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    • 15. 发明公开
    • SRAM using vertical transistors with a diffusion layer for reducing leakage currents
    • 移动电话传输系统扩散系统Verminderung vonLeckströmen
    • EP2254149A2
    • 2010-11-24
    • EP10005356.0
    • 2010-05-21
    • Unisantis Electronics (Japan) Ltd.
    • Masuoka, FujioArai, Shintaro
    • H01L21/8244H01L27/11H01L21/336H01L29/10H01L29/423H01L29/78
    • H01L29/1083H01L27/0886H01L27/11H01L27/1104H01L29/66666H01L29/7827
    • In a static memory cell comprising six MOS transistors, the MOS transistors have a structure in which the drain (4a), gate (18) and source (16) formed on the substrate are arranged in the vertical direction and the gate surrounds the columnar semiconductor layer (23a), the substrate comprises a first active region having a first conductive type and a second active region having a second conductive type, and diffusion layers constructing the active regions are mutually connected via a silicide layer (13a) formed on the substrate surface, thereby realizing an SRAM cell with small surface area. In addition, drain diffusion layers having the same conductive type as a first well (1a) positioned on the substrate are surrounded by a first anti-leak diffusion layer (1b) and a second anti-leak diffusion layer (1c) having a conductive type different from the first well and being shallower than the first well, and thereby controlling leakage to the substrate.
    • 在包括六个MOS晶体管的静态存储单元中,MOS晶体管具有其中形成在衬底上的漏极(4a),栅极(18)和源极(16)在垂直方向上排列并且栅极围绕柱状半导体 层(23a),衬底包括具有第一导电类型的第一有源区和具有第二导电类型的第二有源区,并且构成有源区的扩散层通过形成在衬底表面上的硅化物层(13a)相互连接 从而实现具有小表面积的SRAM单元。 此外,具有与位于基板上的第一阱(1a)相同的导电类型的漏扩散层由具有导电类型的第一防漏扩散层(1b)和第二防漏扩散层(1c)包围 与第一阱不同,并且比第一阱浅,从而控制对基板的泄漏。