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    • 1. 发明授权
    • Surface acoustic wave device
    • 表面声波装置
    • US06566788B2
    • 2003-05-20
    • US09967978
    • 2001-10-02
    • Osamu IwamotoKoichi MorozumiYuji Mitsui
    • Osamu IwamotoKoichi MorozumiYuji Mitsui
    • H02L4108
    • H03H3/08H03H9/25
    • A surface acoustic wave device is provided having a substrate made of quartz, a pair of inter digital transducer-shaped electrodes made of an aluminum layer, an electrode pad, and a pair of lattice-shaped reflectors made of the same material as the electrode. The crystal structure of the aluminum layer composing the electrode is a twin crystal structure, where crystal grains of the (−1 1 1) plane and the (0 0 2) plane and crystal grains of the (1 −1 −1) plane and the (0 0 −2) plane are in a twin crystal relationship with the (−1 1 −1) plane and the (1 −1 1) plane of aluminum as the twin boundaries. Also, the {1 1 1} plane of the aluminum layer is oriented to an 8° inclination relative to the {0 1 0} plane of quartz composing the substrate.
    • 提供具有由石英制成的基板的表面声波装置,由铝层制成的一对数字式换能器形状的电极,电极焊盘和由与电极相同的材料制成的一对格子状的反射器。 构成电极的铝层的晶体结构是双晶结构,其中(-111)面和(0O2)面的晶粒和(1-1-1)面的晶粒和 (0 0 -2)平面与铝的(-1 1 -1)面和(1-11)面作为双边界处于双晶体关系。 此外,铝层的{111}面相对于构成基板的石英的{0 1.0}平面取向为8°倾斜。