16 , B24B51/00 , B24B53/00 , B24B55/04
CPC分类号： B24B53/017 , B24B9/065 , B24B37/02 , B24B49/16 , B24B51/00 , B24B55/04
摘要： A semi-conductor wafer (12) has its inclined edge flanks polished by a grooved wheel (16) of synthetic plastics material, while a jet (20) of polishing slurry, which may comprise colloidal silica, is fed downwards into the zone of contact between the wheel and the wafer. The wheel (16) is preferably rocked or oscillated laterally such that a constant polishing force is alternatively applied to each flank of the wafer (12). The wheel may be mounted in a buffer store to which the wafers are transported from a grinding station which grinds the edge flanks.

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