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    • 16. 发明公开
    • Crystal diameter measuring device
    • 晶体直径测量装置
    • EP0472907A2
    • 1992-03-04
    • EP91112379.2
    • 1991-07-24
    • SHIN-ETSU HANDOTAI COMPANY LIMITED
    • Baba, MasahikoIbe, Hiroyuki
    • G01B11/10C30B15/26
    • G01B11/10
    • A device for measuring the diameter of the growing portions of the single crystals grown by the Czochalski technique is provided. This device is capable of measuring the crystal diameter with a high degree of accuracy over a wide range from the small-diameter portion thereof to the large diameter portion. A one-dimensional camera 28 and a two-dimensional camera 48 are fixed to a shoulder chamber 34 in such a manner that the optical axes thereof are parallel to each other. An optical path switch-over device, consisting of a cylinder 56, a movable plane mirror 52 mounted on a cylinder rod, and a fixed plane mirror 54, is provided. When the diameter of a neck portion of the single crystal 20 having a diameter of 10 mm or less is measured, the light reflected by the plane mirrors 52 and 54 is made incident on the two-dimensional camera 48, and the diameter of a bright ring 27 is measured on the basis of the image obtained by the two-dimensional camera. To measure the diameter of the conical and cylindrical portions 24 and 26 having a diameter of 10 mm or more, an image of a line lying across the bright ring 27 is obtained by the one-dimensional camera 28 by retracting the plane mirror 52, and the diameter of the bright ring 27 is measured on the basis of the position where this line crosses the bright ring. When the two-dimensional camera 48 is switched over to the one-dimensional camera 28, the diameter measured using the one-dimensional camera 28 is corrected such that it coincides with the diameter measured using the two-dimensional camera 48.
    • 提供了一种用于测量由Czochalski技术生长的单晶的生长部分的直径的装置。 该装置能够在从其小直径部分到大直径部分的宽范围内以高精度测量晶体直径。 一维照相机28和二维照相机48以其光轴彼此平行的方式固定到肩部室34。 提供了一个光路切换装置,它由一个圆柱体56,一个安装在一个活塞杆上的活动平面镜52和一个固定平面镜54组成。 当测量具有10mm或更小直径的单晶20的颈部的直径时,由平面镜52和54反射的光入射到二维照相机48上,并且明亮的直径 根据由二维照相机获得的图像测量环27。 为了测量直径为10mm或更大的圆锥形和圆柱形部分24和26的直径,通过缩回平面镜52,通过一维照相机28获得横跨亮环27的线的图像,并且 基于该线与亮环交叉的位置来测量亮环27的直径。 当二维照相机48切换到一维照相机28时,使用一维照相机28测量的直径被校正为使得它与使用二维照相机48测量的直径一致。
    • 17. 发明公开
    • Optical measuring apparatus
    • Optischer Messapparat。
    • EP0094463A2
    • 1983-11-23
    • EP82305152.9
    • 1982-09-29
    • Beta Instrument Company Limited
    • Kyriakis, John
    • G01B11/10G01B11/00
    • G01B11/00G01B11/10
    • An optical measuring device comprising a gauging head (1) provided with a measuring gate (2) forming a guideway (G) for an article (3) whose dimensional properties are to be measured.
      A parallel beam of light (P) is established between the opposing walls of guide members (M) of the measuring gate (2), which are provided with slits (S) for emission and reception of the parallel beam.
      To remove or prevent the collection of particulate contaminant on the optical components (4, 5, 6, 7) within the gauging head (1) the guide members (M) have internal ducts (D) so that air may be directed to the ducts (D) and passed through each opposing slit (S) to set up a curtain of air across the measuring gate (2) thus repelling particulate contaminant floating in the guideway which would otherwise enter the slits (S).
    • 一种光学测量装置,包括设置有测量门(2)的测量头(1),所述测量门形成用于待测量其尺寸特性的制品(3)的导轨(G)。 在测量门(2)的引导构件(M)的相对壁之间建立平行光束(P),其设置有用于发射和接收平行光束的狭缝(S)。 为了去除或防止在测量头(1)内的光学部件(4,5,6,7)上收集颗粒污染物,引导构件(M)具有内部管道(D),使得空气可以被引导到管道 (D)并通过每个相对的狭缝(S),以跨过测量门(2)设置空气幕,从而排斥漂浮在导轨中的颗粒污染物,否则其将进入狭缝(S)。