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    • 10. 发明申请
    • MULTI-CHANNEL PHOTOMULTIPLIER TUBE ASSEMBLY
    • 多通道光电倍增管组件
    • WO2017172737A1
    • 2017-10-05
    • PCT/US2017/024498
    • 2017-03-28
    • KLA-TENCOR CORPORATION
    • MACK, Chris A.
    • H01J40/04H01J43/06
    • H01J43/20G01J1/16G01J1/4228G01J1/44G01J2001/4233G01J2001/4453G01N21/8806G01N21/9501
    • A multi-channel photomultiplier tube (PMT) detector assembly includes a photocathode. The detector assembly includes a first dynode channel including a first set of dynode pathways. The first set of dynode pathways include a plurality of dynode stages configured to receive a first portion of the photoelectrons and direct a first amplified photoelectron current onto a first anode. The detector assembly includes an additional dynode channel including an additional set of dynode pathways. The additional set of dynode pathways includes a plurality of dynode stages configured to receive an additional portion of the photoelectrons and direct an additional amplified photoelectron current onto an additional anode. The detector assembly includes a grid configured to direct the first portion of the photoelectrons to one or more of the first set of pathways and an additional portion of the photoelectrons to one or more of the additional set of pathways.
    • 多通道光电倍增管(PMT)检测器组件包括光电阴极。 检测器组件包括具有第一组倍增电极通道的第一倍增极通道。 第一组倍增电极路径包括多个倍增电极级,其被配置为接收光电子的第一部分并将第一放大的光电子电流导向第一阳极。 探测器组件包括一个额外的倍增电极通道,包括一组额外的倍增电极通道。 附加组倍增电极路径包括多个倍增电极级,其被配置为接收附加部分的光电子并将附加放大的光电子电流导向附加阳极。 检测器组件包括栅格,该栅格被配置为将光电子的第一部分引导至第一组路径中的一个或多个,并将光电子的另外部分引导至另外的一组路径中的一个或多个。