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    • 20. 发明公开
    • METHOD OF CONTROL OF MOVING ELEMENT OF MAGNETIC LEVITATION CARRIER APPARATUS
    • REGELUNGSVERFAHREN EINES BEWEGLICHEN ELEMENTESFÜREINMAGNETSCHWEBETRÄGERGERÄT。
    • EP0445294A1
    • 1991-09-11
    • EP90912472.9
    • 1990-08-23
    • KABUSHIKI KAISHA YASKAWA DENKI SEISAKUSHO
    • OGURO, Ryuichi K.K. Yaskawa Denki Seisakusho
    • B61B13/08B60L13/08
    • B61B13/08B60L13/08
    • A magnetic levitation carrier apparatus of the type wherein a plate-like moving element (SFT) is moved by a linear motor disposed inside a fixing element (STT), wherein when the moving element is supported in a vertical direction by first to fourth electromagnet devices (MGV₁₀ ∿ MGV₄₁) and force is allowed to act on the moving element in a horizontal direction perpendicular to the moving direction by fifth and sixth electromagnet devices (MGH₁₀ ∿ MGH₂₁), the gap between the moving element and each electromagnet device is detected by a gap sensor so as to output gap data. As to the vertical direction, for example, an attraction command (fv₁ ∿ fv₂) is obtained from the output value of a feedback quantity calculation circuit (10) to which the gap data (Xv₁ ∿ Xv₄) are inputted and the output value of a variable gain gv (1) generation circuit (60) to which the position (1) of the centroid of the moving element is inputted and is linearized by a linearilization circuit (71 ∿ 74) and then outputted to each electromagnet. In this manner, the variable gain can be accomplished easily by an analog circuit and the control gain in each control direction can be given independently.
    • 板状移动元件(SFT)通过设置在固定元件(STT)内部的线性电动机移动,其中当通过第一至第四电磁体装置(MGV10-MGV41)沿垂直方向支撑移动元件时,力是 允许通过第五和第六电磁体装置(MGH10-MGH21)在垂直于移动方向的水平方向上对移动元件起作用,检测移动元件与每个电磁体装置之间的间隙。 关于垂直方向,例如,从输入间隙数据(Xv1-Xv4)的反馈量计算电路(10)的输出值得到吸引指令(fv1-fv2),输出值 可变增益gv(1)生成电路(60),其中输入移动元件的质心的位置(I)并被线性化(71-74),然后输出到每个电磁体。 以这种方式,可以通过模拟电路容易地实现可变增益,并且可以独立地给出每个控制方向上的控制增益。 @(29pp Dwg.No.6 / 7)@。