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    • 1. 发明公开
    • Workpiece holding and positioning mechanism and system
    • 工作控制和定位机制与系统
    • EP0144183A3
    • 1986-04-02
    • EP84307944
    • 1984-11-15
    • FIVE X CORPORATION
    • Buschor, Josef J.
    • H05K13/02B25J09/06B25J15/02
    • H01L21/67
    • A workpiece positioning mechanism (10, Figure 1) includes a movable arm (12) having a plurality of joints (14). A pair of grippers (26 and 28) are movable toward and away from a semiconductor wafer boat (44). The grippers are held in position by a stop member (70, Figure 4) when they engage the boat (44) and locked in an open position by prongs (86). A solenoid (30) is actuated to allow the grippers to move between their open and closed positions. Flexible bellows (22 and 94) and tubing (24) surround moving parts (e.g., 14, 62, 64, 66, 80) of the mechanism (10) to prevent contamination of the semiconductor wafers (52).
    • 工件定位机构(10,图1)包括具有多个接头(14)的可动臂(12)。 一对夹持器(26和28)可朝向和远离半导体晶片舟(44)移动。 夹持器当它们接合船(44)并通过叉(86)锁定在打开位置时,通过止动构件(图4中的70)保持就位。 螺线管(30)被致动以允许夹具在其打开和关闭位置之间移动。 柔性波纹管(22和94)和管道(24)围绕机构(10)的运动部件(例如,14,62,64,66,80),以防止半导体晶片(52)的污染。
    • 2. 发明申请
    • ARTICULATED ROBOT
    • 结构机器人
    • WO1998017443A1
    • 1998-04-30
    • PCT/JP1997003668
    • 1997-10-13
    • KABUSHIKI KAISHA YASKAWA DENKIKAIDO, ShinichiTANOUE, TsuyoshiOKAHISA, ManabuOGATA, SeijiYAMAGUCHI, Koichi
    • KABUSHIKI KAISHA YASKAWA DENKI
    • B25J09/06
    • B25J19/00B25J9/042B25J9/1065
    • An articulated robot provided with a plurality of arms adapted to turn in a horizontal plane, which comprises a stationary base (1); a turning head (3) provided on the stationary base (1) to turn about a vertical axis; a parallelogram link mechanism consisting of a first arm (5) fixed to the turning head (3), an auxiliary link (7) and a link (9); a second arm (12) mounted on the auxiliary link (7) to be swingable and coaxial with a connection shaft between the first arm (5) and the auxiliary link (7); and a spring device (20) extending between the first arm (5) and the second arm (12). Since the spring device (20) acts in such a direction as to assist in acceleration and deceleration of the first arm (5) and the second arm (12), a drive motor can be small in power.
    • 一种铰接机器人,其具有适于在水平面上转动的多个臂,其包括固定基座(1); 设置在所述固定基座(1)上以绕垂直轴线转动的转头(3); 由固定到转头(3)的第一臂(5),辅助连杆(7)和连杆(9)组成的平行四边形连杆机构; 安装在所述辅助连杆(7)上以与所述第一臂(5)和所述辅助连杆(7)之间的连接轴可摆动并同轴的第二臂(12); 以及在所述第一臂(5)和所述第二臂(12)之间延伸的弹簧装置(20)。 由于弹簧装置(20)沿着辅助第一臂(5)和第二臂(12)的加速和减速的方向作用,因此驱动马达的功率小。
    • 4. 发明申请
    • ARTICULATED ROBOT
    • 结构机器人
    • WO1994022643A1
    • 1994-10-13
    • PCT/JP1994000504
    • 1994-03-29
    • KABUSHIKI KAISHA YASKAWA DENKINISHI, MasanoriWATANABE, Hideaki
    • KABUSHIKI KAISHA YASKAWA DENKI
    • B25J09/06
    • B25J9/04B25J9/1065Y10S414/13Y10T74/20305
    • A parallel link mechanism is formed by a lower arm (2) supported on a lower base (1) so that the lower arm (2) can be tilted longitudinally, a connecting link (21) extending in parallel with the lower arm (2) and supported on the lower base (1) so that the connecting link (21) can be tilted longitudinally, and an upper base (22) to which the upper end portions of the lower arm (2) and connecting link (21) are connected pivotably. The upper base (22) supports thereon a swing member (3) adapted to be swung horizontally, and an upper arm (4) provided in a position offset from an axis Z &cir& _ of swinging movement of the swing member (3) so that the upper arm (4) can be tilted vertically. Accordingly, the upper and lower arms do not interfere with each other, and the range of working of the upper arm can be increased.
