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1. 发明授权

US06956210B2 Methods for preparing samples for atom probe analysis 失效
标题翻译：原子探针分析样品的制备方法
公开(公告)号：US06956210B2
公开(公告)日：2005-10-18
申请号：US10687111
申请日：2003-10-15
申请人： Trung T. Doan
发明人： Trung T. Doan
IPC分类号： B23K26/36 , G01N1/04 , G01N1/32 , G01Q30/04 , G01Q60/00 , H01J49/16 , G01N1/28
CPC分类号： H01J49/164 , B23K26/364 , G01N1/32 , G01N2001/045
摘要： The present disclosure provides methods for preparing samples for atom probe analysis and methods for analyzing such samples. In one exemplary implementation, a surface of the sample may be positioned with respect to a laser source and laser energy may be directed from the laser source toward the sample surface, removing material from the sample to define an annulus about a sample column. The sample column may be provided with a reduced-diameter apex at its outward end, e.g., by etching. This apex may be juxtaposed with an electrode of an atom probe and material may be selectively removed from the apex for analysis by controlling energy delivered to the apex, e.g., by the electrode.
摘要翻译：本公开提供了用于制备原子探针分析的样品的方法和用于分析这些样品的方法。在一个示例性实施方案中，样品的表面可以相对于激光源定位，并且激光能量可以从激光源朝向样品表面引导，从样品中去除材料以限定围绕样品柱的环带。样品柱可以在其外端例如通过蚀刻设置有直径较小的顶点。该顶点可以与原子探针的电极并置，并且可以通过例如通过电极控制递送到顶点的能量来选择性地从顶点移除材料用于分析。

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