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91. 发明公开

EP0860727A3 Vorrichtung zur Umschaltung von optischen Bildern zwischen verschiedenen Kanälen 失效
标题翻译：在不同通道之间切换光学图像的设备
公开(公告)号：EP0860727A3
公开(公告)日：1998-10-07
申请号：EP98101113.3
申请日：1998-01-23
申请人： Bodenseewerk Gerätetechnik GmbH
发明人： Büttner, Knut
IPC分类号： G02B26/06
CPC分类号： G02B26/0833 , H04J14/00 , H04N5/33
摘要： Eine Mehrzahl von abbildenden optischen Systemen, durch welche jeweils in einem zugeordneten, umschaltbaren, optischen Kanal eine zugehörige Ebene und eine Zwischenabbildungs-Ebene konjugiert aufeinander abbildbar sind, enthält ein in der Zwischenabbildungs-Ebene angeordnetes mikromechanisches Spiegelsystem (Spiegelarray) mit einem Raster von kippbar gelagerten, ansteuerbaren Spiegelelementen. Durch ein weiteres abbildendes optisches System sind in einem gemeinsamen Kanal die Zwischenabbildungs-Ebene und eine dem gemeinsamen Kanal zugeordnete Ebene konjugiert aufeinander abbildbar. Die Spiegelelemente des mikromechanischen Spiegelsystems sind derart ansteuerbar, daß sie wahlweise einen der umschaltbaren Kanäle mit dem gemeinsamen Kanal optisch koppeln.
摘要翻译：多个成像光学系统中，通过其在相关联的，可逆的，光学相关联的平面和一个中间像平面共轭可被映射到每个其它信道的每个的情况下，包括设置在中间像平面微机械镜系统（反射镜阵列）与可倾斜的网格的阀，可控反射镜元件。借助于另外的成像光学系统，中间像平面和分配给公共信道的平面可以在公共信道中彼此共轭。可以控制微机械镜系统的镜元件，使得它们可选地将可切换通道之一光耦合到公共通道。

92. 发明公开

EP0802438A2 Shape control apparatus for reflecting mirrors 失效
标题翻译：装置，用于控制反射镜的形状
公开(公告)号：EP0802438A2
公开(公告)日：1997-10-22
申请号：EP96118380.3
申请日：1996-11-15
申请人： MITSUBISHI DENKI KABUSHIKI KAISHA
发明人： Asari, Kouki , Mori, Hiromichi , Sakai, Eiichi
IPC分类号： G02B26/06 , G02B7/185
CPC分类号： G02B26/06 , G01J9/00
摘要： The control of a mirror's shape, such as for use in large reflecting telescopes, is associated with discrete points so as to avoid incurring constraints and exerting undesirable stress on the reflecting mirror through control unrelated to the mechanical characteristics. Thus, a reflecting mirror (1) is approximated by a non-constrained circular plate having a similar mechanical structure, and an eigenfunction value arithmetic unit (9) calculates values of Bessel-Fourier functions which are eigenfunctions of free vibrations of the circular plate. Using these function values, a mode displacement identification unit (10) approximates a required mirror displacement (12), which is necessary to correct for wavefront distortion, with a linear combination up to a prescribed mode of vibration of the eigenfunction. A support mechanism command unit (11) controls an actuator (6) so that the value of the linear combination function equals the amount of mirror displacement at a position supported by a reflecting mirror support mechanism (2).