    • 平行连杆机构由支撑在下基座(1)上的下臂(2)形成,使得下臂(2)能够纵向倾斜,与下臂(2)平行延伸的连接杆(21) 并且支撑在下基部(1)上,使得连接杆(21)能够纵向倾斜,并且下臂(2)和连接杆(21)的上端部分连接到的上基座(22) 枢。 上基座(22)在其上支撑适于水平摆动的摆动构件(3)和设置在偏离摆动构件(3)的摆动运动的轴线Z'的位置的上臂(4),使得 上臂(4)可以垂直倾斜。 因此,上臂和下臂不会彼此干涉,并且可以增加上臂的工作范围。
    • 5. 发明申请
    • ARTICULATED MANIPULATOR HAVING SEVEN DEGREES OF FREEDOM OF MOTION
    • 具有运动自由度的七个程序的控制器
    • WO1992018293A1
    • 1992-10-29
    • PCT/JP1992000484
    • 1992-04-16
    • FANUC LTDTORII, NobutoshiNIHEI, RyoTAKIZAWA, Katsutoshi
    • FANUC LTD
    • B25J09/06
    • B25J9/06
    • An articulated manipulator having seven degrees of freedom of motion which comprises a shoulder portion (14) supported on a proximal portion (12), an upper arm portion (16) coupled to the shoulder portion, an elbow portion (18), a forearm portion (20), and a wrist portion (22), wherein the shoulder portion (14) is provided with three shoulder joints (R1, R2, P3, or P1, R2, R3), wherein the wrist portion (22) is provided with three wrist joints (R5, P6, R7; P5, R6, R7; R5, R6, P7), wherein the shoulder portion is constituted by three shoulder link elements including at least one crank-shaped link element, wherein the wrist portion (22) is also constituted by three link elements, wherein the axes (a1 to a3) of motion of the joints of at least the shoulder portion (14) intersect with each other at one point, and wherein the axes (a5 to a7) of motions of the joints of the wrist portion (22) preferably intersect with each other at one point.
    • 具有七个运动自由度的关节运动器,其包括支撑在近侧部分(12)上的肩部(14),联接到所述肩部的上臂部分(16),肘部(18),前臂部分 (20)和手腕部(22),其中所述肩部(14)设置有三个肩关节(R1,R2,P3或P1,R2,R3),其中所述腕部(22)设置有 三个腕关节(R5,P6,R7; P5,R6,R7; R5,R6,P7),其中肩部由包括至少一个曲柄形连接元件的三个肩部连接元件构成,其中腕部 )也由三个连接元件构成,其中至少所述肩部(14)的关节的运动轴线(a1〜a3)在一点相互交叉,并且其中运动的轴线(a5〜a7) 手腕部分(22)的关节优选地在一个点处彼此相交。
    • 8. 发明申请
    • ROBOT FOR HANDLING
    • 机器人处理
    • WO1997027977A1
    • 1997-08-07
    • PCT/JP1997000225
    • 1997-01-30
    • KOMATSU LTD.SUWA, TatsunoriHATAKE, Kazuhiro
    • KOMATSU LTD.
    • B25J09/06
    • B25J9/107H01L21/67742Y10T74/20305Y10T74/20317Y10T74/20329
    • A robot for handling comprises at least four bosses (20a, 20b, 20c, 20d) coaxially provided and displaced from each other axially of the center of rotation to permit independent rotation, arms (21a, 21b, 21c, 21d) provided on the bosses, respectively, links (22a, 22b, 22c, 22d) connected to the respective arms, a plurality of carriages (8a, 8b) connected through a carriage attitude regulating mechanism (B) to tip ends of each pair of links, each of which is connected to each arm of each pair of axially adjacent two bosses, the plurality of carriages being displaced from each other axially of the center of rotation, and independent drive sources (27a, 27b, 27c, 27d), respectively, connected to each of said bosses.
