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1. 发明授权

US09882113B1 Gallium beam lithography for superconductive structure formation 有权
公开(公告)号：US09882113B1
公开(公告)日：2018-01-30
申请号：US14742505
申请日：2015-06-17
申请人： National Technology & Engineering Solutions of Sandia, LLC
发明人： Michael David Henry , Rupert M. Lewis
IPC分类号： H01L23/48 , H01L39/24 , H01J37/305 , H01J37/21 , H01B12/02 , H01L39/02 , H01L39/12 , H01L39/22
CPC分类号： H01L39/249 , H01B12/02 , H01J37/21 , H01J37/3056 , H01J2237/213 , H01J2237/3175 , H01L39/025 , H01L39/125 , H01L39/223 , H01L39/2406 , H01L39/2409 , H01L39/2416 , H01L39/2493
摘要： The present invention relates to the use of gallium beam lithography to form superconductive structures. Generally, the method includes exposing a surface to gallium to form an implanted region and then removing material adjacent to and/or below that implanted region. In particular embodiments, the methods herein provide microstructures and nanostructures in any useful substrate, such as those including niobium, tantalum, tungsten, or titanium.

2. 发明申请

US20070210041A1 Automatic focusing of electron beams using a modified Faraday cup diagnostic 审中-公开
标题翻译：使用改进的法拉第杯诊断自动聚焦电子束
公开(公告)号：US20070210041A1
公开(公告)日：2007-09-13
申请号：US11367846
申请日：2006-03-02
申请人： John Elmer , Todd Palmer , Alan Teruya
发明人： John Elmer , Todd Palmer , Alan Teruya
IPC分类号： B23K26/00 , H01J3/14
CPC分类号： B23K15/0046 , B23K15/0013 , B23K15/0026 , H01J37/21 , H01J37/315 , H01J2237/21 , H01J2237/213
摘要： The present invention relates to a method and system for automatically focusing an electron beam. Such an invention is based on a Faraday Cup diagnostic system, often a Modified Faraday Cup (MFC) system that enables tomographic reconstruction of the beam so as to measure beam parameters. Such a reconstruction method and system is automated using a servo-feedback loop to determine, for example, power distributions of the beam so as to provide appropriate adjustments to system controls to enable desired beam focus conditions.
摘要翻译：本发明涉及一种自动聚焦电子束的方法和系统。这样的发明是基于法拉第杯诊断系统，通常是修改法拉第杯（MFC）系统，其能够进行光束的层析成像重建，以便测量光束参数。这种重建方法和系统使用伺服反馈回路自动化来确定例如光束的功率分布，以便对系统控制提供适当的调整以实现期望的光束聚焦条件。

3. 发明申请

WO2014030144A2 METHOD OF OPERATIONAL CONTROL OF ELECTRON BEAM WELDING 审中-公开
标题翻译：电子束焊接操作方法
公开(公告)号：WO2014030144A2
公开(公告)日：2014-02-27
申请号：PCT/IB2013056836
申请日：2013-08-23
申请人： FED STATE BUDGETED EDUCATION INSTITUTION FOR HIGHER PROFESSIONAL EDUCATION PERM NAT RES POLYTECHNIC
发明人： TRUSHNIKOV DMITRIY NIKOLAYEVICH , BELENKII VLADIMIR YAKOVLEVICH
CPC分类号： B23K15/0013 , B23K15/002 , B23K15/0046 , H01J37/21 , H01J37/315 , H01J2237/213 , H01J2237/216 , H01J2237/30472
摘要： The invention relates to the field of electron beam welding and may be used when electron-beam welding structural mate- rials with control and management of the power density of the electron beam directly within the welding process. The method of electron beam welding with operational control of the power density and focus level of the electron beam is differentiated by the fact that it contains stages in which: the electron beam welding is performed with a sinusoidally or linearly oscillating electron beam in the frequency range from 300 to 2,000 Hz; during the welding process, the waveform of the secondary current in the plasma is measured, filtered, and rectified; the filtered-and- rectified or original waveform of the secondary current in the plasma is processed using the synchronous integration method; the magnitude of the delay function, which results from processing the secondary waveform using the synchronous integration method, is measured relative to the wave- form of the current in the deflection coils; the focusing current is controlled while holding the value of the delay function mentioned above at a constant level which corresponds to a specified magnitude of the power density of the electron beam.
摘要翻译：本发明涉及电子束焊接领域，并且可以在电子束焊接结构材料中直接在焊接过程中控制和管理电子束的功率密度的情况下使用。通过电子束焊接的功率密度和聚焦水平的操作控制的方法被电子束区分，其中包括以下事实，其中：电子束焊接在频率范围内以正弦或线性振荡的电子束进行从300到2000Hz; 在焊接过程中，对等离子体中的次级电流的波形进行测量，滤波和整流; 使用同步积分方法处理等离子体中次级电流的滤波和整流或原始波形; 相对于偏转线圈中的电流波形来测量由使用同步积分方法处理次级波形产生的延迟函数的幅度; 控制聚焦电流，同时将上述延迟函数的值保持在与电子束的功率密度的规定大小对应的恒定电平。

