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91. 发明授权

EP1803012B1 OPTICAL PROJECTION SYSTEM 有权转让
标题翻译：光学投影系统
公开(公告)号：EP1803012B1
公开(公告)日：2015-06-03
申请号：EP05802258.3
申请日：2005-10-01
申请人： Carl Zeiss SMT GmbH
发明人： RAU, Johannes , SCHÖPPACH, Armin , GELLRICH, Bernhard , KUGLER, Jens , MAHLMANN, Martin , GEUPPERT, Bernhard , PETASCH, Thomas , FÜRTER, Gerhard
IPC分类号： G02B7/00 , G03F7/20 , G02B17/08
CPC分类号： G03F7/7015 , G02B7/00 , G02B7/008 , G02B7/021 , G02B7/028 , G02B7/22 , G02B17/08 , G02B17/0804 , G02B17/0812 , G02B17/0892 , G03F7/70808 , G03F7/70825 , G03F7/70833 , G03F7/70883
摘要： An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.

92. 发明公开

EP2835973A1 3D-Kamera und Verfahren zur Erfassung von Dreidimensionalen Bilddaten 有权
标题翻译： 3D照相机和方法，用于获取三维图像数据
公开(公告)号：EP2835973A1
公开(公告)日：2015-02-11
申请号：EP13179412.5
申请日：2013-08-06
申请人： SICK AG
发明人： Pfister, Dr. Thorsten
IPC分类号： H04N13/02
CPC分类号： H04N13/239 , B60R1/002 , G02B5/10 , G02B13/06 , G02B13/16 , G02B17/002 , G02B17/0812 , H04N13/218 , H04N13/282
摘要： Es wird eine 3D-Kamera (10) mit mindestens einem Bildsensor (16, 16a-b) zur Erfassung von dreidimensionalen Bilddaten aus einem Überwachungsbereich (12, 34, 36) und mit einer dem Bildsensor (16, 16a) vorgeordneten Spiegeloptik (38) zur Erweiterung des Sichtfeldes (44) angegeben. Dabei weist die Spiegeloptik (38) eine vordere Spiegelfläche (40) und eine rückseitige Spiegelfläche (42) auf und ist derart in dem Sichtfeld (44) des Bildsensors (16, 16a-b) angeordnet, dass die vordere Spiegelfläche (40) ein erstes Teilsichtfeld (34) über einen ersten Winkelbereich und die rückseitige Spiegelfläche (42) ein zweites Teilsichtfeld (36) über einen zweiten Winkelbereich erzeugt, wobei der erste Winkelbereich und der zweite Winkelbereich nicht überlappen und durch nicht überwachte Winkelbereiche voneinander getrennt sind.
摘要翻译：这是一个3D相机（10），用于从监控区域（12，34，36）检测所述三维图像数据的至少一个图像传感器（16，16A-B），并用一个图像传感器（16，16A）上游镜光学器件（38）指示扩大的视图（44）的领域。在此，具有前镜面（40）和后反射镜表面（42）和反射镜的光学装置（38）是这样在的图像传感器（16，16A-B）的视图（44）的场布置成使得所述前镜表面（40）的第一经由第一角度范围和所述后反射镜表面（42）的局部视图面板（34）产生在第二角度范围内，其中，所述第一角度范围和第二角度范围不重叠，并且由未被监视的角度范围被分离的第二部分视图面板（36）。

93. 发明公开

EP2722702A3 Projection optical system, and exposure apparatus and exposure method 审中-公开
标题翻译：一种投影光学系统，和曝光装置及曝光方法
公开(公告)号：EP2722702A3
公开(公告)日：2014-07-23
申请号：EP13185917.5
申请日：2004-05-06
申请人： Nikon Corporation
发明人： Omura, Yasuhiro
IPC分类号： G02B17/08 , H01L21/027
CPC分类号： G03B27/522 , G02B17/08 , G02B17/0812 , G02B17/0828 , G02B17/0844 , G02B17/0892 , G03F7/70225 , G03F7/70341
摘要： A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1. Every transmitting member and every reflecting member with a refracting power forming the projection optical system are arranged along a single optical axis (AX) and the projection optical system has an effective imaging area of a predetermined shape not including the optical axis.

