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101. 发明公开

EP1636546A1 APPARATUS FOR AND METHOD OF INDUCING TIME-VARYING THERMAL GRADIENTS BY HEATING ELEMENTS OR INDUCING ELECTROSTATIC FORCES BY ELECTROSTATIC ELEMENTS IN ONE OR MORE ELONGATED BEAMS TO CAUSE ONE OR MORE ELONGATED BEAM OSCILLATIONS 审中-公开
标题翻译：设备和方法诱导时间变量热梯度被加热器或引起静电力BY静态元素在一个或多个细长的梁为一个或更多的刺激梁VIBRATIONS
公开(公告)号：EP1636546A1
公开(公告)日：2006-03-22
申请号：EP04755362.3
申请日：2004-06-17
申请人： NORTHROP GRUMMAN CORPORATION
发明人： STEWART, Robert, E. , HEEG, Suzanne, J. Northrop Grumman Corporation
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： An apparatus comprising one or more heating elements or one ore more electrostatic elements and one or more elongated beams. The heating element or the electrostatic element is coupled with the elongated beam and induces a time-varying thermal gradient in or a time-varying voltage that creates an electrostatic force on the elongated beam to cause one or more oscillations of one or more of the one or more elongated beams.

102. 发明公开

EP1605258A2 Device and method for sonic inspection of micro structures 审中-公开
标题翻译： Vorrichtung undGerätzur Schallinspektion von MIkrostrukturen
公开(公告)号：EP1605258A2
公开(公告)日：2005-12-14
申请号：EP05012547.5
申请日：2005-06-10
申请人： OCTEC INC. , TOKYO ELECTRON LIMITED
发明人： Okumura, Katsuya c/oOctec Inc. , Matusmoto, Toshiyuki Tokyo Electron Ltd. , Ikeuchi, Naoki Tokyo Electron Ltd. , Yakabe, Masami Tokyo Electron Ltd.
IPC分类号： G01N29/12
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker (2). A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker (2), that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via probe needles (4). A control part (20) determines the property of the three-axis acceleration sensor on the basis of the measured data.
摘要翻译：测试声波从扬声器（2）输出。作为待测试芯片TP的微结构的三轴加速度传感器的可移动部分由于从扬声器（2）输出的压缩波的到达即移动，即到期空气振动。基于通过探针（4）提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件（20）根据测量数据确定三轴加速度传感器的特性。

103. 发明公开

EP1568968A2 Nonresonant micromachined gyroscopes with structural mode-decoupling 审中-公开
标题翻译： Nicht-resonancee，mikrohergestellte Kreisel mit struktureller Moden-Entkopplung
公开(公告)号：EP1568968A2
公开(公告)日：2005-08-31
申请号：EP05004022.9
申请日：2005-02-24
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Shkel,Andrei M. , Acar,Cenk
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope utilizes a dynamical amplification both in the 2-DOF drive-direction oscillator and the 2-DOF sense-direction oscillator, which are structurally decoupled, to achieve large oscillation amplitudes without resonance. The overall 4-DOF dynamical system is comprised of three proof masses. The second and third masses form the 2-DOF sense-direction oscillator. The first mass and the combination of the second and third masses form the 2-DOF drive-direction oscillator. The frequency responses of the drive and sense-mode oscillators have two resonant peaks and a flat region between the peaks. The device is nominally operated in the flat regions of the response curves belonging to the drive and sense-mode oscillators, where the gain is less sensitive to frequency fluctuations. This is achieved by designing the drive and sense anti-resonance frequencies to match.
摘要翻译：四自由度（DOF）非共振微机械陀螺仪利用在结构上解耦的2自由度驱动方向振荡器和2自由度感应方向振荡器中的动态放大，以实现无谐振的大振荡幅度。整体4自由度动力系统由三个质量体系组成。第二和第三质量形成2自由度感知方向振荡器。第一质量和第二和第三质量的组合形成2自由度驱动方向振荡器。驱动和感测模式振荡器的频率响应具有两个谐振峰值和峰值之间的平坦区域。该器件名义上在属于驱动和感测模式振荡器的响应曲线的平坦区域中运行，其中增益对频率波动较不敏感。这是通过设计驱动和检测反谐振频率来匹配来实现的。

104. 发明公开

EP1499853A1 QUADRATURE COMPENSATION TECHNIQUE FOR VIBRATING GYROSCOPES 审中-公开
标题翻译：平方补偿振动陀螺仪
公开(公告)号：EP1499853A1
公开(公告)日：2005-01-26
申请号：EP03719626.8
申请日：2003-04-07
申请人： Northrop Grumman Corporation
发明人： WYSE, Stanley, F.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , G01C19/56
摘要： Quadrature error occurs in vibrating gyroscopes because of manufacturing flaws that permit the sensing element (proof mass) to oscillate about an axis that is not orthogonal to the output axis. This creates an oscillation about the output axis that has a component of the sensing element's vibration accelertion. This output axis ocillation, which is in phase with the driven acceleration of the sensing element, is called quadrature torque since it is ninety degrees out of phase with the angular rate induced acceleration. In order to eliminate this output axis oscillation, the present invention generates sinusoidal forces on the dither mass by applying dc voltages on the dither mass pickoff electrodes. These forces create a counter dither motion about the output axis that canels the output axis oscillation generated by the non-orthogonal dither axis.