4. 发明公开

EP2888070A2 METHOD OF OPERATIONAL CONTROL OF ELECTRON BEAM WELDING BASED ON THE SYNCHRONOUS INTEGRATION METHOD 失效
标题翻译： VERFAHREN ZUR BETREBSSTEUERUNG EINER ELEKTRONENSTRAHLSCHWEISSUNG AUF基于VON SYNCHRONEN INTEGRATIONSVERFAHREN
公开(公告)号：EP2888070A2
公开(公告)日：2015-07-01
申请号：EP13802104.3
申请日：2013-08-23
申请人： Federal State Budgeted Education Institution for Higher Professional Education Perm National Research Polytechnic University
发明人： TRUSHNIKOV, Dmitriy Nikolayevich , BELENKII, Vladimir Yakovlevich
IPC分类号： B23K15/00 , H01J37/21 , H01J37/304
CPC分类号： B23K15/0013 , B23K15/002 , B23K15/0046 , H01J37/21 , H01J37/315 , H01J2237/213 , H01J2237/216 , H01J2237/30472
摘要： The invention relates to the field of electron beam welding and may be used when electron-beam welding structural mate- rials with control and management of the power density of the electron beam directly within the welding process. The method of electron beam welding with operational control of the power density and focus level of the electron beam is differentiated by the fact that it contains stages in which: the electron beam welding is performed with a sinusoidally or linearly oscillating electron beam in the frequency range from 300 to 2,000 Hz; during the welding process, the waveform of the secondary current in the plasma is measured, filtered, and rectified; the filtered-and- rectified or original waveform of the secondary current in the plasma is processed using the synchronous integration method; the magnitude of the delay function, which results from processing the secondary waveform using the synchronous integration method, is measured relative to the wave- form of the current in the deflection coils; the focusing current is controlled while holding the value of the delay function mentioned above at a constant level which corresponds to a specified magnitude of the power density of the electron beam.
摘要翻译：本发明涉及电子束焊接领域，并且可以在电子束焊接结构材料中直接在焊接过程中控制和管理电子束的功率密度的情况下使用。通过电子束焊接的功率密度和聚焦水平的操作控制的方法被电子束区分，其中包括以下事实，其中：电子束焊接在频率范围内以正弦或线性振荡的电子束进行从300到2000Hz; 在焊接过程中，对等离子体中的次级电流的波形进行测量，滤波和整流; 使用同步积分方法处理等离子体中次级电流的滤波和整流或原始波形; 相对于偏转线圈中的电流波形来测量由使用同步积分方法处理次级波形产生的延迟函数的幅度; 控制聚焦电流，同时将上述延迟函数的值保持在与电子束的功率密度的规定大小对应的恒定电平。

5. 发明授权

EP2888070B1 METHOD OF OPERATIONAL CONTROL OF ELECTRON BEAM WELDING BASED ON THE SYNCHRONOUS INTEGRATION METHOD 失效
标题翻译：基于同步积分法的电子束焊接作业控制方法
公开(公告)号：EP2888070B1
公开(公告)日：2018-01-31
申请号：EP13802104.3
申请日：2013-08-23
申请人： Federal State Budgeted Education Institution for Higher Professional Education Perm National Research Polytechnic University
发明人： TRUSHNIKOV, Dmitriy Nikolayevich , BELENKII, Vladimir Yakovlevich
IPC分类号： B23K15/00 , H01J37/21 , H01J37/304
CPC分类号： B23K15/0013 , B23K15/002 , B23K15/0046 , H01J37/21 , H01J37/315 , H01J2237/213 , H01J2237/216 , H01J2237/30472
摘要： The invention relates to the field of electron beam welding and may be used when electron-beam welding structural mate- rials with control and management of the power density of the electron beam directly within the welding process. The method of electron beam welding with operational control of the power density and focus level of the electron beam is differentiated by the fact that it contains stages in which: the electron beam welding is performed with a sinusoidally or linearly oscillating electron beam in the frequency range from 300 to 2,000 Hz; during the welding process, the waveform of the secondary current in the plasma is measured, filtered, and rectified; the filtered-and- rectified or original waveform of the secondary current in the plasma is processed using the synchronous integration method; the magnitude of the delay function, which results from processing the secondary waveform using the synchronous integration method, is measured relative to the wave- form of the current in the deflection coils; the focusing current is controlled while holding the value of the delay function mentioned above at a constant level which corresponds to a specified magnitude of the power density of the electron beam.

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