94. 发明公开

EP2722704A2 Projection optical system, and exposure apparatus and exposure method 审中-公开
公开(公告)号：EP2722704A2
公开(公告)日：2014-04-23
申请号：EP13185919.1
申请日：2004-05-06
申请人： Nikon Corporation
发明人： Omura, Yasuhiro
IPC分类号： G02B17/08 , H01L21/027
CPC分类号： G03B27/522 , G02B17/08 , G02B17/0812 , G02B17/0828 , G02B17/0844 , G02B17/0892 , G03F7/70225 , G03F7/70341
摘要： A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1. Every transmitting member and every reflecting member with a refracting power forming the projection optical system are arranged along a single optical axis (AX) and the projection optical system has an effective imaging area of a predetermined shape not including the optical axis.

95. 发明公开

EP2722703A2 Projection optical system, and exposure apparatus and exposure method 审中-公开
标题翻译： Optisches Projektionssystem，und Belichtungsvorrichtung und Belichtungsverfahren
公开(公告)号：EP2722703A2
公开(公告)日：2014-04-23
申请号：EP13185918.3
申请日：2004-05-06
申请人： Nikon Corporation
发明人： Omura, Yasuhiro
IPC分类号： G02B17/08 , H01L21/027
CPC分类号： G03B27/522 , G02B17/08 , G02B17/0812 , G02B17/0828 , G02B17/0844 , G02B17/0892 , G03F7/70225 , G03F7/70341
摘要： A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1. Every transmitting member and every reflecting member with a refracting power forming the projection optical system are arranged along a single optical axis (AX) and the projection optical system has an effective imaging area of a predetermined shape not including the optical axis.
摘要翻译：用于在第二表面（W）上形成第一表面（R）的缩小图像的反射折射投射光学系统是具有优异成像性能的相对紧凑的投影光学系统，并且还针对各种像差（诸如色差和曲率）进行校正并且能够确保大的有效的图像侧数值孔径，同时适当地抑制光学表面上的反射损失。投影光学系统包括至少两个反射镜（CM1，CM2）和第一表面侧的表面具有正折射力的边界透镜（Lb），并且填充了边界透镜和第二表面之间的光路具有折射率大于1.1的介质（Lm）。每个发射构件和具有形成投影光学系统的折射能力的每个反射构件沿着单个光轴（AX）布置，并且投影光学系统具有不包括光轴的预定形状的有效成像区域。

96. 发明公开

EP1864177A4 SMALL ULTRA-HIGH NA CATADIOPTRIC OBJECTIVE 有权
标题翻译：具有超HIGH NA窄折反射物镜
公开(公告)号：EP1864177A4
公开(公告)日：2012-01-25
申请号：EP06739860
申请日：2006-03-28
申请人： KLA TENCOR TECH CORP
发明人： CHUANG YUNG-HO , SHAFER DAVID , ARMSTRONG JOSEPH J
IPC分类号： G02B21/00 , G02B17/08 , G02B21/02 , G03F7/20
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/02 , G02B21/04 , G03F7/70225 , G03F7/70275 , G03F7/70341

