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1. 发明公开

EP2838107A1 Circuit probe for charged particle beam system 有权
标题翻译： SCHALTUNGSSONDEFÜRLADUNGSTRÄGERSTRAHLSYSTEM
公开(公告)号：EP2838107A1
公开(公告)日：2015-02-18
申请号：EP14180858.4
申请日：2014-08-13
申请人： FEI COMPANY
发明人： Barends, Paul , Van den Boogaard, Ron , Brundage, Philip
IPC分类号： H01J37/20 , G01R31/28 , H01J37/305
CPC分类号： G01R1/06705 , H01J37/20 , H01J2237/2008 , H01J2237/206 , H01J2237/208 , H01J2237/24564 , H01J2237/24592
摘要： A probe assembly can be selectively connected and disconnected from its electrical harness within a vacuum chamber by motion of a stage supporting the probe assembly, so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.
摘要翻译：通过支撑探针组件的台架的运动，可以在真空室内选择性地将探针组件与其电线断开连接，从而安装有工件的探针组件可以在不受电缆干扰的情况下旋转和倾斜，并且可以然后重新连接而不打开真空室。还描述了当探针组件与其电气线束断开连接时，将样品和探针接地的手段，以及通过确保探头机构和探头本身在操作过程中不会粘住太远的手段来防止探头机构和探头本身的损坏。

2. 发明授权

EP2838107B1 CIRCUIT PROBE FOR CHARGED PARTICLE BEAM SYSTEM 有权
标题翻译： SWITCHING PROBE货物的承载梁系统
公开(公告)号：EP2838107B1
公开(公告)日：2016-06-01
申请号：EP14180858.4
申请日：2014-08-13
申请人： FEI COMPANY
发明人： Barends, Paul , Van den Boogaard, Ron , Brundage, Philip
IPC分类号： H01J37/20 , G01R31/28 , H01J37/305
CPC分类号： G01R1/06705 , H01J37/20 , H01J2237/2008 , H01J2237/206 , H01J2237/208 , H01J2237/24564 , H01J2237/24592

3. 发明公开

EP2765591A1 Sample preparation stage 有权
标题翻译： Probenvorbereitungshalter
公开(公告)号：EP2765591A1
公开(公告)日：2014-08-13
申请号：EP13154537.8
申请日：2013-02-08
申请人： FEI Company
发明人： Persoon, Johannes , Van den Boogaard, Ron , Engelen, Andreas , Schampers, Ruud , Hayles, Michael
IPC分类号： H01J37/20 , G01N1/06
CPC分类号： H01J37/20 , G01N2001/2873 , H01J37/3056 , H01J2237/2001 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/31745
摘要： Described is a system and method for in situ sample preparation and imaging. The system includes a multi-axis stage 100 having a bulk stage 110 and a grid stage 150 with various degrees of freedom to allow for sample preparation. In some embodiments, a focused ion beam system is used to prepare a lamella on the bulk stage 110. The lamella can then be transferred to the grid stage 150 from the bulk stage 110 without needing to move the multi-axis stage 100 from the focused ion beam system.
摘要翻译：描述了用于原位样品制备和成像的系统和方法。该系统包括具有大块台110和具有不同自由度以允许样品制备的网格台150的多轴台100。在一些实施例中，使用聚焦离子束系统来在体台110上制备薄片。然后可以将薄片从大体积台110转移到网格台150，而不需要将多轴台100从聚焦离子束系统。

