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1. 发明授权

US10480974B2 Composite MEMS flow sensor on silicon-on-insulator device and method of making the same 有权
公开(公告)号：US10480974B2
公开(公告)日：2019-11-19
申请号：US16017917
申请日：2018-06-25
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/692 , G01F1/708 , G01F7/00 , G01F1/684 , G01F1/696
摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.

2. 发明申请

US20120216629A1 MEMS TIME-OF-FLIGHT THERMAL MASS FLOW METER 有权
标题翻译： MEMS时间飞行热量流量计
公开(公告)号：US20120216629A1
公开(公告)日：2012-08-30
申请号：US13035639
申请日：2011-02-25
申请人： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
发明人： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
IPC分类号： G01F1/708
CPC分类号： G01F1/7084 , G01F1/72
摘要： An apparatus comprising a micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon flow sensor, a flow channel package, and a driving circuitry, which operates in a working principle of thermal time-of-flight (TOF) to measure gas or liquid flow speed, is disclosed in the present invention. The micromachining technique for fabricating this MEMS time-of-flight silicon thermal flow sensor can greatly reduce the sensor fabrication cost by batch production. This microfabrication process for silicon time-of-flight thermal flow sensors provides merits of small feature size, low power consumption, and high accuracy compared to conventional manufacturing methods. Thermal time-of-flight technology in principle can provide accurate flow speed measurements for gases regardless of its gas compositions. In addition, the present invention further discloses the package design and driving circuitry which is utilized by the correlated working principle.
摘要翻译：一种包括微加工（也称为MEMS，微机电系统）硅流量传感器，流动通道封装和驱动电路的装置，其以热时间飞行（TOF）的工作原理工作以测量气体或液体流量速度，在本发明中公开。用于制造这种MEMS飞行时间硅热流量传感器的微加工技术可以通过批量生产大大降低传感器制造成本。与传统的制造方法相比，这种用于硅时间飞行热流传感器的微加工工艺具有小特征尺寸，低功耗和高精度的优点。原理上，热时间飞行技术可以为气体提供准确的流速测量，无论其气体成分如何。此外，本发明还公开了通过相关工作原理利用的封装设计和驱动电路。

3. 发明申请

US20070017285A1 Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods 有权
标题翻译：微加工热质量流量传感器和插入式流量计及其制造方法
公开(公告)号：US20070017285A1
公开(公告)日：2007-01-25
申请号：US11157604
申请日：2005-06-21
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane. This mass flow sensor is operated with two sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates and a second circuit for measuring a flow rate in a second range of flow rates, to significantly increase range of flow rate measurements, while maintains a high degree of measurement accuracy.
摘要翻译：通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成直到底部介电薄膜层暴露。在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。该质量流量传感器用两组电路操作，第一电路用于测量第一流量范围内的流量，以及用于测量在第二流量范围内的流量的第二电路，以显着增加流量范围速率测量，同时保持高度的测量精度。

4. 发明授权

US11927555B2 Micromachined thermal time-of-flight fluidic concentration metering device 有权
公开(公告)号：US11927555B2
公开(公告)日：2024-03-12
申请号：US17330269
申请日：2021-05-25
申请人： Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
发明人： Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
IPC分类号： G01N25/18 , G01F1/68 , G01F1/684 , G01F1/69 , G01F1/692 , G01F1/699 , G01F15/14
CPC分类号： G01N25/18 , G01F1/6845 , G01F1/6847 , G01F1/69 , G01F1/692 , G01F1/699 , G01F15/14
摘要： The design and structure of a fluidic concentration metering device with a full dynamic range utilizing micro-machined thermal time-of-flight sensing elements is exhibited in this disclosure. With an additional identical sensing chip but packaged at the different locations in the measurement fluidic chamber with a closed conduit, the device can simultaneously measure the fluidic concentration and the fluidic flowrate. With a temperature thermistor integrated on the same micro-machined thermal sensing chip, the disclosed device will be able to provide the key processing parameters for the fluidic applications.

5. 发明授权

US10837814B1 Smart gas cylinder cap 有权
公开(公告)号：US10837814B1
公开(公告)日：2020-11-17
申请号：US16572951
申请日：2019-09-17
申请人： Liji Huang , Alok Batra , Venkata Sai Tejeswar Pokkuluri , Chih-Chang Chen
发明人： Liji Huang , Alok Batra , Venkata Sai Tejeswar Pokkuluri , Chih-Chang Chen
IPC分类号： G01F1/68 , G01F1/696 , G01N33/00 , G01F1/684 , F17C13/06 , F17C13/02
CPC分类号： G01F1/696 , F17C13/02 , F17C13/06 , G01F1/6845 , G01N33/0004 , F17C2205/0329 , F17C2250/0443 , F17C2250/0447 , F17C2250/0486
摘要： The design and structure of a smart gas cylinder valve cap coupled with a smart MEMS mass flow meter, an embedded iBeacon or RFID reader and a remote data transmission module, which is capable of formulating an Internet of Things (IoT) system, is demonstrated in the disclosure. The smart gas cylinder cap(s) can be directly used to replace the mechanical valve handwheel or directly attached to the top of the existing mechanical handwheel as a smart data relay, and the cap(s) can either be applied to a single or plural numbers of gas cylinders while the smart gas flow meter shall communicate with the smart gas cap as well as to relay gas consumption data to a designated data center or a “cloud” which can further interface with the users and suppliers of the gas cylinders. The system is beneficial for many of the existing gas cylinder applications such as construction gas process, medical gas racks, gas cylinders for food and beverage, and gas racks for electronics fabrication, where the gas cylinder status, gas consumption as well as cylinder logistics are critical for the applications.