97. 发明公开

EP2367043A3 Optical apparatus for magnifying a view of an object at a distance 有权
标题翻译：用于对象的视图的从远处的放大光学装置
公开(公告)号：EP2367043A3
公开(公告)日：2011-11-23
申请号：EP11155295.6
申请日：2011-02-22
申请人： Shirasaki, Masataka
发明人： Shirasaki, Masataka
IPC分类号： G02B25/00 , G02B17/00 , G02C7/08
CPC分类号： G02B17/002 , G02B17/0808 , G02B17/0812 , G02B17/086 , G02B25/007 , G02B27/10 , G02C7/08
摘要： Described are new magnifying apparatus based on two dimensional arrays of micro magnifying modules (MMMs) positioned along a plane perpendicular to the center axis of the magnifying apparatus. In addition, the structure may include a two dimensional array of micro beam multipliers (MBMs) to improve the quality of the magnified image. The micro beam multipliers are positioned along a plane parallel to the array of micro magnifying modules. The structure also may include a two dimensional array of ray angle adjusters (RAAs) to extend the view angle. The ray angle adjusters are positioned along a plane parallel to the array of micro magnifying modules. The array of micro magnifying modules, with or without the micro beam multipliers and/or ray angle adjusters, may be constructed as a thin plate with a thickness of a few millimeters, through which the object is viewed. An object at a distance appears in the magnifying apparatus as a magnified image and the magnifying apparatus can be used for viewing an object at a distance in a way similar to the use of a conventional magnifier for viewing an object in a short distance.

98. 发明公开

EP1651991A4 INSPECTION SYSTEM USING SMALL CATADIOPTRIC OBJECTIVE 审中-公开
标题翻译： WITH A小折反射镜片检验系统
公开(公告)号：EP1651991A4
公开(公告)日：2010-08-11
申请号：EP04809477
申请日：2004-07-06
申请人： KLA TENCOR TECH CORP
发明人： CHUANG YUNG-HO , ARMSTRONG JOSEPH J , SHAFER DAVID R
IPC分类号： G02B17/00 , G01N21/88 , G01N21/95 , G02B20060101 , G02B5/00 , G02B17/08 , G02B21/02 , G03F7/20
CPC分类号： G01N21/8806 , G01N21/9501 , G02B5/001 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341

99. 发明公开

EP1771753A4 CATADIOPTRIC IMAGING SYSTEM EXHIBITING ENHANCED DEEP ULTRAVIOLET SPECTRAL BANDWIDTH 审中-公开
标题翻译：具有增强光谱DEEP-UV带宽折反射式图象系统
公开(公告)号：EP1771753A4
公开(公告)日：2008-11-05
申请号：EP05778140
申请日：2005-07-28
申请人： KLA TENCOR TECH CORP
发明人： CHUANG YUNG-HO , ARMSTRONG JOSEPH J , SHAFER DAVID R
IPC分类号： G02B5/08 , G02B17/08 , G02B21/02 , G03F7/20
CPC分类号： G03F7/70225 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70341
摘要： A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective comprises a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. The objective may provide, in certain instances, a spectral bandwidth up to approximately 193 to 266 manometers and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may comprise more than one lens and may be formed of a material different from at least one other lens in the objective.

100. 发明授权

EP1709472B1 CATADIOPTRIC PROJECTION OBJECTIVE 有权
标题翻译：折反射式投影镜头
公开(公告)号：EP1709472B1
公开(公告)日：2008-08-06
申请号：EP05700877.3
申请日：2005-01-13
申请人： Carl Zeiss SMT AG
发明人： SHAFER, David , ULRICH, Wilhelm , DODOC, Aurelian , VON BÜNAU, Rudolf , MANN, Hans-Jürgen , EPPLE, Alexander
IPC分类号： G02B17/00 , G03F7/20
CPC分类号： G03F7/70958 , G02B13/22 , G02B17/0812 , G02B17/0892 , G03F7/70225 , G03F7/70275 , G03F7/70341 , G03F7/70966
摘要： A catadioptric projection objective (200) for imaging a pattern provided in an object plane (201) of the projection objective onto an image plane (202) of the projection objective comprises: a first objective part (210) for imaging the pattern provided in the object plane into a first intermediate image; a second objective part (220) for imaging the first intermediate imaging into a second intermediate image; a third objective part (230) for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror (221) having a first continuous mirror surface and at least one second concave mirror (222) having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

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