4. 发明公开

EP3104392A1 METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED-PARTICLE MICROSCOPE 审中-公开
标题翻译：带电粒子显微镜中样品表面改性的分析方法
公开(公告)号：EP3104392A1
公开(公告)日：2016-12-14
申请号：EP16172498.4
申请日：2016-06-01
申请人： FEI Company
发明人： Potocek, Pavel , Boughorbel, Faysal , Van den Boogaard, Ron , Korkmaz, Emine
IPC分类号： H01J37/26 , G01N1/28 , H01J37/304 , H01J37/305
CPC分类号： H01J37/3005 , G01N1/286 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/304 , H01J37/3056 , H01J37/317 , H01J2237/2067 , H01J2237/221 , H01J2237/24495
摘要： A method of investigating a specimen using:
- A charged-particle microscope comprising:
▪ A specimen holder, for holding the specimen;
▪ A source, for producing a beam of charged-particle radiation;
▪ An illuminator, for directing said beam so as to irradiate a surface of the specimen;
▪ An imaging detector, for receiving a flux of radiation emanating from the specimen in response to said irradiation, so as to produce an image of at least part of said surface;
- An apparatus that can be invoked to modify said surface by performing thereon a process chosen from the group comprising material removal, material deposition, and combinations hereof,
which method comprises the following steps:
- Producing and storing a first image, of a first, initial surface of the specimen;
- In a primary modification step, invoking said apparatus so as to modify said first surface, thereby yielding a second, modified surface;
- Producing and storing a second image, of said second surface;
- Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
摘要翻译：一种使用以下方法研究样本的方法： - 带电粒子显微镜，包括：▪样本架，用于容纳样本; ▪产生一束带电粒子辐射的来源; ▪照射器，用于引导所述光束以照射样本的表面; ▪成像检测器，用于接收响应于所述照射而从样本发出的辐射通量，以便产生至少部分所述表面的图像; - 可以通过在其上执行从包括材料去除，材料沉积及其组合的组中选择的工艺来调用所述表面的装置，所述方法包括以下步骤： - 生成并存储第一图像，试样的初始表面; - 在主修改步骤中，调用所述设备以修改所述第一表面，由此产生第二修改表面; - 产生并存储所述第二表面的第二图像; - 使用数学图像相似度量来执行所述第二图像和第一图像的像素方式比较，以便生成所述主要修改步骤的主要品质因数。

5. 发明公开

EP3104155A1 METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED-PARTICLE MICROSCOPE 审中-公开
标题翻译： VERFAHREN ZUR ANALYZE VONOBERFLÄCHENMODIFIKATIONENEINER PROBE IN EINESLADUNGSTRÄGER-MIKROSKOP
公开(公告)号：EP3104155A1
公开(公告)日：2016-12-14
申请号：EP15171227.0
申请日：2015-06-09
申请人： FEI Company
发明人： Potocek, Pavel , Boughorbel, Faysal , Van den Boogaard, Ron , Korkmaz, Emine
IPC分类号： G01N1/28 , H01J37/26 , H01J37/304 , H01J37/305
CPC分类号： H01J37/3005 , G01N1/286 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/304 , H01J37/3056 , H01J37/317 , H01J2237/2067 , H01J2237/221 , H01J2237/24495
摘要： A method of investigating a specimen using:
- A charged-particle microscope comprising:
▪ A specimen holder, for holding the specimen;
▪ A source, for producing a beam of charged-particle radiation;
▪ An illuminator, for directing said beam so as to irradiate a surface of the specimen;
▪ An imaging detector, for receiving a flux of radiation emanating from the specimen in response to said irradiation, so as to produce an image of at least part of said surface;

- An apparatus that can be invoked to modify said surface by performing thereon a process chosen from the group comprising material removal, material deposition, and combinations hereof,

which method comprises the following steps:
- Producing and storing a first image, of a first, initial surface of the specimen;
- In a primary modification step, invoking said apparatus so as to modify said first surface, thereby yielding a second, modified surface;
- Producing and storing a second image, of said second surface;
- Using a mathematical Image Similarity Metric to compare said second and first images, so as to generate a primary figure of merit for said primary modification step.
摘要翻译：一种使用以下方法研究试样的方法： - 带电粒子显微镜，其包括： - 用于保持所述试样的试样保持器; - 一种用于产生带电粒子辐射束的来源; - 一种照明器，用于引导所述光束以照射所述样本的表面; - 一种成像检测器，用于响应于所述照射从所述样本接收辐射通量，以产生所述表面的至少一部分的图像; - 可以通过在其上执行从包括材料去除，材料沉积及其组合的组中选择的工艺来调用所述表面来修饰所述表面的装置，所述方法包括以下步骤： - 制造和存储第一图像，样品的初始表面; - 在一次修改步骤中，调用所述装置以便修改所述第一表面，从而产生第二修改表面; - 生成和存储所述第二表面的第二图像; - 使用数学图像相似性度量来比较所述第二和第一图像，以便产生用于所述主要修改步骤的主要品质因数。

6. 发明授权

EP2765591B1 Sample preparation stage 有权
标题翻译：样品制备架
公开(公告)号：EP2765591B1
公开(公告)日：2016-07-13
申请号：EP13154537.8
申请日：2013-02-08
申请人： FEI Company
发明人： Persoon, Johannes , Van den Boogaard, Ron , Engelen, Andreas , Schampers, Ruud , Hayles, Michael
IPC分类号： H01J37/20 , G01N1/06 , H01J37/305
CPC分类号： H01J37/20 , G01N2001/2873 , H01J37/3056 , H01J2237/2001 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/31745

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