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    • 14. 发明公开
    • MECHANOCHEMICAL TYPE SENSOR
    • 机械式传感器
    • EP1650564A1
    • 2006-04-26
    • EP04747970.4
    • 2004-07-27
    • RIKENFuence Co. Ltd.
    • YAMAGATA, YutakaINOUE, Kozo, c/o FUENCE CO. LTD.OHMORI, HitoshiKIM, Joon-wan
    • G01N33/53G01L1/00
    • C12Q1/6825G01N5/02
    • There is provided a mechanochemical sensor including a minute mechanical structure body having the functional membrane formed at least on one part of its surface, a supporting part for supporting the minute mechanical structure body; and a detection part for detecting the change of a mechanical property of the minute mechanical structure body. According to the invention, it is possible to provide improved adhesion between the functional membrane and the minute mechanical structure body since the functional membrane is integrally formed in advance on the minute mechanical structure body, which will contribute to the increase of detection signal, and improvement of measurement precision and sensitivity.
    • 提供了一种机械化学传感器,其包括具有形成在其表面的至少一部分上的功能膜的微小机械结构体,用于支撑微小机械结构体的支撑部; 以及用于检测微小机械结构体的机械特性变化的检测部。 根据本发明,由于功能膜在微小的机械结构体上预先整体形成,因此能够提供功能膜与微小的机械结构体之间的改善的粘附性,这将有助于检测信号的增加和改善 的测量精度和灵敏度。