105. 发明授权

EP0902875B1 SILICON MACROMACHINED SYMMETRIC VIBRATORY GYROSCOPE SENSOR 失效
标题翻译：用硅微技术取得平衡振动陀螺仪传感器
公开(公告)号：EP0902875B1
公开(公告)日：2004-11-24
申请号：EP97928679.6
申请日：1997-05-30
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人： TANG, Tony, K. , KAISER, William, J. , BARTMAN, Randall, K. , WILCOX, Jaroslava, Z. , GUTIERREZ, Roman, C. , CALVET, Robert, J.
IPC分类号： G01C19/00 , G01C19/56
CPC分类号： G01C19/5719 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/084 , G01P2015/0842
摘要： A microgyroscope (10) comprising a silicon, four-leaf clover structure (12) which is suspended by four silicon cantilevers or springs (14) extending between clover (12) and rim (16). The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the clover leaf structure. In a preferred embodiment, a post (18) is attached through a center (20) of the clover structure (12) in a direction symmetrically perpendicular to both sides of a plane formed by the clover leaves (22a-b). In the case where the post is not symmetric with the plane of the clover structure, the device is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of the clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena.

106. 发明公开

EP1396470A3 Fabrication of microstructures with vacuum-sealed cavity 有权
标题翻译：产生具有真空密封的空腔的微结构
公开(公告)号：EP1396470A3
公开(公告)日：2004-11-17
申请号：EP03101402.0
申请日：2003-05-19
申请人： Dalsa Semiconductor Inc.
发明人： Ouellet, Luc , Antaki, Robert , Tremblay, Yves
IPC分类号： B81B7/00 , B81B3/00
CPC分类号： B81C1/00325 , B22F1/0051 , B81C2201/0167 , C23C14/0021 , C23C14/0641 , C23C14/228 , C23C14/325 , G01C19/5719 , G01P15/0802
摘要： A cavity forming formed in an encapsulation structure under a vacuum in a vacuum chamber is sealed with a capping layer. A stiff protective layer under tensile stress is deposited on the capping layer prior to venting the vacuum chamber to atmospheric pressure. The capping layer is preferably aluminum or an aluminum alloy, and the protective layer is preferably δ-TiN having a suitable high Young's modulus.

107. 发明公开

EP1417455A2 MICROGYROSCOPE WITH ELECTRONIC ALIGNMENT AND TUNING 有权
标题翻译：随着电子对准和表决MICRO GYRO
公开(公告)号：EP1417455A2
公开(公告)日：2004-05-12
申请号：EP02789145.6
申请日：2002-07-01
申请人： THE BOEING COMPANY
发明人： CHALLONER, A., Dorian , GUTIERREZ, Roman, C.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A micro-gyroscope having electronic alignment by performing an electronic coordinate transformation on control voltaged (VTx, VTy) through an attenuator network thereby canceling first and second harmonic signals from the output (Vthx, Vthy). The micro-gyroscope is tuned by automatic electronic compensation based on quadrature error that is applied to correct for variations in the gyroscope.

108. 发明公开

EP1415127A1 ISOLATED RESONATOR GYROSCOPE 有权
标题翻译：隔离振动陀螺仪
公开(公告)号：EP1415127A1
公开(公告)日：2004-05-06
申请号：EP02746804.0
申请日：2002-07-01
申请人： THE BOEING COMPANY
发明人： CHALLONER, Dorian, A.
IPC分类号： G01C19/56 , G01P3/14 , G01P15/14
CPC分类号： G01C19/5719 , G01P2015/084 , Y10T29/49007 , Y10T74/12
摘要： The present invention discloses a resonator gyroscope comprising a resonator including two bodies (102, 104), each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements (108) and wherein the bodies together forming two differential rocking modes of vibration transverse to the axis with substantially equal frequencies and wherein the two bodies transfer substantially no net momentum to the baseplate (106) when the resonator is excited. The gyroscope further includes a baseplate (106) affixed to the resonator by the one or more elastic elements (108) and sense and drive elements each affixed to the resonator and baseplate.

109. 发明公开

EP1407279A1 A METHOD OF DESIGNING A FLEXURE SYSTEM FOR TUNING THE MODAL RESPONSE OF A DECOUPLED MICROMACHINED GYROSCOPE AND A GYROSCOPE DISIGNED ACCORDING TO THE METHOD 审中-公开
标题翻译：在尾柔性系统方法的微DECOUPLED EDITED陀螺摩德纳说行为进行表决，并设计KREISEL的程序下
公开(公告)号：EP1407279A1
公开(公告)日：2004-04-14
申请号：EP02746710.9
申请日：2002-06-26
申请人： Microsensors Inc.
发明人： TRACY, Michael, J.
IPC分类号： G01P9/00
CPC分类号： G01C19/5712 , G01C19/5719
摘要： For a decoupled to gyro (10) to have high sensitivity to angular rate, it is necessary to have the design flexibility to achieve all the critical frequencies in the design. The geometry of the gyro (10) is first estimated and is followed by a performance analysis to maximize the gyro sensitivity. If the performance requirements cannot be met, the next iteration is started by a new estimate of the geometry. For a given design iteration, the desired modal response is implemented with a predetermined or given gyro flexure system (22). The flexure system (22) disclosed here has enough independent design parameters to allow the desired modal response required for high gyro performance to be selected by independent design choice of the available geometric and configuration design parameters of the gyroscope.

110. 发明授权

EP0943893B1 Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：EP0943893B1
公开(公告)日：2004-03-31
申请号：EP99105353.9
申请日：1999-03-16
申请人： Murata Manufacturing Co., Ltd.
发明人： Negoro, Yasuhiro (A170) Intellectual Prop., Dept. , Moriya, Kazufumi (A170) Intellectual Prop., Dept. , Konaka, Yoshihiro (A170) Intellectual Prop., Dept. , Kobayashi, Shinji (A170) Intellectual Prop., Dept.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719

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