会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 14. 发明公开
    • CONFOCAL IMAGING APPARATUS WITH CURVED FOCAL SURFACE OR TARGET REFERENCE ELEMENT AND FIELD COMPENSATOR
    • 具有曲面焦平面或目标参考元件和场补偿器的共焦成像设备
    • EP3180584A2
    • 2017-06-21
    • EP15766584.5
    • 2015-08-17
    • Align Technology, Inc.
    • VERKER, TalLEVIN, AdiSAPHIER, OferMOSHE, Maayan
    • G01B11/24G02B21/00
    • A confocal imaging apparatus includes an illumination module to generate an array of light beams. Focusing optics perform confocal focusing of an array of light beams onto a non-flat focal surface and direct the array of light beams toward a three dimensional object to be imaged. A translation mechanism adjusts a location of at least one lens to displace the non-flat focal surface along an imaging axis. A detector measures intensities of an array of returning light beams that are reflected off of the three dimensional object and directed back through the focusing optics. Intensities of the array of returning light beams are measured for locations of the at least one lens for determination of positions on the imaging axis of points of the three dimensional object. Detected positions of one or more points are adjusted to compensate for the non-flat focal surface.
    • 共焦成像设备包括用于生成光束阵列的照明模块。 聚焦光学器件将光束阵列的共焦聚焦执行到非平坦焦点表面上,并将光束阵列引导到要成像的三维物体。 平移机构调整至少一个透镜的位置以沿着成像轴移动非平坦焦点表面。 检测器测量从三维物体反射回来并通过聚焦光学器件返回的一系列返回光束的强度。 对于至少一个透镜的位置测量返回光束阵列的强度,以确定三维物体的点的成像轴上的位置。 检测一个或多个点的位置被调整以补偿非平坦的焦面。