    • 一种用于处理的机器人包括至少四个凸起(20a,20b,20c,20d),其同轴地设置并且在旋转中心轴向彼此位移,以允许独立旋转,设置在凸台上的臂(21a,21b,21c,21d) 分别连接到各个臂的连杆(22a,22b,22c,22d),通过滑架姿态调节机构(B)连接到每对链节的末端的多个滑架(8a,8b) 连接到每对轴向相邻的两个凸台的每个臂,所述多个滑架在旋转中心轴向彼此偏移,并且分别独立的驱动源(27a,27b,27c,27d)连接到 老板说
    • 9. 发明申请
    • INDUSTRIAL ROBOT
    • 工业机器人
    • WO1997019789A1
    • 1997-06-05
    • PCT/JP1996003423
    • 1996-11-21
    • KABUSHIKI KAISHA YASKAWA DENKITOMIYASU, Kazuhiro
    • KABUSHIKI KAISHA YASKAWA DENKI
    • B25J09/06
    • B25J9/102B25J9/047Y10T74/20317
    • An industrial robot which allows its reduction gear to be easily replaced. An intermediate member (6) which includes a disk portion (61), a flange portion (63) provided around the periphery of the disk portion (61) and a through-hole (64) formed in the center of the disk portion (61) is provided between a rotating part (3) and a reduction mechanism part (22) of a reduction gear (2) fixed to a base (1). A through-hole (32) which is concentric with a rotating shaft (S) and has an inner diameter larger than the outer diameter of a fixing portion (21) of the reduction gear (2) is provided in the bottom (31) of the rotating part (3). The fixing portion (61) of the intermediate member (6) is fixed to the top surface of the reduction mechanism part (22) and the flange portion (63) is fixed to the bottom (31) of the rotating part (3) so that the bottom surface of the rotating part (3) is opposed to the top surface of the base (1) across a gap. A driving motor (4) is fixed to the disk portion (61) of the intermediate member (6) concentrically with the rotating shaft (S), and an output shaft (41) of the driving motor (4) is connected to the reduction mechanism part (22).
    • 一种允许其减速装置容易更换的工业机器人。 一种中间构件(6),包括圆盘部分(61),设置在圆盘部分周围的凸缘部分(63)和形成在圆盘部分(61)的中心的通孔(64) )设置在固定到基座(1)的减速齿轮(2)的旋转部(3)和减速机构部(22)之间。 与减速齿轮(2)的固定部(21)的外径大于内径的与旋转轴(S)同心的通孔(32)设置在所述减速齿轮(2)的固定部(21)的外径 旋转部(3)。 所述中间构件(6)的固定部(61)固定在所述减速机构部(22)的上表面,所述凸缘部(63)固定在所述旋转部(3)的底部(31) 旋转部分(3)的底表面跨越间隙与基部(1)的顶表面相对。 驱动电机(4)与转轴(S)同心地固定在中间部件(6)的盘部(61)上,驱动马达(4)的输出轴(41)与减速机构 机构部分(22)。
    • 10. 发明申请
    • ARTICULATED ROBOT
    • 结构机器人
    • WO1993017837A1
    • 1993-09-16
    • PCT/JP1993000281
    • 1993-03-05
    • KABUSHIKI KAISHA KOMATSU SEISAKUSHOTAKECHI, HiroakiSUWA, TatsunoriONO, Takashi
    • KABUSHIKI KAISHA KOMATSU SEISAKUSHO
    • B25J09/06
    • B25J9/1015
    • An articulated robot, wherein a small circle, small square and the like can be cut with high precision without the motion of a main body of an articulated robot (2), and moreover, an operating space can be enlarged for cutting a large circle, large square and the like. To ensure such operations, the proximal end portion of a first arm (6) is rotatably supported on a support member (5) fixed to the forward end portion (1) of the articulated robot (2), the proximal end portion of a second arm (7) rotatable in a horizontal plane is supported on the other (forward) end portion of the first arm (6) to thereby form a seven- or eight-axial robot, and a tool gripping member (13) is provided at the forward end portion of the second arm (7).
    • 关节式机器人,其中可以高精度地切割小圆形,小方形等,而不需要关节式机器人(2)的主体的运动,此外,可以扩大操作空间以切割大圆圈, 大方形等。 为了确保这样的操作,第一臂(6)的近端部分可旋转地支撑在固定到关节式机器人(2)的前端部分(1)的支撑构件(5)上,第二臂的近端部分 在水平面上可旋转的臂(7)支承在第一臂(6)的另一个(向前)端部,从而形成七轴或八轴机器人,并且工具夹持构件 第二臂(7)的前端部。