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    • 3. 发明申请
    • FOCUSING LENS FOR ELECTRON EMITTER
    • 聚焦镜头用于电子发射器
    • WO02103740A2
    • 2002-12-27
    • PCT/US0218474
    • 2002-06-10
    • HEWLETT PACKARD CO
    • BENNING PAUL JKNIGHT WILLIAM RREGAN MICHAEL J
    • G11C11/21G11B9/00G11B9/10G11C11/23H01J1/52H01J3/02H01J3/18H01J19/38H01J19/40H01J21/10H01J29/06H01J29/62H01J31/12
    • B82Y10/00G11B9/10G11B9/14G11B9/1418G11C11/23H01J3/022
    • An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens.
    • 电子透镜用于将电子从阴极(10)聚焦到阳极(30)。 透镜包括第一导电层(36),其具有距离阴极(10)第一距离(48)的第一开口(38)。 第一导电层(36)保持在第一电压。 透镜还包括第二导电层(32),其具有与第一导电层(36)相距第二距离(46)的第二开口(34)和距离阳极(30)的第三距离(24)。 第二导电层(32)保持在基本上等于阳极(30)的电压的第二电压。 基于第一电压,第二电压,第一距离(48),第二距离(46)和第三距离(24)来选择第一(38)和第二(34)开口。 开口将从阴极(10)发射的电子聚焦到阳极(30)上,其光斑尺寸优选小于40纳米。 通过透镜的结构,在阴极(10)和阳极(30)之间产生的力最小化。