93. 发明公开

EP0744641A3 An illumination system and method employing a deformable mirror and defractive optical elements 失效
$An illumination system and method employing a deformable mirror and defractive optical elements$
标题翻译： Beleuchtungssystem und Methode，die einen deformierbaren Spiegel und beugende optische Elemente benutzen
公开(公告)号：EP0744641A3
公开(公告)日：1997-07-02
申请号：EP96107790.6
申请日：1996-05-15
申请人： SVG LITHOGRAPHY SYSTEMS, INC.
发明人： Stanton, Stuart
IPC分类号： G02B26/06
CPC分类号： G03F7/702 , G02B26/06 , G02B26/0825 , G02B27/48 , G03F7/70141 , G03F7/70266 , G03F7/70358
摘要： An illumination system for use in photolithography using a laser or radiation beam source. A deformable mirror is used to shape the beam of laser radiation to obtain global uniformity. A profile sensing means is used to detect any global non-uniformities. The output of this sensing means is fed to a controller for calculating a mirror contour and controlling actuators that shape the deformable mirror to obtain a globally uniform intensity. A diffractive or diffusive optical element, such as a microlens array, eliminates local non-uniformities. Movement of this element eliminates speckle caused by interference due to the coherent beam source. A uniform intensity profile and appropriate angular spread is achieved with very little transmission loss and is automatically compensated for degraded or changing source performance. The illumination system is particularly applicable to a scanning photolithography process as used in the manufacture of semiconductor substrates.
摘要翻译：一种用于使用激光或辐射束源的光刻的照明系统。使用可变形反射镜来形成激光辐射束以获得全局均匀性。轮廓检测装置用于检测任何全局不均匀性。该感测装置的输出被馈送到用于计算镜轮廓的控制器，并且控制形成可变形反射镜以获得全局均匀强度的致动器。衍射或漫射光学元件，例如微透镜阵列，消除了局部不均匀性。该元件的移动消除了由于相干光束源引起的干扰造成的斑点。实现均匀的强度分布和适当的角度扩展，传输损耗非常小，并自动补偿降低或改变的源性能。该照明系统特别适用于制造半导体衬底时使用的扫描光刻工艺。

94. 发明公开

EP0657760A1 Image simulation and projection system 失效
标题翻译： Bildsimulations-和Projektionssystem。
公开(公告)号：EP0657760A1
公开(公告)日：1995-06-14
申请号：EP94114248.1
申请日：1994-09-09
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Lin, Tsen-Hwang , Florence, James , Leddy, Michael , Boysel, Mark
IPC分类号： G02B26/06 , G02B26/08 , G02B27/52
CPC分类号： G02B27/52 , G02B26/06 , G02B26/0841
摘要： A phase-contrast DMD based image system 236 for projecting an amplitude and phase modulated image. A flexure beam DMD array 234 is used to allow analog phase modulation of reflected light 238 . The phase modulation is converted to amplitude modulation by the phase-contrast imaging optics including a phase plate 124 . The resulting amplitude modulated wave is flicker-free and does not need to be synchronized to optical image sensors.
The arrangement may be incorporated into an image simulation system. The resulting system may be used for testing systems and training.
摘要翻译：一种用于投影幅度和相位调制图像的基于相位对比的基于DMD的图像系统236。弯曲光束DMD阵列234用于允许反射光238的模拟相位调制。通过包括相位板124的相位差成像光学器件将相位调制转换为幅度调制。所得到的幅度调制波是无闪烁的，并且不需要与光学图像传感器同步。该装置可以并入到图像模拟系统中。所得到的系统可用于测试系统和培训。

95. 发明公开

EP0459306A3 Liquid crystal wave front corrector 失效
标题翻译：液晶波前校正器
公开(公告)号：EP0459306A3
公开(公告)日：1992-09-02
申请号：EP91108387.1
申请日：1991-05-24
申请人： Finkenzeller, Hans-Ulrich, Dr. , Bonaccini, Domenico, Dr.
发明人： Finkenzeller, Hans-Ulrich, Dr. , Bonaccini, Domenico, Dr.
IPC分类号： G02F1/1347 , G02F1/137 , G02B26/06
CPC分类号： G02F1/13471 , G02F1/1393 , G02F2001/133738
摘要： The invention relates to a liquid crystal wave front corrector (LCWFC) comprising two liquid crystal layers sandwiched between transparent substrates exhibiting on their insides electrode layers with superposed alignment layers, the liquid crystal being aligned homogeneously and substantially free of twist with the alignment directions in the layers being essentially perpendicular to each other.