6. 发明授权

US10240723B2 Digital regulated gas dispensing apparatus with a MEMS mass flow meter 有权
公开(公告)号：US10240723B2
公开(公告)日：2019-03-26
申请号：US15609518
申请日：2017-05-31
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： F17C13/02 , F17C13/04 , G01F1/684 , G01F1/696 , A61M16/10 , A61M16/16 , A61M16/00
摘要： The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

7. 发明申请

US20120024054A1 HIGH ACCURACY BATTERY-OPERATED MEMS MASS FLOW METER 有权
标题翻译：高精度电池操作的MEMS质量流量计
公开(公告)号：US20120024054A1
公开(公告)日：2012-02-02
申请号：US12847881
申请日：2010-07-30
申请人： Liji Huang , Kai Peng , Changming Jiang , Wenhong Deng , Chih-Chang Chen
发明人： Liji Huang , Kai Peng , Changming Jiang , Wenhong Deng , Chih-Chang Chen
IPC分类号： G01F1/692
CPC分类号： G01F1/6845
摘要： With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.
摘要翻译：随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加，新技术的开发将是必要的。本发明提出了一种MEMS质量流量计，其与传统的可变区域流量计成本兼容，同时提供所有数字数据处理，包括累积流量测量，用户可编程流量报警和流量数据存储。这些直列式仪表提供管直径从4 mm到100 mm的包装。它由电池供电，可用作独立的手持选项。该仪表还配有工业标准RS485 Modbus通讯接口，便于网络和远程管理。

8. 发明申请

US20110283812A1 Integrated Micro-machined Air Flow Velocity Meter for Projectile Arms 有权
标题翻译：集成微加工空气流量计的弹丸
公开(公告)号：US20110283812A1
公开(公告)日：2011-11-24
申请号：US12786233
申请日：2010-05-24
申请人： Liji Huang , Wei Ching , Chih-Chang Chen
发明人： Liji Huang , Wei Ching , Chih-Chang Chen
IPC分类号： G01F1/44
CPC分类号： G01F1/692 , F41G1/40 , F41G1/46 , F41G1/473 , G01F1/6845
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure air flow velocity on targeting correction for projectiles arms is disclosed in the present invention. The air flow velocity component perpendicular to the travel direction of bullets with respect to projectile arm body (e.g. bullets, shells, or arrows) has main effect to the targeting accuracy. Such effect is pretty much determined by the wind speed and the projectile travel distance. The integration with MEMS mass flow sensor has made the invented apparatus possible to be compact, low power consumption, low cost and high accuracy. The low power consumption characteristic of MEMS mass flow sensor is especially crucial for making the apparatus of present invention feasible by battery operated.
摘要翻译：在本发明中公开了一种与微机械（即微机电微机电系统）微机电系统集成的装置，用于测量针对射弹臂的目标校正的空气流速。相对于射弹臂体（例如子弹，外壳或箭头），子弹的行进方向垂直的气流速度分量对瞄准精度有主要影响。这种影响几乎取决于风速和射弹行程距离。与MEMS质量流量传感器的集成使得本发明的设备可以紧凑，低功耗，低成本和高精度。 MEMS质量流量传感器的低功耗特性对于通过电池供电使本发明的装置变得可行是特别关键的。

9. 外观设计

USD1032386S1 MEMS mass flow controller 有权
公开(公告)号：USD1032386S1
公开(公告)日：2024-06-25
申请号：US29850163
申请日：2022-08-17
申请人： Liji Huang
设计人： Liji Huang
摘要： FIG. 1 is a front right perspective view of a MEMS mass flow controller in accordance with the present design.
FIG. 2 is a front view for the MEMS mass flow controller.
FIG. 3 is a rear view thereof.
FIG. 4 is a left side plan view thereof.
FIG. 5 is a right side plan view thereof.
FIG. 6 is a top view thereof; and,
FIG. 7 is a bottom view thereof.
Broken lines are used to show environment and boundaries that form no part of the claimed design.

10. 发明授权

US08644693B2 Integrated micromachining proximity switch sensors in air/oil lubricators 有权
标题翻译：空气/油润滑器中的集成微加工接近开关传感器
公开(公告)号：US08644693B2
公开(公告)日：2014-02-04
申请号：US12796565
申请日：2010-06-08
申请人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
发明人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
IPC分类号： F24H1/10
CPC分类号： G01N33/2888 , G01N25/18
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
摘要翻译：本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。

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