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    • 9. 发明公开
    • SLIDING PART
    • 滑动部分
    • EP3284980A1
    • 2018-02-21
    • EP16779961.8
    • 2016-04-07
    • Eagle Industry Co., Ltd.NOK Corporation
    • ITADANI, MasatoshiSUNAGAWA, KazumasaOKADA, TetsuzoCHIBA, KeiichiKIRYU, KenjiKOGA, Akiko
    • F16J15/34C23C16/26F16C17/04F16C33/24F16C33/74
    • In a slide component such as a mechanical seal which seals a silicate containing sealed fluid such as an LLC to which silicate is added, leakage due to deposition of a silicate compound is prevented.
      A slide component which includes a circular ring-shaped stationary-side seal ring 5 fixed to a stationary side and a circular ring-shaped rotating-side seal ring 3 rotating with a rotating shaft 1, and relatively rotates respective opposed sliding faces S of the stationary-side seal ring 5 and the rotating-side seal ring 3, thereby sealing a sealed fluid present on one side in a radial direction of the sliding face relatively rotating and sliding, is characterized in that: the sealed fluid is a silicate containing fluid; and on at least either one sliding face of the stationary-side seal ring 5 and the rotating-side seal ring 3, an amorphous carbon film 10 formed by using hydrocarbon gas not containing organosilicon compound gas in a plasma CVD method is laminated.
    • 在密封包含添加了硅酸盐的LLC等密封流体的硅酸盐的滑动部件,例如机械密封件中,防止了由硅酸盐化合物的沉积引起的泄漏。 滑动部件具有固定在固定侧的圆环状的固定侧密封环5和与旋转轴1一起旋转的圆环状的旋转侧密封环3, 从而密封位于相对旋转滑动的滑动面的径向一侧的密封流体,其特征在于:密封流体是含有流体的硅酸盐 ; 在固定侧密封环5和旋转侧密封环3的至少一方的滑动面上层叠使用等离子体CVD法使用不含有机硅化合物气体的烃类气体而形成的非晶碳膜10。