96. 发明公开

EP0476931A3 Phase shift device and laser apparatus utilizing the same 失效
标题翻译：相移装置和激光装置
公开(公告)号：EP0476931A3
公开(公告)日：1992-04-29
申请号：EP91308341.6
申请日：1991-09-12
申请人： CANON KABUSHIKI KAISHA
发明人： Yoshii, Minoru, c/o CANON KABUSHIKI KAISHA , Saito, Kenji, c/o CANON KABUSHIKI KAISHA , Suzuki, Masayuki, c/o CANON KABUSHIKI KAISHA , Ohsawa, Hiroshi, c/o CANON KABUSHIKI KAISHA
IPC分类号： G02B5/18 , G02B27/00 , G02B26/10 , G02B26/06
CPC分类号： G02B27/0031 , G02B5/1876 , G02B26/124
摘要： A phase shift device (4) for a laser beam has a circular first area (11) transparent to the laser beam (L) and a second area (12) provided around the first area and transparent to the laser beam. The first and second areas generate a phase difference at for example, 180° in the passing light beams. The phase shift device may be positioned at a beam waist of a laser scanning apparatus to form a beam spot of a diameter smaller than that defined by the numerical aperture of the imaging optical system. The structure of a laser apparatus employing such phase shift device is also disclosed.

97. 发明授权

EP0246318B1 AMPLITUDE-WEIGHTING ADAPTIVE LASER 失效
标题翻译：放大倍率自适应激光
公开(公告)号：EP0246318B1
公开(公告)日：1990-11-14
申请号：EP87900358.0
申请日：1986-09-19
申请人： Hughes Aircraft Company
发明人： COCHRAN, Gregory, M.
IPC分类号： G02B26/06
CPC分类号： G01J9/00 , G02B26/06
摘要： An adaptive laser system (10) includes an adaptable laser (12), a waveform sensor (14), an amplitude distribution sensor (16), and a processor (18) for converting data from the sensors into commands for controlling the waveform of a laser beam. Amplitude distribution data is to weight waveform data as the processor determines actuator commands for deforming the laser's main mirror (22). Amplitude weighting permits more accurate determination of the waveform sensor-to-actuator-coupling matrix and more precise optimization of the on-axis intensity of the laser beam across the laser aperture.

98. 发明授权

EP4211509B1 MULTIPLE COHERENT BEAM COMBINATION SYSTEMS WITH REDUCED NUMBER OF APERTURES 有权
公开(公告)号：EP4211509B1
公开(公告)日：2024-10-09
申请号：EP21863780.9
申请日：2021-08-05
IPC分类号： G02B27/10 , G02B26/06 , G02B27/06 , G01S7/481 , G01S7/497 , G02B27/12 , H01S3/00 , H01S5/40 , H01S3/10 , H01S3/13
CPC分类号： G01S7/497 , G02B27/10 , G02B27/12 , H01S3/2391 , H01S3/1307 , H01S3/06754 , H01S3/005 , G02B27/1066 , F41H13/0062 , G01S7/4815

99. 发明授权

EP3987337B1 SOURCE LUMINEUSE COMPORTANT AU MOINS UNE PUCE A SEMI-CONDUCTEUR PORTANT AU MOINS UNE DIODE 有权
公开(公告)号：EP3987337B1
公开(公告)日：2024-07-31
申请号：EP20785788.9
申请日：2020-06-19
IPC分类号： H01L33/58 , H01S5/00 , H01S5/02251 , H01S5/20 , H01S5/40 , G02B26/06 , G02B6/42
CPC分类号： G02B26/06 , G02B6/4202 , H01L33/58 , H01S5/2036 , H01S5/4012 , H01S5/02251 , H01S5/0071

100. 发明授权

EP2556404B1 MIROIR DEFORMABLE A FAIBLE EMPREINTE DE COLLAGE ET PROCEDE DE FABRICATION D'UN TEL MIROIR 有权转让
公开(公告)号：EP2556404B1
公开(公告)日：2024-03-20
申请号：EP11717309.6
申请日：2011-04-05
发明人： CAMET, Sébastien, Marin, Michel , CURIS, Jean-François, Yves , ROOMS, Frédéric, Christian, Robert
IPC分类号： G02B26/08 , G02B7/188 , G02B26/06

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